飞秒激光跟踪仪跟踪光路的优化设计与分析
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摘要
基于光学系统对跟踪探测的影响,结合仪器功能,提出了一种基于胶合透镜减小跟踪偏移量的方法,实现了对飞秒激光跟踪仪跟踪光路的优化;改进了准直扩束光路,细化了光学系统,分析了优化后光学系统在接收功率和杂光方面对跟踪探测的影响机理。基于优化的光学系统设计,搭建实验系统进行了探测实验。实验结果表明,补偿后的跟踪探测精度可达3μm,这满足仪器精密跟踪要求。
Based on the analysis of the influence of optical system on tracking detection and combined with the instrumental functions, a smart method based on glued lens is proposed to reduce tracking offsets. The tracking optical path in the femtosecond laser tracker is optimized. At the same time, the optical path for collimation and expanding is improved, and the optical system is refined. The influence mechanism of receiving laser power and stray light in the optimized optical system on tracking detection is analyzed in detail. Based on the optimal design of the optical system, the experimental system is established and the detection experiment is conducted. The research results show that the tracking detection accuracy can reach 3 μm after compensation, which meets the precision tracking requirements of instruments.
Based on the analysis of the influence of optical system on tracking detection and combined with the instrumental functions, a smart method based on glued lens is proposed to reduce tracking offsets. The tracking optical path in the femtosecond laser tracker is optimized. At the same time, the optical path for collimation and expanding is improved, and the optical system is refined. The influence mechanism of receiving laser power and stray light in the optimized optical system on tracking detection is analyzed in detail. Based on the optimal design of the optical system, the experimental system is established and the detection experiment is conducted. The research results show that the tracking detection accuracy can reach 3 μm after compensation, which meets the precision tracking requirements of instruments.
引文
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[9] Cui C J, Lao D B, Dong D F, et al. Calibration method for initial position of miss distance in femtosecond laser tracker[J]. Infrared and Laser Engineering, 2017, 46(1): 0117001. 崔成君, 劳达宝, 董登峰, 等. 飞秒激光跟踪仪跟踪脱靶量零位标定方法[J]. 红外与激光工程, 2017, 46(1): 0117001.
[10] Zhang Y J, Qiu Z R, Li X H, et al. Laser tracking coordinate measurement system based on PSD[J]. Transducer and Microsystem Technologies, 2011, 30(7): 116-119. 张亚娟, 裘祖荣, 李杏华, 等. 基于PSD的激光跟踪坐标测量系统[J]. 传感器与微系统, 2011, 30(7): 116-119.
[11] Duan J, Sun X Y, Zhou N, et al. Applications research to PSD in the laser displacement detecting system[J]. Infrared and Laser Engineering, 2007, 36(z1): 549-552. 段洁, 孙向阳, 周娜, 等. PSD在激光位移检测系统中的应用研究[J]. 红外与激光工程, 2007, 36(z1): 549-552.
[12] Liu Q H, Feng G Y, Deng G L, et al. Theoretical and experimental studies on influence of collimation error on beam quality factor measurement[J]. Chinese Journal of Lasers, 2017, 44(9): 0905001. 刘亲厚, 冯国英, 邓国亮, 等. 准直误差对光束质量因子测量影响的理论与实验研究[J]. 中国激光, 2017, 44(9): 0905001.
[13] Mu Y J, Li R,Wan Y, et al. Stray light analysis and suppression for spaceborne lidar system[J]. Chinese Journal of Lasers, 2018, 45(5): 0510005. 穆永吉, 李蕊, 万渊, 等. 星载激光雷达系统杂散光分析与抑制[J]. 中国激光, 2018, 45(5): 0510005.
[14] Yu D Y, Tan H Y. Engineering optics[M]. Beijing: China Machine Press, 2011: 494-499. 郁道银, 谈恒英. 工程光学[M]. 北京: 机械工业出版社, 2011: 494-499.
[15] Zhang Y Y, Guo Y, Ren Y J, et al. Study of drift error and its compensation method in absolute distance measurement by optical frequency scanning interferometry[J]. Acta Optica Sinica, 2017, 37(12): 1212001. 张雅雅, 郭寅, 任永杰, 等. 光频扫描干涉绝对测距漂移误差与补偿方法研究[J]. 光学学报, 2017, 37(12): 1212001.
[16] Chen H F, Tang L, Sun Y Q, et al. Zemax simulation based energy analysis of optical system for laser tracking measurement[J]. Chinese Journal of Lasers, 2018, 45(7): 0704009. 陈洪芳, 汤亮, 孙衍强, 等. 基于Zemax仿真的激光追踪测量光学系统能量分析[J]. 中国激光, 2018, 45(7): 0704009.
[2] Liu L, Chen X D,Xiong L, et al. Angle error investigation in laser tracker testing large aspheric mirrors[J]. Chinese Journal of Lasers, 2016, 43(11): 1104003. 刘力, 陈新东, 熊玲, 等. 大口径非球面镜检测中激光跟踪仪测角误差研究[J]. 中国激光, 2016, 43(11): 1104003.
[3] Wendt K, Franke M, H?rtig F. Measuring large 3D structures using four portable tracking laser interferometers[J]. Measurement, 2012, 45(10): 2339-2345.
[4] Hu K, Li Y, Ji R Y, et al. Distance measurement of femtosecond laser in new type femtosecond laser tracker[J]. Instrument Technique and Sensor, 2015(6): 28-30. 胡坤, 黎尧, 纪荣祎, 等. 新型飞秒激光跟踪仪中飞秒激光测距研究[J]. 仪表技术与传感器, 2015(6): 28-30.
[5] He H N, Huang L S. Progress in the performance test of industrial robots[J]. Journal of China Jiliang University, 2017, 28(2): 133-140,168. 贺惠农, 黄连生. 工业机器人整机性能测试进展[J]. 中国计量大学学报, 2017, 28(2): 133-140,168.
[6] Zhao D, Dong C L, Guo H, et al. Kinematic calibration based on the multicollinearity diagnosis of a 6-DOF polishing hybrid robot using a laser tracker[J]. Mathematical Problems in Engineering, 2018: 1-13.
[7] Dong D F, Zhou W H, Ji R Y, et al. Design of precise tracking system of laser tracker[J]. Optics and Precision Engineering, 2016, 24(2): 309-318. 董登峰, 周维虎, 纪荣祎, 等. 激光跟踪仪精密跟踪系统的设计[J]. 光学精密工程, 2016, 24(2): 309-318.
[8] Cui C J. Research on key technologies of optical system of femtosecond laser tracking measurement system[D]. Changchun: Changchun University of Science and Technology, 2017: 50-57. 崔成君. 飞秒激光跟踪测量光学系统关键技术研究[D]. 长春: 长春理工大学, 2017: 50-57.
[9] Cui C J, Lao D B, Dong D F, et al. Calibration method for initial position of miss distance in femtosecond laser tracker[J]. Infrared and Laser Engineering, 2017, 46(1): 0117001. 崔成君, 劳达宝, 董登峰, 等. 飞秒激光跟踪仪跟踪脱靶量零位标定方法[J]. 红外与激光工程, 2017, 46(1): 0117001.
[10] Zhang Y J, Qiu Z R, Li X H, et al. Laser tracking coordinate measurement system based on PSD[J]. Transducer and Microsystem Technologies, 2011, 30(7): 116-119. 张亚娟, 裘祖荣, 李杏华, 等. 基于PSD的激光跟踪坐标测量系统[J]. 传感器与微系统, 2011, 30(7): 116-119.
[11] Duan J, Sun X Y, Zhou N, et al. Applications research to PSD in the laser displacement detecting system[J]. Infrared and Laser Engineering, 2007, 36(z1): 549-552. 段洁, 孙向阳, 周娜, 等. PSD在激光位移检测系统中的应用研究[J]. 红外与激光工程, 2007, 36(z1): 549-552.
[12] Liu Q H, Feng G Y, Deng G L, et al. Theoretical and experimental studies on influence of collimation error on beam quality factor measurement[J]. Chinese Journal of Lasers, 2017, 44(9): 0905001. 刘亲厚, 冯国英, 邓国亮, 等. 准直误差对光束质量因子测量影响的理论与实验研究[J]. 中国激光, 2017, 44(9): 0905001.
[13] Mu Y J, Li R,Wan Y, et al. Stray light analysis and suppression for spaceborne lidar system[J]. Chinese Journal of Lasers, 2018, 45(5): 0510005. 穆永吉, 李蕊, 万渊, 等. 星载激光雷达系统杂散光分析与抑制[J]. 中国激光, 2018, 45(5): 0510005.
[14] Yu D Y, Tan H Y. Engineering optics[M]. Beijing: China Machine Press, 2011: 494-499. 郁道银, 谈恒英. 工程光学[M]. 北京: 机械工业出版社, 2011: 494-499.
[15] Zhang Y Y, Guo Y, Ren Y J, et al. Study of drift error and its compensation method in absolute distance measurement by optical frequency scanning interferometry[J]. Acta Optica Sinica, 2017, 37(12): 1212001. 张雅雅, 郭寅, 任永杰, 等. 光频扫描干涉绝对测距漂移误差与补偿方法研究[J]. 光学学报, 2017, 37(12): 1212001.
[16] Chen H F, Tang L, Sun Y Q, et al. Zemax simulation based energy analysis of optical system for laser tracking measurement[J]. Chinese Journal of Lasers, 2018, 45(7): 0704009. 陈洪芳, 汤亮, 孙衍强, 等. 基于Zemax仿真的激光追踪测量光学系统能量分析[J]. 中国激光, 2018, 45(7): 0704009.