单晶锗光学表面数控高速抛光优化试验
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摘要
为研究单晶锗镜片表面光洁度无法达到要求的加工技术难题,基于数控高速抛光方法,开展了聚氨酯和沥青两种抛光模的数控高速抛光优化试验,以Preston理论为基础,通过不断优化工艺流程和参数,结合运动轨迹仿真和功率谱密度计算,对比分析了两种抛光模的加工效率和表面质量控制能力.试验结果表明:两种抛光方式均能获得较高的面形精度,聚氨酯抛光模具有较高的加工效率,但光学表面微观形貌控制能力较差,沥青模抛光得到的表面粗糙度RMS相比聚氨酯模提升近3 nm.通过单晶锗光学表面数控高速抛光试验,最终优化并提出了聚氨酯初抛光与沥青精抛光相结合的方式,并进行了试验验证.
To solve the technical problem that the surface finish of single crystal germanium lens cannot meet requirements, this paper carries out numerical control high-speed polishing optimization tests on polyurethane and asphalt polishing molds based on the numerical control high-speed polishing technique. According to the Preston theory, the processing efficiency and the surface quality control ability of the two polishing molds were compared and analyzed through continuous optimization of process flow and parameters with the combination of motion trajectory simulation and power spectral density calculation. Experimental results show that both of the polishing molds obtained high surface accuracies. The polyurethane mold had higher processing efficiency, but its ability to control the microstructure of the surface was poor. The surface roughness RMS of the asphalt polishing mold improved nearly 3 nm compared with that of the polyurethane polishing mold. Finally, after optimization, the combination of polyurethane initial polishing and asphalt polishing technique was proposed and verified by experiments.
To solve the technical problem that the surface finish of single crystal germanium lens cannot meet requirements, this paper carries out numerical control high-speed polishing optimization tests on polyurethane and asphalt polishing molds based on the numerical control high-speed polishing technique. According to the Preston theory, the processing efficiency and the surface quality control ability of the two polishing molds were compared and analyzed through continuous optimization of process flow and parameters with the combination of motion trajectory simulation and power spectral density calculation. Experimental results show that both of the polishing molds obtained high surface accuracies. The polyurethane mold had higher processing efficiency, but its ability to control the microstructure of the surface was poor. The surface roughness RMS of the asphalt polishing mold improved nearly 3 nm compared with that of the polyurethane polishing mold. Finally, after optimization, the combination of polyurethane initial polishing and asphalt polishing technique was proposed and verified by experiments.
引文
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[2] 肖奇.纳米半导体材料与器件[M].北京:化学工业出版社,2013 XIAO Qi.Nano-semiconductor materials and devices[M].Beijing:Chemical Industry Press,2013
[3] 张亚萍,蒋敏,杨成林,等.Ge单晶片的碱性化学腐蚀抛光研究[J].浙江理工大学学报,2010,27(2):272 ZHANG Yaping,JIANG Min,YANG Chenglin,et al.Study on thealkali etching and polishing of single-crystalline germanium wafer[J].Journal of Zhejiang Sci-Tech University,2010,27(2):272
[4] 李军琪,张云龙,苏军,等.微圆弧金刚石刀具车削锗单晶衍射元件[J].红外与激光工程,2013,42(11):3053 LI Junqi,ZHANG Yunlong,SU Jun,et al.Turning of DOE Ge single crystal with micro-circle diamond tool[J].Infrared and Laser Engineering,2013,42(11):3053
[5] 沈正祥,王占山,马彬,等.利用功率谱密度函数表征光学薄膜基底表面粗糙度[J].光学仪器,2006,28(4):141 SHEN Zhengxiang,WANG Zhanshan,MA Bin,et al.Specifying surface roughness of optical film substrate using the power spectral density[J].Optical Instruments,2006,28(4):141
[6] LAWSON J K,WOLFE C R,MANES K R,et al.Specification of optical components using the power spectral density function[J].Proceedings of SPIE - The International Society for Optical Engineering,1995,2536:38
[7] 王鹤岩,蔡立,朴成镐.光学零件加工主要难点的分析光学技术[J].光学技术,2006,32(8):410 WANG Heyan,CAI Li,PIAO Chenghao.Analysis on the main difficult points of machining optical parts[J].Optical Technique,2006,32(8):410
[8] QUEISSER H J.The conquest of microchip[M].Cambridge:Harvard University Press,1988
[9] 辛企明,蒋月娟.21世纪初光学零件加工技术的发展趋势[J].光电子技术与信息,2000(3):10 XIN Qiming,JIANG Yuejuan.The development trend of optical parts processing technology in the early 21st Century[J].Optoelectronic Technology & Information,2000(3):10
[10]曹天宁,周鹏飞.光学零件制造工艺学[M].北京:机械工业出版社,1981 CAO Tianning,ZHOU Pengfei.Optical parts manufacturing technology[M].Bejing:Mechanical Industry Press,1981
[11]翟永青.稀土抛光粉的应用和发展[J].河北化工,1998(1):40 ZHAI Yongqing.Application and development of rare earth polishing powder[J].Hebei Chemical Industry,1998(1):40
[12] CUMBO M J.Chemo-mechanical interactions in optical polishing[D].New York:University of Rochester,1993
[13]唐赫岳.单晶锗数控非球面加工技术研究[D].长春:长春理工大学,2013 TANG Heyue.Research on numberical control processing technology of single-crystal-germanium aspheric surface[D].Changchun:Changchun University of Science and Technology,2013
[14]王国强.国外光学零件加工技术的最新发展[J].光电工程,1981(6):53 WANG Guoqiang.The latest development of foreign optical parts processing technology[J].Photoelectric Engineering,1981(6):53
[15]朴承镐,蔡立.国内外非球面光学零件加工技术的现状及新进展[J].光学技术,1993(5):7 PIAO Chenggao,CAI Li.Current status quo and new headway of processing technique of domestic and foreign aspherical optical spare parts[J].Optical Technique,1993(5):7