衍射元件表面粗糙度对衍射效率的影响
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摘要
基于多层衍射光学元件的位相延迟表达式,提出了单点金刚石车削影响下的多层衍射光学元件衍射效率和带宽积分平均衍射效率的数学模型,并给出了相应的分析表达式.以基底材料分别是硒化锌和硫化锌构成的多层衍射光学元件在近红外波段(1.4~2.5m)的应用为例进行分析.结果表明表面粗糙度会导致多层衍射光学元件衍射效率和带宽积分平均衍射效率的明显降低,从而降低了混合成像光学系统的成像质量.因此,单点金刚石车削衍射元件时,要根据使用需求制定合理的表面粗糙度加工误差.
Based on the expression of phase delay of the multi-layer diffractive optical elements,the mathematical model of diffraction efficiency and polychromatic integral diffraction efficiency under the influence of single-point diamond turning is proposed,and the analytical expressions are correspondingly provided.The application of the multi-layer diffractive optical elements whose substrates are composed of ZnSe and ZnS for each layer is simulated and analyzed in near-infrared waveband(1.4~2.5 m).The results show that the surface roughness error leads to a decrease in the diffraction efficiency and the polychromatic integral diffraction efficiency of the multilayer diffractive optical elements,making the imaging quality of the hybrid imaging optical system decreased.Therefore,when the single-point diamond turning is used to cut optical elements,the result is instructive to draw out justified limit surface roughness error according to usage requirements.
Based on the expression of phase delay of the multi-layer diffractive optical elements,the mathematical model of diffraction efficiency and polychromatic integral diffraction efficiency under the influence of single-point diamond turning is proposed,and the analytical expressions are correspondingly provided.The application of the multi-layer diffractive optical elements whose substrates are composed of ZnSe and ZnS for each layer is simulated and analyzed in near-infrared waveband(1.4~2.5 m).The results show that the surface roughness error leads to a decrease in the diffraction efficiency and the polychromatic integral diffraction efficiency of the multilayer diffractive optical elements,making the imaging quality of the hybrid imaging optical system decreased.Therefore,when the single-point diamond turning is used to cut optical elements,the result is instructive to draw out justified limit surface roughness error according to usage requirements.
引文
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[2]GANDHI V,ORAVA J,TUOVINEN H,et al.Diffractive optical elements for optical identification[J].Applied Optics,2015,54(7):1606-1611.
[3]ANDREW W,MANE S,SIMONE C.Infrared hybrid optics with high broadband efficiency[C].SPIE,2005,5874:58740G.
[4]TAKEHIKO N,HIDEKI O.Study of multi-layer diffractive optical elements,and method of application to optical lens system[J].Journal of The Society of Photographic Science and Technology of Japan,2002,65(3):180-185.
[5]PIAO Ming-xu,CUI Qing-feng,ZHU Hao,et al.Diffraction efficiency change of multilayer diffractive optics with environmental temperature[J].Journal of Optics,2014,16:035707.
[6]LIU Zhi-hui,YANG Huan,SHI Zhen-dong.Homogenization of semiconductor laser using diffractive micro-lens array[J].Chinese Journal of Lasers,2014,41(1):01020051.刘志辉,杨欢,石振东.衍射微透镜阵列用于半导体激光光束匀化[J].中国激光,2014,41(1):01020051.
[7]MAO Wen-feng,ZHANG Xin,QU He-meng,el al.Broad dual-band kinform infrared double-layer diffractive optical system design[J].Acta Optica Sinica,2014,34(10):1022002.毛文峰,张新,曲贺盟,等.红外双色宽波段高衍射效率衍射光学系统设计[J].光学学报,2014,34(10):1022002.
[8]XUE Chang-xi,CUI Qing-feng.Design of multilayer diffractive optical elements with polychromatic integral diffraction efficiency[J].Optics Letters,2010,35:986-988.
[9]JUERGENS R C,HAMILTON SHEPARD R,SCHAEFER J P.Simulation of single point diamond turning fabrication process errors[C].SPIE,2003,5174:93-104.
[10]BITTNER R F.Tolerancing of single diamond turned diffractive optical elements and optical surfaces[J].JEOS:RP,2007,2:07028.
[11]YANG Liang-liang,CUI Qing-feng,LIU Tao,et al.Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements[J].Applied Optics,2011,50(32):6128-6133.
[12]MAO Shan,CUI Qing-feng,PIAO Ming-xu.Tolerance analysis of multilayer diffractive optics based on polychromatic integral diffraction efficiency[J].Applied Optics,2015,54(36):9528-9532.
[13]YANG Hong-fang,XUE Chang-xi,LI Chuang,et al.Optimal design of multilayer diffractive optical elements with effective area method[J].Applied Optics,2016,55(7):1675-1682.
[14]MAO Shan,CUI Qing-feng.Effecton polychromatic integral diffraction efficiency for two-layer diffractive optics[J].Acta Optica Sinica,2016,36(1):0105001.毛珊,崔庆丰.双层衍射元件加工误差对带宽积分平均衍射效率的影响[J].光学学报,2016,36(1):0105001.
[15]WOOD A P,ROGERS P J.Diffractive optics in modern optical engineering[C].International Society for Optics and Photonics,2005,5865:83-97.
[16]DUAN K,ZDENKO Z,CLAUDIO F,et al.Cross-sectional TEM study of subsurface damage in SPDT machining of germanium optics[J].Applied Optics,2018,57(8):1940-1943.
[17]STEARNS D G,GAINES D P,SWEENEY D W,et al.Nonspecular X-ray scattering in a multilayer coated imaging system[J].Applied Physics,1998,84(2):1003-1028.
[18]XUE Chang-xi,CUI Qing-feng,PAN Chun-yan,et al.Design of multi-layer diffractive optical elements with bandwidth integral average diffraction efficiency[J].Acta Optica Sinica,2010,30(10):3016-3020.薛常喜,崔庆丰,潘春艳,等.基于带宽积分平均衍射效率的多层衍射光学元件设计[J].光学学报,2010,30(10):3016-3020.