超磁致伸缩微位移致动器的理论分析与设计
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摘要
科学技术的快速发展使得机电设备越来越趋于微型化。为了在体积不足1 cm~3的空间里达到精确测量,超磁致伸缩材料成为当下研究的热点。以J-A模型和磁-机效应法为依据,建立超磁致伸缩的磁机耦合模型,设计了以圆弧形超磁致伸缩薄片为核心部件的微型位移致动器。利用COMSOL Multiphysics仿真软件分析了当给予线圈电流密度为10~6A/m~2的驱动电流时,不同厚度的超磁致伸缩薄片模型,得到相应的应力张量图和磁致伸缩曲线。展示0. 35 mm厚度的铁镓合金辅以1 mm厚度硅基底的致动器模型,并获得了较为理想的0. 8μm输出位移量。将仿真与实验结果进行对比,证明了理论模型的准确性以及执行器结构的可行性。该微位移执行器具有体积小、响应快、精度高、便于集成等优点,在振动控制、微定位、机器人等领域有着广阔的应用前景。
With the rapid development of science and technology,mechanical and electrical equipment becomes more and more miniature,in order to achieve precise measurement in less than 1 cm~3,the giant magnetostrictive material has become a research hotspot. The magneto-mechanical coupling model based on J-A model and magnetomechanical effect method is proposed. Meanwhile,a micro displacement actuator based on giant magnetostrictive film with arc shape was designed. The different thickness of films was analyzed by COMSOL Multiphysics when current density 10~6 A/m~2 flowed through the driving coil,and the stress strain diagram and magnetostrictive curve are obtained. The actuator model is presented which is composed of Fe-GA alloy with 0. 35 mm thickness and silicon basement with 1 mm thickness,furthermore,an ideal output displacement of 0. 8 μm can be obtained. After comparing the simulation results with the test ones,it seemed that the coupling model was accurate and the structure was feasible. This displacement actuator had the advantages of small volume,fast response,high precision,easy integration etc. which had a broad application prospect in the field of vibration control,micro positioning,robot and so on.
With the rapid development of science and technology,mechanical and electrical equipment becomes more and more miniature,in order to achieve precise measurement in less than 1 cm~3,the giant magnetostrictive material has become a research hotspot. The magneto-mechanical coupling model based on J-A model and magnetomechanical effect method is proposed. Meanwhile,a micro displacement actuator based on giant magnetostrictive film with arc shape was designed. The different thickness of films was analyzed by COMSOL Multiphysics when current density 10~6 A/m~2 flowed through the driving coil,and the stress strain diagram and magnetostrictive curve are obtained. The actuator model is presented which is composed of Fe-GA alloy with 0. 35 mm thickness and silicon basement with 1 mm thickness,furthermore,an ideal output displacement of 0. 8 μm can be obtained. After comparing the simulation results with the test ones,it seemed that the coupling model was accurate and the structure was feasible. This displacement actuator had the advantages of small volume,fast response,high precision,easy integration etc. which had a broad application prospect in the field of vibration control,micro positioning,robot and so on.
引文
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2 张洪平,杜挺,王龙妹,等.稀土-铁系超磁致伸缩材料水声换能器的研制[J].金属功能材料,1995,2(3):107-109Zhang Hongping,Du Ting,Wang Longmei,et al. Development of rare earth ferromagnetic giant magnetostrictive material underwater acoustic transducer[J]. Metallic Functional Materials,1995,2(3):107-109
3 贾振元,武丹,杨兴,等.薄膜型超磁致伸缩微执行器的研究现状[J].压电与声光,2003,22(3):157-159Jia Zhenyuan,Wu Dan,Yang Xing,et al. Research status of thin film giant magnetostrictive micro actuator[J]. Piezoelectrics and Acoustooptics,2003,22(3):157-159
4 黄继雄,刘裕,李朋.主动控制静压轴承薄膜节流器仿真分析[J].组合机床与自动化加工技术,2017(2):65-67Huang Jixiong,Liu Yu,Li Peng. Simulation analysis of thin film restrictor of active control hydrostatic bearing[J]. Modular Machine Tool and Automatic Manufacturing Technique,2017(2):65-67
5 Colussi M,Berto F,Mori K,et al. Strain energy density based assessment of cracked terfenol-D specimens under magnetic field and different loading rates[J]. Procedia Structural Integrity,2016,2(6):1837-1844
6 Pendharkar J,Nyayate M. Magnetic and magnetostrictive properties of gadolinium terfenol-D alloys[J]. Indian Journal of Applied Research,2016,5(9):244-248
7 Risplendi F,Ricci A,Cicero G. Functionalization layer effect on the mechanical properties of silicon based micro-cantilever mass sensors:A theoretical study[J]. Sensors and Actuators B,2014,195:177-180
8 Li H,Preidikman S,Balachandran B,et al. Nonlinear free and foced oscilations of piezoelectric microresonators[J]. Journal of Micromechanics and Micro Engineering,2006,16(2):188-196
9 Jiles D C,Atherton D L. Theory of the magnetization process in ferromagnets and its application to the magnet mechanical effect[J]. Journal of Physics D:Applied Physics,1984,17:1265-1281
10 Sablik M J,Chen Y,Jiles D C. Modified law of approach for the magnetomech-anical model[J]. Quantitative Nondestructive Evaluation. 2000,19:1565-1572