摆动刻蚀法制作高衍射效率凸面闪耀光栅
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摘要
通过摆动离子束刻蚀方法,制作了用于短波红外高光谱成像光谱仪的凸面闪耀光栅。该方法通过在光栅子午方向上进行摆动刻蚀,解决了凸面光栅子午方向的闪耀角一致性问题。建立了摆动刻蚀模型来分析摆动速度、束缝宽度等工艺参数对槽型演化的影响,并计算了优化的刻蚀工艺参数。制备了基底尺寸为67mm,曲率半径为156.88mm,刻线密度为45.5gr/mm,闪耀角为2.2°的凸面闪耀光栅,并对其表面形貌及衍射效率进行了测量。实验结果表明,摆动刻蚀法能够制作出闪耀角一致性好、衍射效率高的小闪耀角凸面光栅,满足成像光谱仪对光谱分辨率和便携性的使用要求。
We use the swing ion-beam etching method to fabricate short wave infrared convex blazed gratings.This method solves the consistency problem of blaze angles by swing etching through the meridian direction of the gratings.A geometric model is built to analyze the influence of swinging speed and beam slit width on groove evolution.Convex gratings with a 45.5 gr/mm groove density,67 mm aperture,156.88 mm radius of curvature and 2.2°blaze angle have been fabricated and measured.Experimental results validate that high-efficiency convex gratings of small blaze angle and high groove consistency can be produced by swing etching to satisfy the requirements for high spectral resolution and miniaturization of imaging spectrometers.
We use the swing ion-beam etching method to fabricate short wave infrared convex blazed gratings.This method solves the consistency problem of blaze angles by swing etching through the meridian direction of the gratings.A geometric model is built to analyze the influence of swinging speed and beam slit width on groove evolution.Convex gratings with a 45.5 gr/mm groove density,67 mm aperture,156.88 mm radius of curvature and 2.2°blaze angle have been fabricated and measured.Experimental results validate that high-efficiency convex gratings of small blaze angle and high groove consistency can be produced by swing etching to satisfy the requirements for high spectral resolution and miniaturization of imaging spectrometers.
引文
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[2]PrietoBlanco X,MonteroOrille C,Couce B,et al.Analytical design of an Offner imaging spectrometer[J].Optics Express,2006,14(20):9156-9168.
[3]Mouroulis P Z,McKerns M M.Pushbroom imaging spectrometer with high spectroscopic data fidelity:Experimental demonstration[J].Optical Engineering,2000,39(3):808-817.
[4]Gao L,Smith R T,Tkaczyk T S.Snapshot hyperspectral retinal camera with the image mapping spectrometer(IMS)[J].Biomedical Optics Express,2012,3(1):48-54.
[5]Mouroulis P,Wilson D W,Maker P D,et al.Convex grating types for concentric imaging spectrometers[J].Applied Optics,1998,37(31):7200-8.
[6]Lucke R L.Out-of-plane dispersion in an Offner spectrometer[J].Optical Engineering,2007,46:073004.
[7]韩姗,黄元申,李柏承,等.消像差Offner成像光谱仪的研究进展[J].激光技术,2015,39(1):33-38.(Han Shan,Huang Yuanshen,Li Baicheng,et al.Progress of Offner imaging spectrometers for eliminating aberration.Laser Technology,2015,39(1):33-38)
[8]Xu D,Owen J D,Papa J C,et al.Design,fabrication,and testing of convex reflective diffraction gratings[J].Optics Express,2017,25(13):15252.
[9]Maker P,Muller R,Wilson D,et al.New convex grating types manufactured by electron beam lithography[J].1998.
[10]Mouroulis P Z,Thomas D A.Compact low-distortion imaging spectrometer for remote sensing[C]//Proc of SPIE.1998,3438:31-38.
[11]Okano M,Kikuta H,Hirai Y,et al.Optimization of diffraction grating profiles in fabrication by electron-beam lithography[J].Applied Optics,2004,43(27):5137.
[12]Takahara K,Shiono T,Hamamoto T.High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electronbeam lithography[J].Applied Optics,2002,41(13):2390-2393.
[13]Johnson W R,Wilson D W,Bearman G.All-reflective snapshot hyperspectral imager for ultraviolet and infrared applications[J].OpticsLetters,2005,30(12):1464-1466.
[14]Mouroulis P Z,Hartley F T,Wilson D W,et al.Grating fabrication through X-ray lithography[C]//Proc of SPIE.2003,5173:108-114.
[15]Mouroulis P,Wilson D W,Hartley F T,et al.Concentric spectrometer forms enabled by lithographically produced gratings[J].Frontiers in Optics,2004:FWT2.
[16]刘玉娟,崔继承,巴音贺希格,等.凸面光栅成像光谱仪的研制与应用[J].光学精密工程,2012,20(1):52-57.(Liu Yujuan,Cui Jicheng,Bayanhexig,et al.Design and application of imaging spectrometer with convex grating.Optics and Precision Engineering,2012,20(1):52-57)
[17]Wilson D W,Mouroulis P Z.Recent advances in blazed grating fabrication by electron-beam lithography[C]//Proc of SPIE.2003,5173:115-126.
[18]Mouroulis P,Hartley F,Wilson D,et al.Blazed grating fabrication through gray-scale X ray lithography[J].Optics Express,2003,11(3):270-81.
[19]Headwall Photonics Inc.Hyperspec-VNIR and Hyperspec-NIR integrated hyperspectral imaging sensors[EB/OL].http://www.headwallphotonics.com/diffractive-optics-technology.
[20]Reininger F M,Coradini A,Capaccioni F,et al.VIRTIS:Visible infrared thermal imaging spectrometer for the Rosetta mission[J].1996,2:1604-1606.
[21]Davis C O,Bowles J,Leathers R A,et al.Ocean PHILLS hyperspectral imager:Design,characterization,and calibration[J].Optics Express,2002,10(4):210-221.
[22]Liu Q,Ji Y,Wu J,et al.Study on convex grating in hyperspectral imaging spectrometers[C]//Proc of SPIE.2009:74940N.
[23]Ducommun J P,Cantagrel M,Moulin M.Evolution of well-defined surface contour submitted to ion bombardment:Computer simulation and experimental investigation[J].Journal of Materials Science,1975,10(1):52-62.
[24]Lin H,Lilifeng.Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photo resist mask[J].Applied Optics,2008,47:6212-6218.