摘要
针对超精密微小型复合加工机床的精度时变性和非线性变动问题,综述了超精密机床结构设计、超精密加工精度稳定性、热因素对超精密加工精度影响、结构蠕变引起精度变动4个典型方面的研究状况,提出超精密微小型复合加工机床的精度稳定性主要受到力、热、环境变动所引起的结构亚微米级精度的时空变化,并且这些变化的影响机理、变动规律属于非线性特征,因此,超精密复合加工精度稳定性的实现必须解决这些问题。
For the time-varying feature and nonlinear fluctuation of ultra-precision micro compound machine tool precision,this article reviews four typical aspects including the ultra-precision machine tool structural design,ultra-precision machining stability,thermal influence on ultra-precision machining accuracy,structural creep on the precision. It indicates that the precision stability of ultra-precision machine tool is mainly influenced by the structural sub-micron accuracy change due to force,heat,and temporal variability of the environment; moreover,the change mechanism and change law belong to nonlinear characteristics.
引文
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