一种电热式MEMS微镜多自由度模型解析方法
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摘要
结合微镜驱动器结构,通过引入热导和弹簧刚体模型分析了多驱动器间热传导和相互作用力导致的形变原因,并建立了多自由度微镜的数学模型。仿真与实验数据对比说明:建立的模型与实验结果具有较好的一致性,能够预测4个驱动器的输入响应特性。
The deformation reason of actuator caused by heat conduction and interaction force is analyzed by introducing thermal conduction and spring rigid model combined with structure of micro-mirror actuator,and multiDOF mathematical model for micro-mirror is established.Comparison of simulation,and experimental data show that the constructed model agrees well with experimental results,it can predict input responses characteristics of four actuators.
The deformation reason of actuator caused by heat conduction and interaction force is analyzed by introducing thermal conduction and spring rigid model combined with structure of micro-mirror actuator,and multiDOF mathematical model for micro-mirror is established.Comparison of simulation,and experimental data show that the constructed model agrees well with experimental results,it can predict input responses characteristics of four actuators.
引文
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[2]陈家凤,陈海清.MEMS变形反射镜主要特性测试[J].光子学报,2009,38(12):3245-3249.
[3]黎仁刚,黄庆安,李伟华.Bimorph结构微热执行器的节点分析方法[J].仪器仪表学报,2007,28(4):728-733.
[4]Nakajima M,Kuwabara K,Sakata T.Low-voltage-actuated MEMS mirror array with high fill factor for photonic switch applications[C]∥Proc of the 17th International Conference on Solid-State Sensors,Actuators and Microsystems,Barcelona,Spain.2013:1416-1419.
[5]Zhang X Y,Liu L,Liang W X.An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement[C]∥Proc IEEE of Optical MEMS and Nanophotonics,Kanazawa,Japan,2013:13-14.
[6]Todd S T,Xie H.An electro-thermo-mechanical lumped element model of an electrothermal bimorph actuator[J].J Microelectromech,Syst,2008,17(1):213-225.
[7]Xu Y,Singh J,Premachandran C S.Design and development of a3D scanning MEMS OCT probe using a novel SiOB package assembly[J].J Micromech Microeng,2008,18(12):11-23.
[8]Wu L,Xie H.Low-voltage,laser-range MEMS optical scanning and their applications[D].Gainesville,USA:University of Florida,2009:43-123.
[9]Chen Q,Zhang H,Xie H.Repeatability study of 2D MEMS mirrors based on s-shaped Al/SiO2bimorphs[C]∥Proc of IEEE,the 8th NEMS Conf,Suzhou,China,2013:817-820.
[10]Jia K M,Sagnik P,Xie H.An electrothermal tip-tilt-piston micromirror based on folded dual S-shaped bimorphs[J].Journal of Micro-electro-mechanical System,2009,18(5):1004-1014.