超精密车削单晶锗表面性能分析
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摘要
单晶锗是典型的红外光学晶体材料,其加工表面的评价方法大都局限于面形精度,而加工过程所产生的位错及晶面间距变化也会影响单晶锗的使用性能。为了全面地评价单晶锗加工后的表面性能,通过表面粗糙度轮廓仪、X射线衍射仪等设备,对超精密车削的单晶锗平面及曲面进行了表面粗糙度和X射线检测,获得了针对单晶锗平面的表面粗糙度与位错密度相结合的性能评价方法,及针对单晶锗曲面的表面粗糙度与晶面间距变化程度相结合的性能评价方法。相关研究对单晶锗在红外光学及其它领域的加工应用有重要意义。
Single-crystal germanium is a typical infrared optical crystal material. The evaluation methods of the processed surface are mostly focus on the surface accuracy, but the performance of single-crystal germanium can be affected by the dislocations generated in the processing and variation of the crystal plane spacing. In order to comprehensively evaluate the processed surface properties of single-crystal germanium,surface roughness and X-ray inspection of ultra-precision turned single-crystal planes and curved surfaces were carried out by means of a surface roughness measuring instrument, X-ray diffractometer, etc.Performance evaluation method for combining the surface roughness and dislocation density of single-crystal germanium plane and that for combining surface roughness and percentage change incrystal plane spacing of single-crystal germanium curved surface are obtained. Related research is of great significance for the processing of single-crystal germanium in infrared optics and other fields.
Single-crystal germanium is a typical infrared optical crystal material. The evaluation methods of the processed surface are mostly focus on the surface accuracy, but the performance of single-crystal germanium can be affected by the dislocations generated in the processing and variation of the crystal plane spacing. In order to comprehensively evaluate the processed surface properties of single-crystal germanium,surface roughness and X-ray inspection of ultra-precision turned single-crystal planes and curved surfaces were carried out by means of a surface roughness measuring instrument, X-ray diffractometer, etc.Performance evaluation method for combining the surface roughness and dislocation density of single-crystal germanium plane and that for combining surface roughness and percentage change incrystal plane spacing of single-crystal germanium curved surface are obtained. Related research is of great significance for the processing of single-crystal germanium in infrared optics and other fields.
引文
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[3]谢启明,李茂忠,陈俊其,等.锗晶体二维转鼓单点金刚石飞切工艺的研究[J].新技术新工艺,2009(3):22-24.XIE Qiming,LI Maozhong,CHEN Junqi,et al.Study on the single-point diamond fly-cutting process of two-dimensional drum of germanium crystal[J].New Technology and New Process,2009(3):22-24.
[4]Adnan A S,Ramalingam V,Ko J H,et al.Nano texture generation in single point diamond turning using backside patterned workpiece[J].Manufacturing Letters,2014,2:44-48.
[5]苗实,史国权,石广丰,等.单晶锗各向异性对加工表面粗糙度的影响[J].机械科学与技术,2017,36(1):89-94.MIAO Shi,SHI Guoquan,SHI Guangfeng,et al.Effect of anisotropy of single crystal crucible on the roughness of machined surface[J].Journal of Mechanical Science and Technique,2017,36(1):89-94.
[6]赵彪.单晶锗微纳米切削脆塑转变机理研究[D].昆明:昆明理工大学,2017.ZHAO Biao.Study on the brittle-plastic transition mechanism of micro-nano cutting of single crystal crucible[D].Kunming:Kunming University of Science and Technology,2017.
[7]赖敏.单晶锗纳米切削机理和切削极限的研究[D].天津:天津大学,2016.LAI Min.Nanocrystalline cutting mechanism and cutting limit for single crystal crucible[D].Tianjin:Tianjin University,2016.
[8]YANG Guangliang,Richard Jones,Franz Klein,et al.Rocking curve imaging for diamond radiator crystal selection[J].Diamond and Related Materials,2010,19:719-722.
[9]Herrmann M,Kempa P B,Doyle S.Microstructure of energetic crystal grain by grain via rocking curve[J].Zeitschrift für Kristallographie Supplements,2007(s26):557-562.
[10]周小清,徐容,黄明,等.用高分辨X射线摇摆曲线表征RDX单晶的位错密度[C]//重庆市人民政府、中国工程物理研究院.全国危险物质与安全应急技术研讨会论文集(上),2011:6.ZHOU Xiaoqing,XU Rong,HUANG Ming,et al.Characterization of Dislocation Density of RDX Single Crystals by High Resolution X-ray Rocking Curve[C]//Chongqing Municipal People's Government,China Academy of Engineering Physics.National Hazardous Substances and Safety Emergency Technology Conference Proceedings,2011:6.
[11]LI Nan,FENG Deshen,YIN Shiping,et al.Study on dislocation multiplication in the head of Germanium single crystal[J].Rare Metals,2006,25(S2):59-64.
[12]HE S H,HE B B,ZHU K Y,et al.Evolution of dislocation density in bainitic steel:modeling and experiments[J].Acta Materialia,2018,149:46-56.