摘要
使用数控焰熔法晶体生长炉和三管燃烧器进行了金红石单晶体的生长工艺实验研究。研究表明,在3个气体参数中,内氧是基础。当内氧流量小于特征值O_(in)(min)=6.6 L/min或大于特征值O_(in)(max)=7.1 L/min时,晶体生长或易于发生熔体流淌,或不易扩肩,生长过程被迫中止,晶体很难生长成为大尺寸晶体;当内氧流量大于6.6 L/min而小于7.1 L/min时,生长过程稳定,能够生长成为大尺寸晶体。当内氧流量为7 L/min时生长出了直径30 mm、长度45 mm的金红石单晶体。通过能谱仪、X射线衍射仪(XRD)和拉曼光谱仪对晶体的组成、结构和键的结构进行表征,表明该晶体为典型的金红石单晶体,生长方向是[110]。
The growth process of rutile single crystal was studied by numerical control flame melting crystal growing furnace and three-tube burner. It is shown that internal oxygen was the basis of the three gas parameters. When the internal oxygen flow was less than the characteristic value O_(in)(min) of 6.6 L/min or greater than the characteristic value(O_(in)(max) of 7.1 L/min, the crystal growth was prone to melt flow or not easy to expand, and the growth process was forced to stop, so the crystal was difficult to grow into large-size crystals. When the internal oxygen flow was larger than 6.6 L/min and smaller than 7.1 L/min, the growth process was stable and could grow into large-size crystals. When the internal oxygen flow was 7 L/min, rutile single crystal with a diameter of 30 mm and a length of 45 mm was grown. The composition, structure and bond structure of the crystal were characterized by energy spectrometer, X-ray diffraction(XRD) and Raman spectrometer, indicating that the crystal was a typical single crystal of rutile, and the growth direction was [110].
引文
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