摘要
为了提高Ni-P/Ti N/类金刚石(DLC)三层膜的结合及划痕性能,选择45钢作为基体材料在不同温度下化学镀Ni-P层,然后利用过滤阴极真空电弧(FCVA)技术在其上依次沉积Ti N过渡层及DLC层制备得到了NiP/Ti N/DLC三层膜,对三层膜试样采用纳米压痕仪、拉曼光谱仪以及光学显微镜进行了相关性能测试。结果表明:随镍磷化学镀温度的上升,试样的G峰与M峰往更高波段处发生偏移,两者积分强度比AG/AM也随之增加;当镍磷化学镀温度到达500℃时,AG/AM比值迅速增大为3.64,石墨相数量增加,降低了三层膜的脆性;在初期压头刚压入三层膜时,试样的硬度都表现为随压入深度增加而减小的变化规律;在临界载荷F_1处形成了半圆形的裂痕,并且沿着和划动方向相反的方向发生弯曲。
In order to improve the binding and scratch performances of the Ni-P/Ti N/DLC three-layer film,the Ni-P layer was electroless plated on the 45 steel at different temperatures,and then the Ti N intermediate layer and the diamond-like carbon( DLC) layer were prepared by filtered cathodic vacuum arc( FCVA) method successively to obtain the Ni-P/Ti N/DLC three-layer film. The properties of three-layer film were studied by nanometer indentation instrument,Raman spectrometer and optical microscope. Results showed that with the increase of the nickel-phosphorus electroless plating temperature,the G peak and M peak of the sample deviated towards higher wavelength,and the integral intensity ratios of AG/AM also increased and more graphite phase formed in the surface DLC film of the three-layer film,which reduced the brittleness of the film. When the nickel-phosphorus electroless plating temperature reached 500 ℃,the AG/AM ratio increased to 3.64 rapidly. Moreover,when the initial press head was pressed into the three-layer film,the hardness of samples showed the change rule of decreasing as the depth of injection increasing. At the critical load F1,a semi-circular crack formed and curved along the direction opposite to the direction of the stroke.
引文
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