PSD法在超精密加工质量评价中的应用
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摘要
功率谱密度法(Power Spectral Density,PSD)从物理意义上来讲就是单位频率内的信号能量,用于描述随机过程的功率与频率之间的关系。PSD法可以用于分析超精密加工表面的形貌特征,也可以分析不同频率在表面形貌中的分布,从而评价加工工艺对超精密加工表面质量的影响。利用一维PSD的方法,评价了磨削硅片、抛光硅片、抛光铜片表面的质量,通过结果分析可知,与表面粗糙度方法相比,PSD方法可以更全面地评价被加工工件的表面质量。因此,需要在实验室教学过程中引导学生关注功率谱密度分析方法,建立功率谱密度函数与超精密加工表面质量之间的关系。
Power Spectral Density( PSD) is the signal energy per unit of frequency and widely used to describe the relationship between the power and frequency in the random process. The PSD method can be used to analyze the topography characteristics of ultra-precision machined surfaces and to analyze the distribution of different frequencies in surface topography to evaluate the effect of machining processes on the surface quality of ultra-precision machined surfaces. By using the one-dimensional and two-dimensional PSD method,the quality of the surface of the ground silicon wafer,the polished silicon wafer and the polished copper surface is evaluated. According to the results,the PSD method is more suitable to evaluate the machined workpiece than the surface roughness method. It is necessary to lead the students focus on the application of PSD in the field of ultra-precision machining.
Power Spectral Density( PSD) is the signal energy per unit of frequency and widely used to describe the relationship between the power and frequency in the random process. The PSD method can be used to analyze the topography characteristics of ultra-precision machined surfaces and to analyze the distribution of different frequencies in surface topography to evaluate the effect of machining processes on the surface quality of ultra-precision machined surfaces. By using the one-dimensional and two-dimensional PSD method,the quality of the surface of the ground silicon wafer,the polished silicon wafer and the polished copper surface is evaluated. According to the results,the PSD method is more suitable to evaluate the machined workpiece than the surface roughness method. It is necessary to lead the students focus on the application of PSD in the field of ultra-precision machining.
引文
[1]袁巨龙,王志伟,文东辉,等.超精密加工现状综述[J].机械工程学报,2007,43(1):35-48.
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[4]岳巾英,王泰升,李素文.利用功率谱密度评价离子束抛光光学元件表面粗糙度[J].光学技术,2017,43(3):208-211.
[5] R. N. Youngworth,B. B. Gallagher,B. L. Stamper. An Overview of Power Spectral Density(PSD)Caculations[J]. Proc. of SPIE,2005,5869:0U1-0U5.
[6] D. M. Aikens,C. R. Wolf,J. K. Lawson. The Use of Power Spectral Density(PSD)Functions in Specifying Optics for the National Ignition Facility[J].Proc.of SPIE,1995,2576:281-292.
[7] X.C.Luo,K.Cheng.Nonlinear Effects in Precision Machining Engineering Materials[J].Proc.of SPIE,2004,1189:112-121.
[8]吴贤莉.基于功率谱密度的车削质量控制[J].航空精密制造技术,1999,35(1):23-24.
[9] Y.H.Liu,L.Teng.Application of Power Spectral Density to Specify Optical Super-smooth Surface[J].Proc.of SPIE,2006,6150:311-315.
[10]沈正祥,王占山,马彬,等.利用功率谱密度函数表征光学薄膜基底表面粗糙度[J].光学仪器,2006,28(4):141-145.
[2] I.S.Jawahir,E.Brinksmeier,R.M'saoubi,et al.Surface integrity in material removal processes:Recent advances[J]. CIRP AnnalsManufacturing Technology,2011,60(2):603-626.
[3] V.V.Martynov,Y.Y.Platonov.Surface roughness analysis of multilayer x-ray optics[J].Advances in X-Ray/EUV Optics and Components,2008,7077(3):7077041-7077048.
[4]岳巾英,王泰升,李素文.利用功率谱密度评价离子束抛光光学元件表面粗糙度[J].光学技术,2017,43(3):208-211.
[5] R. N. Youngworth,B. B. Gallagher,B. L. Stamper. An Overview of Power Spectral Density(PSD)Caculations[J]. Proc. of SPIE,2005,5869:0U1-0U5.
[6] D. M. Aikens,C. R. Wolf,J. K. Lawson. The Use of Power Spectral Density(PSD)Functions in Specifying Optics for the National Ignition Facility[J].Proc.of SPIE,1995,2576:281-292.
[7] X.C.Luo,K.Cheng.Nonlinear Effects in Precision Machining Engineering Materials[J].Proc.of SPIE,2004,1189:112-121.
[8]吴贤莉.基于功率谱密度的车削质量控制[J].航空精密制造技术,1999,35(1):23-24.
[9] Y.H.Liu,L.Teng.Application of Power Spectral Density to Specify Optical Super-smooth Surface[J].Proc.of SPIE,2006,6150:311-315.
[10]沈正祥,王占山,马彬,等.利用功率谱密度函数表征光学薄膜基底表面粗糙度[J].光学仪器,2006,28(4):141-145.