超声磁粒复合研磨对石英玻璃管内表面的光整研究
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摘要
目的探究超声磁粒复合研磨对石英玻璃管内表面管研磨的可能性,分析有无辅助磁极及不同粒径的研磨粒子对内表面的影响。方法在石英玻璃管内表面添加辅助磁极并辅助超声磁粒复合研磨装置,加快磨粒的翻滚,提高抛光质量和效率。结果采用超声磁粒复合研磨装置,选用150、250、350μm三种粒径的研磨粒子分别进行研磨实验,研磨40 min后,150μm的研磨粒子表面粗糙度值从原始4.4μm下降到1.2μm,250μm的研磨粒子表面粗糙度值下降到0.2μm,350μm的研磨粒子表面粗糙度值下降到0.6μm。对比传统磁粒研磨装置与超声磁粒复合研磨装置,保持研磨粒子粒径为250μm,经40 min研磨,在传统磁粒研磨装置上未添加辅助磁极,石英玻璃管内表面粗糙度值从原始4.4μm下降到2.8μm;在传统磁粒研磨装置上添加辅助磁极,粗糙度值从原始4.4μm下降到1.1μm;在超声磁粒复合研磨装置上添加辅助磁极,粗糙度值从原始4.4μm下降到0.2μm。结论在石英玻璃管内表面添加辅助磁极后,表面粗糙度值得到下降。采用超声磁粒研磨装置使石英玻璃管内表面粗糙度值在原有基础上进一步下降,且选用粒径为250μm的研磨粒子最佳。加工后,工件内表面的加工均匀性显著提升,原始缺陷和原始波峰基本去除。
The work aims to explore possibility of ultrasonic magnetic particle composite grinding on inner surface tube of quartz glass tube, and analyze effects of presence of auxiliary magnetic pole and abrasive particles of different particle size on inner surface. Auxiliary magnetic pole was supplied on inner surface of quartz glass tube and ultrasonic magnetic particle composite grinding device was assisted to speed up rolling of abrasive particles, and improve polishing quality and efficiency. Ultrasonic magnetic particle composite grinding device and abrasive particles of 150 μm, 250 μm and 350 μm size were selected for grinding experiment. After 40 min grinding, surface roughness of 150 μm abrasive particle decreased from 4.4 μm to 1.2 μm, that of 250 μm abrasive particle decreased to 0.2 μm, and that of 350 μm abrasive particle decreased to 0.6 μm. Compared with traditional magnetic particle grinding device and ultrasonic magnetic particle composite grinding device, provided that abrasive particle size was maintained at 250 μm, after 40 min grinding, surface roughness of quartz glass tube decreased from 4.4 μm to 2.8 μm when no auxiliary pole was supplied to the traditional magnetic abrasive grinding device; the value decreased from 4.4 μm to 1.1 μm when auxiliary pole was supplied to the traditional magnetic abrasive device; the value decreased from 4.4 μm to 0.2 μm when auxiliary pole was supplied to ultrasonic magnetic particle composite grinding device. Surface roughness is decreased as auxiliary magnetic pole is supplied on inner surface of quartz glass tube, that of inner surface further decreases as ultrasonic magnetic particle grinding device is used, and best effects can be achieved by using 250 μm abrasive particles. After processing, inner surface machining uniformity of workpiece is greatly improved, and original defects and original wave crests are basically removed.
The work aims to explore possibility of ultrasonic magnetic particle composite grinding on inner surface tube of quartz glass tube, and analyze effects of presence of auxiliary magnetic pole and abrasive particles of different particle size on inner surface. Auxiliary magnetic pole was supplied on inner surface of quartz glass tube and ultrasonic magnetic particle composite grinding device was assisted to speed up rolling of abrasive particles, and improve polishing quality and efficiency. Ultrasonic magnetic particle composite grinding device and abrasive particles of 150 μm, 250 μm and 350 μm size were selected for grinding experiment. After 40 min grinding, surface roughness of 150 μm abrasive particle decreased from 4.4 μm to 1.2 μm, that of 250 μm abrasive particle decreased to 0.2 μm, and that of 350 μm abrasive particle decreased to 0.6 μm. Compared with traditional magnetic particle grinding device and ultrasonic magnetic particle composite grinding device, provided that abrasive particle size was maintained at 250 μm, after 40 min grinding, surface roughness of quartz glass tube decreased from 4.4 μm to 2.8 μm when no auxiliary pole was supplied to the traditional magnetic abrasive grinding device; the value decreased from 4.4 μm to 1.1 μm when auxiliary pole was supplied to the traditional magnetic abrasive device; the value decreased from 4.4 μm to 0.2 μm when auxiliary pole was supplied to ultrasonic magnetic particle composite grinding device. Surface roughness is decreased as auxiliary magnetic pole is supplied on inner surface of quartz glass tube, that of inner surface further decreases as ultrasonic magnetic particle grinding device is used, and best effects can be achieved by using 250 μm abrasive particles. After processing, inner surface machining uniformity of workpiece is greatly improved, and original defects and original wave crests are basically removed.
引文
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[2]陈杨,隆仁伟,陈志刚.Ce O2@Si O2纳米复合磨料的制备及其对光学石英玻璃的抛光性能[J].材料导报,2010,24(18):35-38.CHEN Yang,LONG Ren-wei,CHEN Zhi-gang.Preparation and Polishing Performance of Ce O2@Si O2Composite Abrasives on the Optical Quartz Glass[J].Materials Review,2010,24(18):35-38.
[3]杜秀蓉,宋学富,孙元成,等.抛光石英玻璃亚表面波纹研究[J].材料导报,2014(s1):240-242.DU Xiu-rong,SONG Xue-fu,SUN Yuan-cheng,et al.Study of Subsurface Waves on Polished Silica Glass[J].Material Review,2014(S1):240-242.
[4]仇中军,周立波,房丰洲,等.石英玻璃的化学机械磨削加工[J].光学精密工程,2010,18(7):1554-1561.QIU Zhong-jun,ZHOU Li-bo,FANG Feng-zhou,et al.Chemical Mechanical Grinding for Quartz Glass[J].Optics and Precision Engineering,2010,18(7):1554-1561.
[5]刘德福,陈涛,陈广林,等.软性粒子抛光石英玻璃的材料去除机理[J].光学精密工程,2016,24(7):1623-1631.LIU De-fu,CHEN Tao,CHEN Guang-lin,et al.Material Removal Mechanism for Fused Glass by Using Soft Particles[J].Optical Precision Engineering,2016,24(7):1623-1631.
[6]李彦俊,陈燕,郭龙文.磁研磨法去除微小喷嘴棱边处毛刺的研究[J].航空制造技术,2014,453(9):88-90.LI Yan-jun,CHEN Yan,GUO Long-wen.Study of Deburring on Edge of Micro Nozzle by Magnetic Abrasive Finishing[J].Aeronautical Manufacturing Technology,2014,453(9):88-90.
[7]陈燕,巨东英.应用磁研磨法对细长管内表面的抛光处理[J].模具制造,2004(10):48-50.CHEN Yan,JU Dong-ying.Application of Magnetic Grinding Method for Slender Pipe Inner Surface Polishing Process[J].Mold Manufacturing,2004(10):48-50.
[8]韩冰,云昊,陈燕,等.Al2O3陶瓷管内表面高效精密研磨试验研究[J].机械设计与制造,2016(1):154-157.HAN Bing,YUN Hao,CHEN Yan,et al.Experimental Study of High Efficiency and Low Damage Grinding on the Inner Surface of Al2O3 Ceramics Tube[J].Mechanical Design and Manufacture,2016(1):154-157.
[9]杨海吉,韩冰,陈燕,等.旋转磁极在SUS304管内表面精密抛光中的应用[J].组合机床与自动化加工技术,2017(9):118-121.YANG Hai-ji,HAN Bing,CHEN Yan,et al.The Application of Rotating Magnetic Pole in the Polishing of the Inner Surface of the Alloy Tube[J].Modular Machine Tool and Automatic Processing Technology,2017(9):118-121.
[10]谭悦,陈燕,曾加恒,等.超声磁力复合研磨对TA18管内表面光整加工[J].电镀与涂饰,2017(16):870-873.TAN Yue,CHEN Yan,ZENG Jia-heng,et al.Finishing Machining of Inner Surface of TA18 Pipe by Ultrasonic-Magnetic Composite Grinding[J].Electroplating&Finishing,2017(16):870-873.
[11]王庆仓,张晓东,苏建修,等.Si C单晶片化学机械研磨试验研究[J].表面技术,2015(4):137-140.WANG Qing-cang,ZHANG Xiao-dong,SU Jian-xiu,et al.Experimental Study on Chemical Mechanical Lapping of Si C Single Crystal Wafer[J].Surface Technology,2015(4):137-140.
[12]陈燕,宋宗朋,李昌,等.磁研磨法抛光40Cr钢管件内表面的影响因素[J].中国表面工程,2015,28(4):62-69.CHEN Yan,SONG Zong-peng,LI Chang,et al.Influencing Factors on Polishing Inner Surface of 40Cr Steel Pipe Fittings with a Magnetic Grinding Method[J].China Surface Engineering,2015,28(4):62-69.
[13]PEATEEK K,PULAK M P,GIRISH C V,et al.Understanding Flexible Abrasive Brush Behavior for Double Disk Magnetic Abrasive Finishing Based on Force Signature[J].Journal of Manufacturing Processes,2017,28:442-448.
[14]PEATEEK K,PULAK M P.Comparison of Finishing Characteristics of Two Paramagnetic Materials Using Double Disc Magnetic Abrasive Finishing[J].Journal of Manufacturing Processes,2015,17(1):63-77.
[15]韩宝军,何琼,杨妙.机械研磨工艺对AZ91D镁合金显微结构的影响[J].表面技术,2015(2):78-82.HAN Bao-jun,HE Qiong,YANG Miao.Effects of Surface Mechanical Attrition Treatment Technique on Microstructure of AZ91D Magnesium Alloys[J].Surface Technology,2015(2):78-82.