Ti靶微观组织对TiN涂层性能的影响
|
摘要
研究了四种不同微观组织的Ti靶,以及同一条件下在硬质合金基底上磁控溅射得到的Ti N涂层,采用SEM、EDX、XRD、纳米硬度计和原子力显微镜对涂层进行了分析。结果表明:等轴晶钛靶材的晶粒尺寸越细小,涂层中氮含量越高,涂层表面的颗粒越多,表面的粗糙度越大,涂层颗粒尺寸越大,纳米硬度越小;纳米硬度的大小与涂层的相结构关系密切;采用魏氏组织钛靶溅射得到的Ti N涂层性能最优。
Four kinds titanium targets with different microstructure and Ti N coatings which were deposited on the cemented carbide substrate by magnetron sputtering under the same condition were studied. The coating was analyzed by SEM, EDX, XRD, nano-indentation hardness tester and atomic force microscopy. The results show that: the smaller of the grain size of equiax crystal titanium target is, the higher of nitrogen content in the coating is, the more of the particle quantity is, the bigger of the surface roughness is, the bigger of particel size of the coating is, the smaller of the coating nano-indentation hardness is. The nano-indentation hardness is closely related to the coating phase structure. The performance of Ti N coating sputtered by widmanstatten structure titanium target is the best.
Four kinds titanium targets with different microstructure and Ti N coatings which were deposited on the cemented carbide substrate by magnetron sputtering under the same condition were studied. The coating was analyzed by SEM, EDX, XRD, nano-indentation hardness tester and atomic force microscopy. The results show that: the smaller of the grain size of equiax crystal titanium target is, the higher of nitrogen content in the coating is, the more of the particle quantity is, the bigger of the surface roughness is, the bigger of particel size of the coating is, the smaller of the coating nano-indentation hardness is. The nano-indentation hardness is closely related to the coating phase structure. The performance of Ti N coating sputtered by widmanstatten structure titanium target is the best.
引文
[1]赵彦辉,林国强,李晓娜,等.脉冲偏压对电弧离子镀Ti/Ti N纳米多层薄膜显微硬度的影响[J].金属学报,2005,41(10):1106-1110.
[2]白秀琴,李健.磁控溅射Ti N薄膜低温沉积技术及其摩擦学性能研究[J].润滑与密封,2006,177(5):15-21.
[3]Komarov F F,Konstantinov V M,Kovalchuk A V,et al.The effect of steel substrate pre-hardening on structural,mechanical,and tribological properties of magnetron sputtered Ti N and Ti Al N coatings[J].Wear,2016,352-353:92-101.
[4]朱秀榕,赖珍荃,蒋雅雅,等.氮气流量对反应磁控溅射制备Ti Nx薄膜的影响[J].南昌大学学报·工科版,2008,30(2):138-141.
[5]Hong Xiang,Tan Yefa,Wang Xiaolong,et al.Effects of nitro gen flux on microstructure and tribological properties of in-situ Ti N coatings deposited on TC11 titanium alloy by electrospark deposition[J].Trans.Nonferrous Met.Soc.China,2015,25:3329-3338.
[6]Xu Zhe,Xi Huizhi,Ruan Xia.The influence of sputtering Ti N coatings processing parameters on microhardness[J].Ap plied Science and Technology,2007,34(5):1-4.
[7]Krz yszt Zdunek,Katarzyna Nowakowska-Langier,Rafal Chodun,et al.Properties of Ti N coatings deposited by the modified IPD method[J].Vacuum,2010,85:514-517.
[8]Li Hongtao,Liu Yanjie,Jiang Bailing,et al.The structure and toughness of Ti N coatings prepared by modulated pulsed power magnetron sputtering[J].Vacuum,2016,125:165-169.
[9]An T,Wang L L,Tian H W,et al.Deformation and fracture of Ti N coating on a Si(111)substrate during nanoindentation[J].Applied Surface Science,2011,257:7475-7480.
[10]唐伟忠.薄膜材料制备原理、技术及应用[M].冶金工业出版社,2008:80.
[11]宋贵弘,杜昊,贺青林.硬质与超硬涂层[M].化学工业出版社,2007:52.
[2]白秀琴,李健.磁控溅射Ti N薄膜低温沉积技术及其摩擦学性能研究[J].润滑与密封,2006,177(5):15-21.
[3]Komarov F F,Konstantinov V M,Kovalchuk A V,et al.The effect of steel substrate pre-hardening on structural,mechanical,and tribological properties of magnetron sputtered Ti N and Ti Al N coatings[J].Wear,2016,352-353:92-101.
[4]朱秀榕,赖珍荃,蒋雅雅,等.氮气流量对反应磁控溅射制备Ti Nx薄膜的影响[J].南昌大学学报·工科版,2008,30(2):138-141.
[5]Hong Xiang,Tan Yefa,Wang Xiaolong,et al.Effects of nitro gen flux on microstructure and tribological properties of in-situ Ti N coatings deposited on TC11 titanium alloy by electrospark deposition[J].Trans.Nonferrous Met.Soc.China,2015,25:3329-3338.
[6]Xu Zhe,Xi Huizhi,Ruan Xia.The influence of sputtering Ti N coatings processing parameters on microhardness[J].Ap plied Science and Technology,2007,34(5):1-4.
[7]Krz yszt Zdunek,Katarzyna Nowakowska-Langier,Rafal Chodun,et al.Properties of Ti N coatings deposited by the modified IPD method[J].Vacuum,2010,85:514-517.
[8]Li Hongtao,Liu Yanjie,Jiang Bailing,et al.The structure and toughness of Ti N coatings prepared by modulated pulsed power magnetron sputtering[J].Vacuum,2016,125:165-169.
[9]An T,Wang L L,Tian H W,et al.Deformation and fracture of Ti N coating on a Si(111)substrate during nanoindentation[J].Applied Surface Science,2011,257:7475-7480.
[10]唐伟忠.薄膜材料制备原理、技术及应用[M].冶金工业出版社,2008:80.
[11]宋贵弘,杜昊,贺青林.硬质与超硬涂层[M].化学工业出版社,2007:52.