电容式微机械超声换能器的信号调理电路设计
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摘要
针对电容式微机械超声换能器(cMUT)的工作原理和检测要求,分析了换能器微弱回波信号的处理方法,设计了性能良好的信号调理电路,有效的解决了在实际应用中换能器模式转换和微弱信号调理的关键问题和首要难题。通过对电路系统的测试,实验结果表明该电路具有良好的线性和稳定性,且其带宽为1.53×108Hz,灵敏度为0.161 mV/pF,分辨率为1 nA;其不仅实现了换能器收发一体及微弱信号调理的功能,而且还为换能器水下超声成像系统的建立奠定了基础。
Aimed at working principle and detecting demand of the capacitive micro-machined ultrasonic transducer(c MUT),a good performance signal processing circuit was designed through analyzing processing methods of weak echo signal of transducer,and effectively solved the key problem and primary difficulty which were transducer model transformation and weak signal conditioning in practical application. Through testing the circuit system,the experimental results showed that the circuit had great linearity and stability,and its bandwidth was 1. 53 × 108 Hz,sensitivity was 0. 161 mV/pF,and resolution was 1 nA. In this paper,the circuit not only implemented the function of transmission-receiving and weak signal processing of the c MUT,but also set base for building underwater ultrasonic imaging system of the c MUT.
Aimed at working principle and detecting demand of the capacitive micro-machined ultrasonic transducer(c MUT),a good performance signal processing circuit was designed through analyzing processing methods of weak echo signal of transducer,and effectively solved the key problem and primary difficulty which were transducer model transformation and weak signal conditioning in practical application. Through testing the circuit system,the experimental results showed that the circuit had great linearity and stability,and its bandwidth was 1. 53 × 108 Hz,sensitivity was 0. 161 mV/pF,and resolution was 1 nA. In this paper,the circuit not only implemented the function of transmission-receiving and weak signal processing of the c MUT,but also set base for building underwater ultrasonic imaging system of the c MUT.
引文
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[6]苗静.基于硅晶圆键合工艺的MEMS电容式超声传感器设计[J].传感技术学报,2012,25(12):1653-1658.
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[10]景洁.生物检测仪中数据采集模块的设计[J].仪器仪表学报,2006,(6):154-155.Jing Jie.Design of data acquisition in biology analyzing instrument[J].Chinese Journal of Scientific Instrument,2006,(6):154-155.
[2]于佳琪.基于Si-SOI键合的微电容超声波换能器设计[D].太原:中北大学,2014.
[3]吴其松.一种适用于MEMS陀螺仪的高性能电容读出电路[J].仪器仪表学报,2010,31(4):937-943.Wu Qisong.High-performance capacitive readout circuit for MEMS gyroscope[J].Chinese Journal of Scientific Instrument,2010,31(4):937-943.
[4]穆林枫.基于跨阻放大的微弱电容检测电路[J].电测与仪表,2015,52(18):85-88.Mu Linfeng.Micro Capacitance measuring circuit based on the transimpedance amplifier[J].Electrical Measurement&Instrumentation,2015,52(18):85-88.
[5]HUANG Y,HUANG X F.Capacitive micromachined ultrasonic transducers(CMUTs)with isolation posts[J].Ultrasonics,2008,48(1):74-81.
[6]苗静.基于硅晶圆键合工艺的MEMS电容式超声传感器设计[J].传感技术学报,2012,25(12):1653-1658.
[7]宁小伟.16c通道超声相控阵系统的AFE研究[D].成都:西南交通大学,2014.
[8]杨道业.电容层析成像在高压浓相煤粉气力输送中的应用[J].仪器仪表学报,2007,28(11):1987-1993.
[9]廉德钦.基于交流电桥的动态微弱电容检测电路[J].电测与仪表,2012,49(7):89-92.Lian Deqin.Micro Capacitance measuring circuit based on AC bridge[J].Electrical Measurement&Instrumentation,2012,49(7):89-92.
[10]景洁.生物检测仪中数据采集模块的设计[J].仪器仪表学报,2006,(6):154-155.Jing Jie.Design of data acquisition in biology analyzing instrument[J].Chinese Journal of Scientific Instrument,2006,(6):154-155.