光学元件亚表面损伤散射特性仿真研究
|
摘要
光学元件在研抛过程中不可避免地引入亚表层损伤缺陷,会破坏基底材料的均匀性,使入射的光波发生散射现象,严重影响产品光学性能。损伤隐蔽复杂的特点使得对其散射信号的研究变得十分困难。一种基于光散射法的亚表面无损检测方法——激光共焦显微检测方法,利用亚表面损伤对入射光的散射调制信号分析光学元件的亚表面损伤信息,具有快速、准确的特点。针对损伤的散射特性,结合时域有限差分法(FDTD),对颗粒状和微裂纹两类特殊损伤建立电磁仿真模型,研究聚焦光入射的散射光场分布,以及不同深度下探测得到光强变化曲线,得出损伤光强探测曲线能够反映出颗粒尺寸与深度及微裂纹宽度与深度的信息。研究结果对亚表面损伤无损探测方法的探索具有一定的理论指导价值。
The sub-surface damage of the optical elements due to grinding and polishing may destroy the uniformity of the base material, result in the scattering of incident light, and seriously affect the optical properties of the product. It is very difficult to study the scattered signal due to the complex characteristics of the damage. The laser confocal microscopy testing based on the light scattering method is a fast and accurate sub-surface nondestructive testing method. It uses the sub-surface damage to the incident light scattering modulation signal to analyze the sub-surface damage information of the optical component. Aiming at the scattering characteristics of the damage, the Finite Difference Time Domain( FDTD) method is used to establish the electromagnetic simulation model for the special damage of particles and microcracks. The scattering field distribution of the incident light is studied, and the curve of the light intensity is detected at different depths. The damage light intensity detection curve can reflect the information of the size and depth of the particles and the width and depth of the microcracks. The results of the study have important theoretical significance for the study on nondestructive detection of sub-surface damage of optical elements.
The sub-surface damage of the optical elements due to grinding and polishing may destroy the uniformity of the base material, result in the scattering of incident light, and seriously affect the optical properties of the product. It is very difficult to study the scattered signal due to the complex characteristics of the damage. The laser confocal microscopy testing based on the light scattering method is a fast and accurate sub-surface nondestructive testing method. It uses the sub-surface damage to the incident light scattering modulation signal to analyze the sub-surface damage information of the optical component. Aiming at the scattering characteristics of the damage, the Finite Difference Time Domain( FDTD) method is used to establish the electromagnetic simulation model for the special damage of particles and microcracks. The scattering field distribution of the incident light is studied, and the curve of the light intensity is detected at different depths. The damage light intensity detection curve can reflect the information of the size and depth of the particles and the width and depth of the microcracks. The results of the study have important theoretical significance for the study on nondestructive detection of sub-surface damage of optical elements.
引文
[1]伍秀玭,高万荣,张运旭,等.非破坏性玻璃亚表面缺陷定量检测新方法[J].中国激光,2017,44(6):157-164.
[2]王景贺,张磊,王洪祥,等.基于荧光共聚焦技术熔石英亚表层损伤检测方法[J].中国激光,2015,42(4):186-194.
[3]田爱玲,王会婷,党娟娟,等.抛光表面的亚表层损伤检测方法研究[J].光子学报,2013,42(2):214-218.
[4]王华东,张泰华.光学材料亚表面损伤的表征与检测技术研究进展[J].激光与光电子学进展,2017,54(10):25-36.
[5]TROST M,HERFFURTH T,SCHMITZ D,et al.Evaluation of subsurface damage by light scattering techniques[J].Applied Optics,2013,52(26):6579-6588.
[6]王宁昌,姜峰,黄辉,等.脆性材料亚表面损伤检测研究现状和发展趋势[J].机械工程学报,2017,53(9):170-179.
[7]王辉.基于层析成像法的亚表层损伤散射特性研究[D].西安:西安工业大学,2013.
[8]田爱玲,田玉珺,王春慧,等.聚焦光在亚表面损伤介质中的散射特性[J].强激光与粒子束,2014,26(9):121-127.
[9]张磊,黄利,陈伟,等.熔石英和磷酸盐钕玻璃表面三角形微裂纹对入射光的散射分析[J].强激光与粒子束,2011,23(2):381-386.
[10]田玉珺.光在亚表面损伤介质中的传播特性研究[D].西安:西安工业大学,2015.
[11]WANG C G,CUI D L,YAN Z Y,et al.Finite element triangle mesh generation in planar area[J].Computer Integrated Manufacturing Systems,2011,17(2):256-260.
[12]李长侑.电磁散射问题的FDTD分析和仿真软件实现[D].西安:西安电子科技大学,2012.
[13]贺晋芝.适用于FDTD方法的目标电磁建模研究与应用[D].南京:南京航空航天大学,2014.
[14]苏倩倩,张国文,陶华,等.非线性介质表面缺陷对激光光场的调制[J].强激光与粒子束,2012,24(11):2585-2590.
[2]王景贺,张磊,王洪祥,等.基于荧光共聚焦技术熔石英亚表层损伤检测方法[J].中国激光,2015,42(4):186-194.
[3]田爱玲,王会婷,党娟娟,等.抛光表面的亚表层损伤检测方法研究[J].光子学报,2013,42(2):214-218.
[4]王华东,张泰华.光学材料亚表面损伤的表征与检测技术研究进展[J].激光与光电子学进展,2017,54(10):25-36.
[5]TROST M,HERFFURTH T,SCHMITZ D,et al.Evaluation of subsurface damage by light scattering techniques[J].Applied Optics,2013,52(26):6579-6588.
[6]王宁昌,姜峰,黄辉,等.脆性材料亚表面损伤检测研究现状和发展趋势[J].机械工程学报,2017,53(9):170-179.
[7]王辉.基于层析成像法的亚表层损伤散射特性研究[D].西安:西安工业大学,2013.
[8]田爱玲,田玉珺,王春慧,等.聚焦光在亚表面损伤介质中的散射特性[J].强激光与粒子束,2014,26(9):121-127.
[9]张磊,黄利,陈伟,等.熔石英和磷酸盐钕玻璃表面三角形微裂纹对入射光的散射分析[J].强激光与粒子束,2011,23(2):381-386.
[10]田玉珺.光在亚表面损伤介质中的传播特性研究[D].西安:西安工业大学,2015.
[11]WANG C G,CUI D L,YAN Z Y,et al.Finite element triangle mesh generation in planar area[J].Computer Integrated Manufacturing Systems,2011,17(2):256-260.
[12]李长侑.电磁散射问题的FDTD分析和仿真软件实现[D].西安:西安电子科技大学,2012.
[13]贺晋芝.适用于FDTD方法的目标电磁建模研究与应用[D].南京:南京航空航天大学,2014.
[14]苏倩倩,张国文,陶华,等.非线性介质表面缺陷对激光光场的调制[J].强激光与粒子束,2012,24(11):2585-2590.