差压式测风微传感器敏感元件的设计
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摘要
目的提高测风微传感器的测量准确性。方法首先通过有限元仿真软件对差压式测风微传感器敏感元件材料进行仿真,确定结构参数;其次对风测量元件结构周边的风压分布进行模拟,建立最佳风压分布方程,并基于风压分布方程设计风速风向解算算法。结果通过对风压分布的仿真与分析,提出了多导风孔的结构设计及带硅岛压力膜作为风压感压膜的方法。结论该方法提高了测风微传感器的测量准确性。
Objective To improve the measurement accuracy of wind micro sensor. Methods Firstly, the finite element simulation software was used to simulate the material of the sensitive element for the differential pressure micro sensor to determine the structural parameters. Secondly, the wind pressure distribution around the structure of the wind measurement element was simulated to establish an optimal wind pressure distribution equation; and the wind speed and direction calculation algorithm was designed based on the wind pressure distribution equation. Results Through simulation and analysis of the wind pressure distribution, the structural design of multiple air holes and the method of taking the pressure film with silicon island as the pressure sensitive film were proposed. Conclusion The method improves measurement accuracy of the wind micro sensor.
Objective To improve the measurement accuracy of wind micro sensor. Methods Firstly, the finite element simulation software was used to simulate the material of the sensitive element for the differential pressure micro sensor to determine the structural parameters. Secondly, the wind pressure distribution around the structure of the wind measurement element was simulated to establish an optimal wind pressure distribution equation; and the wind speed and direction calculation algorithm was designed based on the wind pressure distribution equation. Results Through simulation and analysis of the wind pressure distribution, the structural design of multiple air holes and the method of taking the pressure film with silicon island as the pressure sensitive film were proposed. Conclusion The method improves measurement accuracy of the wind micro sensor.
引文
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[3]张远征.差压式风速风向传感器的研究[D].北京:煤炭科学研究总院,2011.
[4]DU Li-dong,ZHAO Zhan,PANG Cheng,et al.MEMS-Based Micro Solid State Drag Force Wind Sensor[J]..纳密技术与精密工程,2009,7(4):370-374.
[5]许高斌.MEMS表面微加工工艺技术[J].测控技术,2006,25(4):26-29.
[6]李晔辰,孙承松.ANSYS在硅岛膜设计中的应用[J].传感器世界,2002(11):26-28.
[7]杜利东,赵湛,庞程.MEMS固态风速风向传感器的设计与制作[J].微纳电子技术,2007(7/8):245-248.
[8]李晔辰.硅电容差压传感器的研制[D].沈阳:沈阳工业大学,2003.
[9]黄庆安.硅微机械加工技术[J].北京:科学出版社,1996.
[10]黄庆安,童勤义.SiO2钝化膜对硅/玻璃静电键合的影响[J].半导体学报,1995,16(5):391-394.