高衍射效率凸面闪耀光栅的研制
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摘要
基于严格耦合波分析,研究凸面闪耀光栅的衍射特性;采用全息光刻-离子束刻蚀法制作中心周期为2.45μm、曲率半径为51.64 mm、口径为17 mm的凸面闪耀光栅,闪耀角为6.4°,顶角为141°。结果表明,在整个可见-近红外波段,所制作光栅的1级衍射效率大于40%,在闪耀波长处1级衍射效率大于75%。
The diffraction characteristics of the convex blazed grating are investigated by using rigorous coupled-wave analysis. The convex blazed grating with a central period of 2.45 μm, a curvature radius of 51.64 mm, and an aperture of 17 mm is fabricated by using holographic lithography-scanning ion beam etching method. The blazed angle is 6.4°, and the vertex angle is 141°. The results show that the first-order diffraction efficiency of the proposed grating is greater than 40% in the whole visible and near-infrared band, and the first-order diffraction efficiency at blaze wavelength is greater than 75%.
The diffraction characteristics of the convex blazed grating are investigated by using rigorous coupled-wave analysis. The convex blazed grating with a central period of 2.45 μm, a curvature radius of 51.64 mm, and an aperture of 17 mm is fabricated by using holographic lithography-scanning ion beam etching method. The blazed angle is 6.4°, and the vertex angle is 141°. The results show that the first-order diffraction efficiency of the proposed grating is greater than 40% in the whole visible and near-infrared band, and the first-order diffraction efficiency at blaze wavelength is greater than 75%.
引文
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[4] Ma Y P, Zhang W, Liu D X. Characteristics of hyperspectral reconnaissance and threat to ground military targets[J]. Aerospace Shanghai, 2012, 29(1): 37-40, 59. 麻永平, 张炜, 刘东旭. 高光谱侦察技术特点及其对地面军事目标威胁分析[J]. 上海航天, 2012, 29(1): 37-40, 59.
[5] Liu L X, Li M Z, Zhao Z G, et al. Recent advances of hyperspectral imaging application in biomedicine[J]. Chinese Journal of Lasers, 2018, 45(2): 0207017. 刘立新, 李梦珠, 赵志刚, 等. 高光谱成像技术在生物医学中的应用进展[J]. 中国激光, 2018, 45(2): 0207017.
[6] Zeng S, Kuang R Y, Chen Y B. Hyperspectral characteristic band selection and spectral classification of five typical vegetation in Poyang Lake[J]. Laser & Optoelectronics Progress, 2017, 54(12): 123002. 曾帅, 况润元, 陈彦兵. 鄱阳湖5种典型植被高光谱特征波段选择与光谱分类识别[J]. 激光与光电子学进展, 2017, 54(12): 123002.
[7] Mouroulis P. Pushbroom imaging spectrometer with high spectroscopic data fidelity: experimental demonstration[J]. Optical Engineering, 2000, 39(3): 808-816.
[8] Wang Y M, Lang J W, Wang J Y. Status and prospect of space-borne hyperspectral imaging technology[J]. Laser & Optoelectronics Progress, 2013, 50(1): 010008. 王跃明, 郎均慰, 王建宇. 航天高光谱成像技术研究现状及展望[J]. 激光与光电子学进展, 2013, 50(1): 010008.
[9] Mouroulis P, Wilson D W, Maker P D, et al. Convex grating types for concentric imaging spectrometers[J]. Applied Optics, 1998, 37(31): 7200-7208.
[10] Liu Q, Wu J H. Analysis and comparison of the scalar diffraction theory and coupled-wave theory about grating[J]. Laser Journal, 2004, 25(2): 31-34. 刘全, 吴建宏. 光栅的标量衍射理论与耦合波理论的分析比较[J]. 激光杂志, 2004, 25(2): 31-34.
[11] Moharam M G, Gaylord T K, Grann E B, et al. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J]. Journal of the Optical Society of America A, 1995, 12(5): 1068-1076.
[12] Liu Q, Wang H B, Sun P, et al. Fabrication of the convex blazed grating[J]. Proceedings of SPIE, 2010, 7848: 78480V.
[13] Wang H B, Liu Q, Wu J H. Fabrication of convex blazed grating by Ar+ ion-beam etching[J]. Acta Optica Sinica, 2011, 31(4): 0405002. 汪海宾, 刘全, 吴建宏. Ar+离子束刻蚀制作凸面闪耀光栅[J]. 光学学报, 2011, 31(4): 0405002.