基于长度标准装置提高激光跟踪仪测量精度的方法
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摘要
为了提高激光跟踪仪的测量精度,针对激光跟踪仪测量重复性高的特点,提出基于长度标准装置对激光跟踪仪观测值进行标定的方法。通过建立激光跟踪仪和激光干涉仪标定观测的函数模型和随机模型,依据最小二乘原理得到标定点观测值的改正数和标定点观测值平差值的精度,进而对目标点的观测值进行插值改正,获得激光跟踪仪对目标点观测值的改正数,最终实现对激光跟踪仪的观测值进行误差补偿。采用长度标准装置对Leica AT401激光跟踪仪进行水平方向标定及标定后的精度测试,激光跟踪仪经过水平方向误差补偿后,将其测量点相互之间距离与激光干涉仪测量的距离进行对比,距离差值的RMS从19.5μm降低为10.2μm,验证了该方法的可行性。
With increasingly higher precision requirements for workpiece manufacturing and assembly, measurement accuracy of instruments also need to be improved accordingly. In order to increase the measurement accuracy of laser trackers, which are characterized by high repeatability, a method of calibration based on length standard device is proposed. By establishing the function and stochastic models of the laser tracker and the laser interferometer observation in the process of the calibration, the correction value and the adjusted value of the observation for the calibration points are obtained according to the least squares principle. With interpolation on the correction value and adjusted value of the observation for the calibration points, we determine the correction value of observations for the practical points, and finally achieve the error compensation for the laser tracker. Horizontal direction calibration and accuracy testing are carried out for the Leica AT401 laser tracker with the length standard device, and the distances measured by laser tracker are compared with those measured by laser interferometer. After error compensation, the RMS of the distance differences is changed from 19.5 μm to 10.2 μm, verifying the feasibility of this method.
With increasingly higher precision requirements for workpiece manufacturing and assembly, measurement accuracy of instruments also need to be improved accordingly. In order to increase the measurement accuracy of laser trackers, which are characterized by high repeatability, a method of calibration based on length standard device is proposed. By establishing the function and stochastic models of the laser tracker and the laser interferometer observation in the process of the calibration, the correction value and the adjusted value of the observation for the calibration points are obtained according to the least squares principle. With interpolation on the correction value and adjusted value of the observation for the calibration points, we determine the correction value of observations for the practical points, and finally achieve the error compensation for the laser tracker. Horizontal direction calibration and accuracy testing are carried out for the Leica AT401 laser tracker with the length standard device, and the distances measured by laser tracker are compared with those measured by laser interferometer. After error compensation, the RMS of the distance differences is changed from 19.5 μm to 10.2 μm, verifying the feasibility of this method.
引文
[1] 李广云,范百兴. 精密工程测量技术及其发展[J]. 测绘学报, 2017, 46(10): 1 742-1 751(Li Guangyun, Fan Baixing. The Development of Precise Engineering Surveying Technology[J]. Acta Geodaetica et Cartographica Sinica, 2017, 46(10):1 742-1 751)
[2] 梁静,董岚,罗涛,等. BEPCII储存环激光跟踪仪测量精度统计及先验误差的确定[J]. 测绘科学,2013,38(6):182-184(Liang Jing, Dong Lan, Luo Tao,et al. Precision Statistics of Laser Tracker in BEPCII Storage Ring and Calculation of Mean Square Error of Unit Weight[J]. Science of Surveying and Mapping, 2013, 38(6): 182-184)
[3] 马娜,董岚,梁静,等. 中国散裂中子源直线加速器控制网测量及精度研究[J]. 测绘通报,2016(1):104-107(Ma Na, Dong Lan, Liang Jing, et al. Measurement and Research of Control Network’s Accuracy of CSNS Linear Accelerator[J].Bulletin of Surveying and Mapping,2016(1):104-107)
[4] 梁静,董岚,王铜,等. 激光跟踪仪在CSNS高频腔预准直中的应用[J]. 地理空间信息,2017,15(3):12-13(Liang Jing, Dong Lan, Wang Tong, et al. Application of Laser Tracker in the Pre-Alignment of RF Cavity for CSNS[J].Geospatial Information,2017,15(3):12-13)
[5] 孙海丽,姚连璧,周跃寅, 等. 激光跟踪仪测量精度分析[J]. 大地测量与地球动力学,2015,35(1):177-181(Sun Haili, Yao Lianbi, Zhou Yueyin, et al. Analysis of Measurement Accuracy of Laser Tracker[J].Journal of Geodesy and Geodynamics,2015,35(1):177-181)
[6] 卢荣胜,李万红,劳达宝,等. 激光跟踪仪测角误差补偿[J]. 光学精密工程,2014,22(9):2 299-2 305(Lu Rongsheng, Li Wanhong, Lao Dabao, et al. Angular Error Compensation for Laser Tracker[J].Optics and Precision Engineering,2014,22(9):2 299-2 305)
[7] 丁蕾,周维虎,王亚伟. 样条函数在激光跟踪仪测距补偿中的应用[J].光电工程,2012,39(3):78-82(Ding Lei, Zhou Weihu, Wang Yawei. Spline Function for Distance Error Compensation of Laser Tracker[J].Opto-Electronic Engineering,2012,39(3):78-82)
[8] 范百兴,李广云,李佩臻, 等. 利用激光干涉测距三维网的加权秩亏自由网平差[J]. 武汉大学学报:信息科学版,2015,40(2):222-226(Fan Baixing, Li Guangyun, Li Peizhen, et al. Adjustment of a Laser Interferometer 3D Rank-Defect Free-Network[J].Geomatics and Information Science of Wuhan University, 2015,40(2):222-226)
[9] 周维虎.大尺寸空间坐标测量系统精度理论若干问题的研究[D]. 合肥:合肥工业大学,2000(Zhou Weihu. Research on the Precision Theory of Large-Scale Coordinate Measuring Systems[D]. Hefei:Hefei University of Technology,2000)
[10] 马骊群. 大尺寸计量校准技术研究及在量值传递中的应用[D]. 大连:大连理工大学,2007(Ma Liqun. Research on Large-Scale Dimensional Calibration and Its Application in Measurement Transfer Chain[D]. Dalian: Dalian University of Technology,2007)
[11] JJF 1242-2010,激光跟踪三维坐标测量系统校准规范[S].2010(JJF 1242-2010, Calibration Specification for Laser Tracker 3-Dimensional Measuring System[S].2010)
[12] The American Society of Mechanical Engineers. ASME B89.4.19-2006,Performance Evaluation of Laser-Based Spherical Coordinate Measurements Systems[S].2006
[13] 武汉大学测绘学院测量平差学科组.误差理论与测量平差基础[M].武汉:武汉大学出版社,2003(Surveying Adjustment Discipline Group,School of Geodesy and Geomatics, Wuhan University.Error Theory and Foundation of Surveying Adjustment[M]. Wuhan: Wuhan University Press,2003)
[14] Metrology H. Leica Absolute Tracker AT960 Brochure[EB/OL]. http://www.hexagonmi.com/products/laser-tracker-systems/leica-absolute-tracker-at960/.2017
[15] Automated Precision Inc. XD Laser Brochure[EB/OL]. https://www.apisensor.com/products/mth/xd-laser/.2017
[2] 梁静,董岚,罗涛,等. BEPCII储存环激光跟踪仪测量精度统计及先验误差的确定[J]. 测绘科学,2013,38(6):182-184(Liang Jing, Dong Lan, Luo Tao,et al. Precision Statistics of Laser Tracker in BEPCII Storage Ring and Calculation of Mean Square Error of Unit Weight[J]. Science of Surveying and Mapping, 2013, 38(6): 182-184)
[3] 马娜,董岚,梁静,等. 中国散裂中子源直线加速器控制网测量及精度研究[J]. 测绘通报,2016(1):104-107(Ma Na, Dong Lan, Liang Jing, et al. Measurement and Research of Control Network’s Accuracy of CSNS Linear Accelerator[J].Bulletin of Surveying and Mapping,2016(1):104-107)
[4] 梁静,董岚,王铜,等. 激光跟踪仪在CSNS高频腔预准直中的应用[J]. 地理空间信息,2017,15(3):12-13(Liang Jing, Dong Lan, Wang Tong, et al. Application of Laser Tracker in the Pre-Alignment of RF Cavity for CSNS[J].Geospatial Information,2017,15(3):12-13)
[5] 孙海丽,姚连璧,周跃寅, 等. 激光跟踪仪测量精度分析[J]. 大地测量与地球动力学,2015,35(1):177-181(Sun Haili, Yao Lianbi, Zhou Yueyin, et al. Analysis of Measurement Accuracy of Laser Tracker[J].Journal of Geodesy and Geodynamics,2015,35(1):177-181)
[6] 卢荣胜,李万红,劳达宝,等. 激光跟踪仪测角误差补偿[J]. 光学精密工程,2014,22(9):2 299-2 305(Lu Rongsheng, Li Wanhong, Lao Dabao, et al. Angular Error Compensation for Laser Tracker[J].Optics and Precision Engineering,2014,22(9):2 299-2 305)
[7] 丁蕾,周维虎,王亚伟. 样条函数在激光跟踪仪测距补偿中的应用[J].光电工程,2012,39(3):78-82(Ding Lei, Zhou Weihu, Wang Yawei. Spline Function for Distance Error Compensation of Laser Tracker[J].Opto-Electronic Engineering,2012,39(3):78-82)
[8] 范百兴,李广云,李佩臻, 等. 利用激光干涉测距三维网的加权秩亏自由网平差[J]. 武汉大学学报:信息科学版,2015,40(2):222-226(Fan Baixing, Li Guangyun, Li Peizhen, et al. Adjustment of a Laser Interferometer 3D Rank-Defect Free-Network[J].Geomatics and Information Science of Wuhan University, 2015,40(2):222-226)
[9] 周维虎.大尺寸空间坐标测量系统精度理论若干问题的研究[D]. 合肥:合肥工业大学,2000(Zhou Weihu. Research on the Precision Theory of Large-Scale Coordinate Measuring Systems[D]. Hefei:Hefei University of Technology,2000)
[10] 马骊群. 大尺寸计量校准技术研究及在量值传递中的应用[D]. 大连:大连理工大学,2007(Ma Liqun. Research on Large-Scale Dimensional Calibration and Its Application in Measurement Transfer Chain[D]. Dalian: Dalian University of Technology,2007)
[11] JJF 1242-2010,激光跟踪三维坐标测量系统校准规范[S].2010(JJF 1242-2010, Calibration Specification for Laser Tracker 3-Dimensional Measuring System[S].2010)
[12] The American Society of Mechanical Engineers. ASME B89.4.19-2006,Performance Evaluation of Laser-Based Spherical Coordinate Measurements Systems[S].2006
[13] 武汉大学测绘学院测量平差学科组.误差理论与测量平差基础[M].武汉:武汉大学出版社,2003(Surveying Adjustment Discipline Group,School of Geodesy and Geomatics, Wuhan University.Error Theory and Foundation of Surveying Adjustment[M]. Wuhan: Wuhan University Press,2003)
[14] Metrology H. Leica Absolute Tracker AT960 Brochure[EB/OL]. http://www.hexagonmi.com/products/laser-tracker-systems/leica-absolute-tracker-at960/.2017
[15] Automated Precision Inc. XD Laser Brochure[EB/OL]. https://www.apisensor.com/products/mth/xd-laser/.2017