激光共焦球面元件姿态自动调整系统
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摘要
为解决激光差动共焦元件参数测量系统中人工调整元件姿态效率低、重复性差的问题,研制了激光共焦球面元件姿态自动调整系统。基于共焦原理,建立了元件失调量与电动四维调整机构调整量关系的数学模型,并根据CCD探测器实时获取的光斑位置信号分析出被测件的姿态信息,结合闭环反馈控制算法实现姿态自动调整。利用电动四维调整机构搭建了自动调整实验装置,实验结果表明:研制的电动调整机构平移调整分辨力达到0.5μm,倾斜调整分辨力达到8″;调整系统能够快速、稳定地将被测件姿态失调量调至误差范围内,有效提高调整重复性及效率,对激光差动共焦测量系统实现全自动球面元件参数检测格外重要。
In order to solve the problem of poor efficiency and repeatability during adjusting the attitude of spherical components in laser differential confocal components parameters measurement system,we designed a laser confocal automatic adjustment system for attitude of spherical component.Based on the laser confocal principle,we set up the relationship between the component misalignment and the adjusting value of electric four-dimensional adjustment mechanism,analyzed the attitude information of the component according to the airy spot position constantly measured by CCD detectors,and realized the attitude automatic adjustment by using the closedloop feedback control algorithm.Finally,we built an automatic adjustment experiment device.The experimental results show that the shift adjustment resolution of the electric adjustment mechanism reaches 0.5μm,and the tilt resolution reaches 10″.The adjustment system can quickly and stably adjust the attitude misalignment of the device under test to the error range,effectively improving the repeatability and efficiency of the adjustment.It is especially important for the laser differential confocal measurement system to realize the automatic measurement of spherical component parameters.
In order to solve the problem of poor efficiency and repeatability during adjusting the attitude of spherical components in laser differential confocal components parameters measurement system,we designed a laser confocal automatic adjustment system for attitude of spherical component.Based on the laser confocal principle,we set up the relationship between the component misalignment and the adjusting value of electric four-dimensional adjustment mechanism,analyzed the attitude information of the component according to the airy spot position constantly measured by CCD detectors,and realized the attitude automatic adjustment by using the closedloop feedback control algorithm.Finally,we built an automatic adjustment experiment device.The experimental results show that the shift adjustment resolution of the electric adjustment mechanism reaches 0.5μm,and the tilt resolution reaches 10″.The adjustment system can quickly and stably adjust the attitude misalignment of the device under test to the error range,effectively improving the repeatability and efficiency of the adjustment.It is especially important for the laser differential confocal measurement system to realize the automatic measurement of spherical component parameters.
引文
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[6]JIANG Hong.The structure design of nanometerrResolution overloading electronic two-dimension ad-justing frame[D].Changchun:Changchun Universityof Science and Technology,2012:1-3.姜红.纳米级分辨力重载电控二维倾斜调整架设计[D].长春:长春理工大学,2012:1-3.
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[9]ZHANG Jianhuan,ZHOU Junxian.Effect of tilt an-gle of surface to be measured on differential confocalmicroscope pointing signal[J].Acta Optica Sinica,2006,26(9):1365-1366.张建寰,周军现.测量表面倾角对差动共焦瞄准信号影响分析[J].光学学报,2006,26(9):1365-1366.
[10]ZHANG Yanan,SHEN Lili,SHEN Weixing,et al.Design of support distribution for attitude-adjustingmechanism of large lens[J].Optics and Precision En-gineering,2010,18(12):2626-2628.章亚男,沈丽丽,沈卫星,等.大口径透镜姿态调整机构的支承分布设计[J].光学精密工程,2010,18(12):2626-2628.
[11]ZHANG Limin,WU Yuanhao.Design of multipleDOF fine tuning mechanism for 45°tilting mirror[J].Acta Photonica Sinica,2010,39(12):2139-3140.张丽敏,吴元昊.45°倾斜镜多自由度精调结构设计研究[J].光子学报,2010,39(12):2139-3140.
[12]LUO Yong.Coordinates-decoupling of multidimen-sional precision optical aadjusting frame[J].Opto-E-lectronic Engineering,2011,38(4):37-40.罗勇.多维精密光学调整架坐标解耦合分析[J].光电工程,2011,38(4):37-40.
[13]YU Shengli,ZHOU Jianxun,XIAO Hong.Develop-ment and analysis of adjusting tool for transmissionand reflectance detection of large aperture optical ele-ment[J].Tool Engineering,2018,52(3):136-137.鱼胜利,周建勋,肖虹.大口径光学元件透反射检测调整工装的研制与分析[J].工具技术,2018,52(3):136-137.
[2]WANG Yun,QIU Lirong.Laser differential confo-cal lens thickness measurement[J]. MeasurementScience and Technology,2012,23(055204):1-2.
[3]SCHMITZ T L,GARDNER N,VAUGHN M,et al.Improving optical bench radius measurements usingstage error motion data[J].Applied Optics,2008,47(36):6692-6693.
[4]XU Peng,ZHAO Weiqian,WANG Fangbiao,et al.Laser differential confocal curvature measurementsystem with grating length[J].Journal of AppliedOptics,2014,35(6):1023-1024.徐鹏,赵维谦,王方彪,等.光栅尺测长式激光差动共焦曲率半径测量系统[J].应用光学,2014,35(6):1023-1024.
[5]GU Zhiyuan,YAN Changxiang,HU Chunhui,etal.Coordinate datum transition method for opticalsystem computer-aided alignment[J].Acta OpticaSinica,2014,34(3):0322003-2.顾志远,颜昌翔,胡春晖,等.光学系统计算机辅助装调的坐标基准过渡方法[J].光学学报,2014,34(3):0322003-2.
[6]JIANG Hong.The structure design of nanometerrResolution overloading electronic two-dimension ad-justing frame[D].Changchun:Changchun Universityof Science and Technology,2012:1-3.姜红.纳米级分辨力重载电控二维倾斜调整架设计[D].长春:长春理工大学,2012:1-3.
[7]WANG Xu,QIU Lirong,ZHAO Weiqian,et al.Er-ror analysis for a laser differential confocal radiusmeasurement system[J].Applied Optics,2015,54(5):1081-1082.
[8]WANG Xu,WANG Zhongyu,ZHAO Weiqian,etal.Uncertainty evaluation in laser differential confo-cal radius-of-curvature measurement[J].Journal ofApplied Optics,2014,35(1):155-157.王旭,王中宇,赵维谦,等.激光差动共焦曲率半径测量不确定度评定[J].应用光学,2014,35(1):155-157.
[9]ZHANG Jianhuan,ZHOU Junxian.Effect of tilt an-gle of surface to be measured on differential confocalmicroscope pointing signal[J].Acta Optica Sinica,2006,26(9):1365-1366.张建寰,周军现.测量表面倾角对差动共焦瞄准信号影响分析[J].光学学报,2006,26(9):1365-1366.
[10]ZHANG Yanan,SHEN Lili,SHEN Weixing,et al.Design of support distribution for attitude-adjustingmechanism of large lens[J].Optics and Precision En-gineering,2010,18(12):2626-2628.章亚男,沈丽丽,沈卫星,等.大口径透镜姿态调整机构的支承分布设计[J].光学精密工程,2010,18(12):2626-2628.
[11]ZHANG Limin,WU Yuanhao.Design of multipleDOF fine tuning mechanism for 45°tilting mirror[J].Acta Photonica Sinica,2010,39(12):2139-3140.张丽敏,吴元昊.45°倾斜镜多自由度精调结构设计研究[J].光子学报,2010,39(12):2139-3140.
[12]LUO Yong.Coordinates-decoupling of multidimen-sional precision optical aadjusting frame[J].Opto-E-lectronic Engineering,2011,38(4):37-40.罗勇.多维精密光学调整架坐标解耦合分析[J].光电工程,2011,38(4):37-40.
[13]YU Shengli,ZHOU Jianxun,XIAO Hong.Develop-ment and analysis of adjusting tool for transmissionand reflectance detection of large aperture optical ele-ment[J].Tool Engineering,2018,52(3):136-137.鱼胜利,周建勋,肖虹.大口径光学元件透反射检测调整工装的研制与分析[J].工具技术,2018,52(3):136-137.