基于PET基底透明屏蔽膜的制备研究
|
摘要
为满足光学器件透红外屏蔽电磁波的要求,在PET柔性基底上制作了金属网栅透明屏蔽膜.分析网栅参数对其屏蔽效率及透过率的影响,选取结构参数.针对PET基底的柔性特点及其热稳定性,经试验研究优化光刻工艺中的提拉速度、烘烤时间及温度等参数,从而得到高质量的图形结构.采用磁控溅射法制备透明屏蔽膜,通过优化溅射功率、溅射气压等参数使膜/基结合更牢固.最后得到线宽为3μm、周期为250μm的金属网栅透明屏蔽膜.采用分光光度计测得其在300~2 200nm波段的平均透过率为77%;采用屏蔽室法测得其在2~18GHz频段的电磁屏蔽效率为12dB以上.
In order to meet the requirements of optical devices for passing infrared waves and shielding electromagnetic waves,a transparent metal mesh shielding film was fabricated on PET flexible substrates.The influence of mesh parameters on shielding efficiency and transmittance was analyzed,and the structural parameters were selected.For the flexibility and thermal stability of PET substrate,highquality graphics structure was obtained after optimizing pulling speed,baking time,temperature and other parameters in the lithography process.Transparent shielding film was prepared by magnetron sputtering and the film/substrate bonding was strengthened by optimizing sputtering power,sputtering pressure and other parameters.Finally,a metal mesh transparent shielding film with a line width of 3μm and a cycle of 250μm was made.The average transmittance in the 300~2 200 nm band was 77% by spectrophotometer,the electromagnetic shielding efficiency in the 218 GHz band which measured by shielding room method is higher than 12 dB.
In order to meet the requirements of optical devices for passing infrared waves and shielding electromagnetic waves,a transparent metal mesh shielding film was fabricated on PET flexible substrates.The influence of mesh parameters on shielding efficiency and transmittance was analyzed,and the structural parameters were selected.For the flexibility and thermal stability of PET substrate,highquality graphics structure was obtained after optimizing pulling speed,baking time,temperature and other parameters in the lithography process.Transparent shielding film was prepared by magnetron sputtering and the film/substrate bonding was strengthened by optimizing sputtering power,sputtering pressure and other parameters.Finally,a metal mesh transparent shielding film with a line width of 3μm and a cycle of 250μm was made.The average transmittance in the 300~2 200 nm band was 77% by spectrophotometer,the electromagnetic shielding efficiency in the 218 GHz band which measured by shielding room method is higher than 12 dB.
引文
[1]KIAWANICH P,GUNDA R,et al.Methodology for interference analysis using electromagnetic topology techniques[J].Applied Physics Letters.2004,84(15):2949-2951.
[2]LITVINOV V I,MANSSON V A,SADOVNIK L.Conductive coating with infrared pass band[C].SPIE,2000,4094:38-45.
[3]LI B,SHEN Y,YUEZ.X,et al.Enhanced microwave absorption in nickel/hexagonal-ferrite/polymer composites[J].Applied Physics Letters.2006,89(13):132504.
[4]GAO Jin-song,SUN Lian-xi,ZHENG Xuan-ming,et al.IR transparent conductive metallic mesh film[J].Optical Technique,2001,27(6):558-559.高劲松,孙连春,郑宣明等.红外透明导电金属网栅薄膜[J].光学技术.2001,27(6):558-559.
[5]ZHANG Yun-qiang,PAN Guo-qing,LI Fu-wei.Research of metallic mesh in improving electromagnetic shielding of airto-air missile[J].Infrared Technology,2011,32(7):395-398.张运强,潘国庆,李福巍.金属网栅电磁屏蔽薄膜在红外空空导弹上的应用研究[J].红外技术,2011,32(7):395-398.
[6]LU Zhen-gang.Electromagnetic shielding methods for optical windows based on ring and double-layer metallic meshes[D].Harbin:Harbin Institute of Technology,2007.陆振刚.基于圆环和双层金属网栅结构的光学窗电磁屏蔽方法研究[D].哈尔滨:哈尔滨工业大学,2007.
[7]PETER A R A,GIAMPAOLO P,CAROlE T,et al.A review of metal mesh filters[C].SPIE,2006,6275:62750U.
[8]SMITH H A,REBBERT M,STERNBERG O.Designer infrared filters using stacked metal lattices[J].Applied Physics Letters 2003,82:3605-3607.
[9]URICH R.Far-infrared properties of metallic mesh and its complementary structure[J].Infrared Physics.1967,7:37-55.
[10]LIU Hao,DENG Hong,WEI Min,et al.Preparation and ultraviolet detection performance of Ga2O3thin films[J].Chinese Journal of Luminescence,2015,36:(8)906-911.刘浩,邓宏,韦敏,等.氧化镓薄膜的制备及其日盲紫外探测性能研究[J].发光学报,2015,36:(8)906-911.
[11]ZHOU Hui,YANG Hai-feng.Research status and prospect of the lithographyand micro-nano manufacturing technology[J].Micro-nano Electronic Technology.2012,49(9):613-617.周辉,杨海峰.光刻与微纳制造技术的研究现状及展望[J].微纳电子技术.2012,49(9):613-617.
[12]WU Wen-ting,LIANG Zhong-cheng,ZHANG Le.Optofluidic varifocal microlens[J].Chinese Journal of Luminescence,2015,36:(6)718-723.吴雯婷,梁忠诚,仉乐.可调微流控光学变焦透镜[J].发光学报,2015,36:(6)718-723.
[13]NIU Ping-juan,XUE Wei-fang,NING Ping-fan,et al.Fabrication technology of LED remote fluorescent sheets based on electrostatic spinning process[J].Chinese Journal of Luminescence,2016,37:(5)567-572.牛萍娟,薛卫芳,宁平凡,等.基于静电纺丝工艺的LED远程荧光片制备技术[J].发光学报,2016,37:(5)567-572.
[14]ZHOU Wen-xiang,LAI Zhen-quan,LIU Wen-xing.Structure and surface roughness of AlN films prepared by DC magnetron sputtering[J].Acta Photonica Sinica,2011,40(1):9-12.邹文祥,赖珍荃,刘文兴.直流磁控溅射制备AlN薄膜的结构和表面粗糙度[J].光子学报,2011,40(1):9-12.
[15]YU Liang,LIANG Qi,LIU Lei,et al.Effect of thickness on the structure and optical properties of SnS Films fabricated by RF magnetron sputtering[J].Chinese Journal of Luminescence,2015,36(4):429-436.余亮,梁齐,刘磊,等.膜厚对射频磁控溅射法制备的SnS薄膜结构和光学性质的影响[J].发光学报,2015,36(4):429-436.
[16]DAI Jia-wei,ZHANG Hui-juan,LI Ge-yang.Influence of substrates and film thickness on mechanical properties of hard films[J].Vacuum Science and Technology.2003,23(3):147-151.戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术.2003,23(3):147-151.
[2]LITVINOV V I,MANSSON V A,SADOVNIK L.Conductive coating with infrared pass band[C].SPIE,2000,4094:38-45.
[3]LI B,SHEN Y,YUEZ.X,et al.Enhanced microwave absorption in nickel/hexagonal-ferrite/polymer composites[J].Applied Physics Letters.2006,89(13):132504.
[4]GAO Jin-song,SUN Lian-xi,ZHENG Xuan-ming,et al.IR transparent conductive metallic mesh film[J].Optical Technique,2001,27(6):558-559.高劲松,孙连春,郑宣明等.红外透明导电金属网栅薄膜[J].光学技术.2001,27(6):558-559.
[5]ZHANG Yun-qiang,PAN Guo-qing,LI Fu-wei.Research of metallic mesh in improving electromagnetic shielding of airto-air missile[J].Infrared Technology,2011,32(7):395-398.张运强,潘国庆,李福巍.金属网栅电磁屏蔽薄膜在红外空空导弹上的应用研究[J].红外技术,2011,32(7):395-398.
[6]LU Zhen-gang.Electromagnetic shielding methods for optical windows based on ring and double-layer metallic meshes[D].Harbin:Harbin Institute of Technology,2007.陆振刚.基于圆环和双层金属网栅结构的光学窗电磁屏蔽方法研究[D].哈尔滨:哈尔滨工业大学,2007.
[7]PETER A R A,GIAMPAOLO P,CAROlE T,et al.A review of metal mesh filters[C].SPIE,2006,6275:62750U.
[8]SMITH H A,REBBERT M,STERNBERG O.Designer infrared filters using stacked metal lattices[J].Applied Physics Letters 2003,82:3605-3607.
[9]URICH R.Far-infrared properties of metallic mesh and its complementary structure[J].Infrared Physics.1967,7:37-55.
[10]LIU Hao,DENG Hong,WEI Min,et al.Preparation and ultraviolet detection performance of Ga2O3thin films[J].Chinese Journal of Luminescence,2015,36:(8)906-911.刘浩,邓宏,韦敏,等.氧化镓薄膜的制备及其日盲紫外探测性能研究[J].发光学报,2015,36:(8)906-911.
[11]ZHOU Hui,YANG Hai-feng.Research status and prospect of the lithographyand micro-nano manufacturing technology[J].Micro-nano Electronic Technology.2012,49(9):613-617.周辉,杨海峰.光刻与微纳制造技术的研究现状及展望[J].微纳电子技术.2012,49(9):613-617.
[12]WU Wen-ting,LIANG Zhong-cheng,ZHANG Le.Optofluidic varifocal microlens[J].Chinese Journal of Luminescence,2015,36:(6)718-723.吴雯婷,梁忠诚,仉乐.可调微流控光学变焦透镜[J].发光学报,2015,36:(6)718-723.
[13]NIU Ping-juan,XUE Wei-fang,NING Ping-fan,et al.Fabrication technology of LED remote fluorescent sheets based on electrostatic spinning process[J].Chinese Journal of Luminescence,2016,37:(5)567-572.牛萍娟,薛卫芳,宁平凡,等.基于静电纺丝工艺的LED远程荧光片制备技术[J].发光学报,2016,37:(5)567-572.
[14]ZHOU Wen-xiang,LAI Zhen-quan,LIU Wen-xing.Structure and surface roughness of AlN films prepared by DC magnetron sputtering[J].Acta Photonica Sinica,2011,40(1):9-12.邹文祥,赖珍荃,刘文兴.直流磁控溅射制备AlN薄膜的结构和表面粗糙度[J].光子学报,2011,40(1):9-12.
[15]YU Liang,LIANG Qi,LIU Lei,et al.Effect of thickness on the structure and optical properties of SnS Films fabricated by RF magnetron sputtering[J].Chinese Journal of Luminescence,2015,36(4):429-436.余亮,梁齐,刘磊,等.膜厚对射频磁控溅射法制备的SnS薄膜结构和光学性质的影响[J].发光学报,2015,36(4):429-436.
[16]DAI Jia-wei,ZHANG Hui-juan,LI Ge-yang.Influence of substrates and film thickness on mechanical properties of hard films[J].Vacuum Science and Technology.2003,23(3):147-151.戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术.2003,23(3):147-151.