基于模糊逻辑的晶圆制造整体式AMHS动态调度方法
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摘要
为提高晶圆制造整体式自动化物料搬运系统和晶圆加工系统的综合性能,提出了一种基于模糊逻辑控制的动态调度方法。该方法实时采集系统中的晶圆卡交货期、晶圆卡等待时间和AMHS搬运负载情况等信息,通过模糊逻辑控制模型动态调整系统当前调度规则,从而实现OHT实时高效搬运晶圆。仿真实验表明:基于模糊逻辑控制的动态调度方法在OHT平均利用率、晶圆平均搬运时间、晶圆平均等待时间和晶圆平均交货期满意度等性能指标方面优于传统单一规则,验证了该方法的有效性。
To improve comprehensive performances of the unified automated material handling system(AMHS) and semiconductor wafer fabrication system(SWFS), a fuzzy logic control based dynamic scheduling approach was proposed. The SWFS′s information such as wafer lot′s due date, wafer lot′s waiting time and AMHS′s loading ratio were collected in real-time in this approach. Then, the appropriate scheduling rule was dynamically selected by fuzzy logic control model according to the collected information, thereby the wafer lots were transported by OHTs in real-time and efficiently. Simulation experiments showed that the proposed fuzzy logic control based dynamic scheduling approach had better comprehensive performances than the traditional single scheduling rules in terms of OHT′s average utilization ratio, average delivery time, average waiting time and average due date satisfaction rate of wafer lots, and meanwhile had better effectiveness.
To improve comprehensive performances of the unified automated material handling system(AMHS) and semiconductor wafer fabrication system(SWFS), a fuzzy logic control based dynamic scheduling approach was proposed. The SWFS′s information such as wafer lot′s due date, wafer lot′s waiting time and AMHS′s loading ratio were collected in real-time in this approach. Then, the appropriate scheduling rule was dynamically selected by fuzzy logic control model according to the collected information, thereby the wafer lots were transported by OHTs in real-time and efficiently. Simulation experiments showed that the proposed fuzzy logic control based dynamic scheduling approach had better comprehensive performances than the traditional single scheduling rules in terms of OHT′s average utilization ratio, average delivery time, average waiting time and average due date satisfaction rate of wafer lots, and meanwhile had better effectiveness.
引文
[1] 朱登洁,吴立辉.基于排队网络的晶圆制造自动化物料运输系统性能模型[J].计算机集成制造系统,2014,20(9):2267-2274.
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[3] 张洁,潘聪,秦威,等.基于复合规则的Interbay物料运输系统多目标调度方法[J].计算机集成制造系统,2016,22(8):1965-1976.
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[7] Pan C,Zhang J,Qin W.Real-time OHT Scheduling Mechanism for the Interbay Automated Material Handling System with Shortcuts and Bypasses[J].Chinese Journal of Mechanical Engineering,2017,30(3):663-675.
[8] Egbelu P,Tanchoco J A.Characterization of automatic guided vehicle scheduling rules [J].International Journal of Production Research,1984,22(3):359-374.
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[13] Mok P Y,Kwong C K,Wong W K.Optimisation of fault-tolerant fabric-cutting schedules using genetic algorithms and fuzzy set theory [J].European Journal of Operational Research,2007,177(3):1876-189.
[14] Wang C N,Liao D Y.Expeditious Hot Lots Handling in 300mm Semiconductor Foundry[C]// IEEE International Conference on Systems,Man and Cybernetics.IEEE,2006:4677-4681.
[15] Yavuz A.Bozer,Ying-Jiun Hsieh.Throughput performance analysis and machine layout for discrete-space closed-loop conveyors[J].IIE Transactions,2005,37(1):77-89.
[16] Montgomery D C.Design and analysis of experiments [M].Wiley,2007.
[2] Lin J T,Wang F K,Chang Y M.A hybrid push/pull-scheduling rule for a photo bay in a 300 mm wafer fab[J].Robotics & Computer Integrated Manufacturing,2006,22(1):47-55.
[3] 张洁,潘聪,秦威,等.基于复合规则的Interbay物料运输系统多目标调度方法[J].计算机集成制造系统,2016,22(8):1965-1976.
[4] Nakamura R,Sawada K,Shin S H,et al.Simultaneous optimization of scheduling and routing for OHT systems via hybrid system modeling[C] // IECON 2013-39th Annual Conference of the IEEE Industrial Electronics Society,IEEE,2013:4416-4421.
[5] 周炳海,周琪,郑雯.半导体制造AMHS中悬挂式小车多因素调度方法[J].北京理工大学学报,2014,34(6):603-606.
[6] 吴立辉,朱登洁,张洁.一种Intrabay物料搬运系统的多目标动态调度方法[J].中国机械工程,2013,24(6):769-774.
[7] Pan C,Zhang J,Qin W.Real-time OHT Scheduling Mechanism for the Interbay Automated Material Handling System with Shortcuts and Bypasses[J].Chinese Journal of Mechanical Engineering,2017,30(3):663-675.
[8] Egbelu P,Tanchoco J A.Characterization of automatic guided vehicle scheduling rules [J].International Journal of Production Research,1984,22(3):359-374.
[9] Bartholdiiii J,Platzman L.Decentralized Control of Automated Guided Vehicles on a Simple Loop [J].IIE Transactions,1989,21(1):76-81.
[10] T Le-Anh,M B M De Koster.On-line scheduling rules for vehicle-based internal transport systems[J].International Journal of Production Research,2005,43(8):1711-1728.
[11] Lee C E,Chen C W.A scheduling scheme involving move control and weighted due date for wafer foundries[J].Components Packaging & Manufacturing Technology Part C IEEE Transactions on,1997,20(4):268-277.
[12] 李士勇.模糊控制[M].哈尔滨:哈尔滨工业大学出版社,2011.
[13] Mok P Y,Kwong C K,Wong W K.Optimisation of fault-tolerant fabric-cutting schedules using genetic algorithms and fuzzy set theory [J].European Journal of Operational Research,2007,177(3):1876-189.
[14] Wang C N,Liao D Y.Expeditious Hot Lots Handling in 300mm Semiconductor Foundry[C]// IEEE International Conference on Systems,Man and Cybernetics.IEEE,2006:4677-4681.
[15] Yavuz A.Bozer,Ying-Jiun Hsieh.Throughput performance analysis and machine layout for discrete-space closed-loop conveyors[J].IIE Transactions,2005,37(1):77-89.
[16] Montgomery D C.Design and analysis of experiments [M].Wiley,2007.