基于脉宽参量的TiN纳米晶薄膜制备及其性能?
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摘要
采用大功率脉冲溅射离子镀技术在不同脉宽条件下制备了一组TiN离子镀层,并通过XRD、SEM、AFM等手段对膜层的微观形貌、生长模式及相关力学性能进行了分析研究。结果表明:随着脉宽的增大,TiN膜层的瞬时沉积速率提高,膜层内部的晶化程度逐渐增强,薄膜晶粒尺寸有所增大,微观形貌显示为较典型的TiN(111)三角锥形以及柱状生长,颗粒尺寸及表面粗糙度均随脉宽的延长而增大,膜层整体无明显孔隙等缺陷存在。通过对H/E值的分析可以看出,较小脉宽条件下制备的膜层综合性能较好、可以获得较高的膜层硬度以及较大的硬度-模量比。
A series of TiN films were prepared by high power pulse sputtering with different pulse widths. The morphology, growth pattern and mechanical properties were studied by XRD, SEM, AFM, etc. The results show that the instantaneous deposition rate of TiN films increases, the crystalline degree increases gradually, and the grain size of the films increases with the increase of pulse width. The micro morphology exhibits typical triangular cone and columnar growth of TiN(111) crystal orientation. Both particle size and surface roughness increase with the increase of pulse width. No obvious pores and significant defects exist in the films. Analyses on H/E value show that the films have better comprehensive properties, higher coating hardness, and larger hardness modulus ratio under the condition of small pulse width.
A series of TiN films were prepared by high power pulse sputtering with different pulse widths. The morphology, growth pattern and mechanical properties were studied by XRD, SEM, AFM, etc. The results show that the instantaneous deposition rate of TiN films increases, the crystalline degree increases gradually, and the grain size of the films increases with the increase of pulse width. The micro morphology exhibits typical triangular cone and columnar growth of TiN(111) crystal orientation. Both particle size and surface roughness increase with the increase of pulse width. No obvious pores and significant defects exist in the films. Analyses on H/E value show that the films have better comprehensive properties, higher coating hardness, and larger hardness modulus ratio under the condition of small pulse width.
引文
[1] Zhao Xinmin(赵新民),Di Guoqing(狄国庆),Zhu Yan(朱炎).Vacuum Science and Technology(真空科学与技术学报)[J],2003, 23(2):104
[2] Gu Yan(谷燕). Thesis for Master(硕士论文)[D]. Dalian:Dalian University of Technology, 2006
[3] Dong Yun(董允),Zhang Yansen(张延森),Lin Xiaopin(林晓娉). Modern Surface Engineering Technology(现代表面工程技术)[M]. Beijing:China Machine Press, 1994:177
[4] Xu Binshi(徐滨士),Liu Shican(刘世参),Liang Xiubing(梁秀兵). Journal of Mechanical Engineering(机械工程学报)[J],2003, 39(10):21
[5] Qu Jingxin(曲敬信),Wang Honghong(汪泓宏).Handbook of Surface Engineering(表面工程手册)[M]. Beijing:Chemical Industry Press, 2003:357
[6] Yao Shoushan(姚寿山),Li Geyang(李戈扬),Hu Wenbin(胡文彬). Surface and Coatings Technology(表面科学与技术)[M].Beijing:China Machine Press, 2005:45
[7]Wang X M,Shao T M. Rare Metal Materials and Engineering[J], 2011, 40(2):481
[8] Henderson P S, Kelly P J, Arnell R D et al. Surface&Coatings Technology[J], 2003, 174:779
[9] Zhang J,Xue Q,Li S X,Applied Surface Science[J], 2013,280:626
[10] Ali S, Paul K. Surface&Coatings Technology[J], 2013, 229:151
[11] Ehiasarian A P, New R, Munz W D et al. Vacuum[J], 2002, 65:147
[12] Alami J, Sarakinos K, Mark G et al. Applied Physics Letters[J], 2006, 89(15):154104
[13] Shimizu T, Teranishi Y, Morikawa K et al. Thin Solid Films[J], 2015, 581:39
[14] Sarakinos K, Alami J, Konstantinidis S. Surface&Coatings Technology[J], 2010, 204:1661
[15] Lin J, Moore J J, Mishra Betal. Surface&Coatings Technology[J], 2009, 204:936
[16] Kouznetsov V,Maca'k K,Schneider J M. Surface&Coatings Technology[J], 1999, 122:290
[17] Helmersson U, Lattemann M, Bohlmark J. Thin Solid Films[J], 2006, 513:1
[18] Hecimovic A, Burcalova K, Ehiasarian A P. Journal of Physics D Applied Physics[J], 2008, 41:1459
[19] Bobzin K, Brogelmann T, Brugnara R H et al. Surface&Coatings Technology[J], 2015, 284:310
[20] Zhao Y H, Yang W J, Guo C Q et al. Acta Metal Sinca[J],2015,28(8):984
[21] Kohlscheen J, Stock H, Mayr P. Surface&Coatings Technology[J],2001,142:992
[22] Huang J H, Lau K W, Yu G P. Surface&Coatings Technology[J], 2005, 191:17
[23] Wang Zhenyu(王振玉),Xu Sheng(徐胜),Zhang Dong(张栋)et al. Acta Metallurgica Sinica(金属学报)[J],2014,50(5):540
[24] Yang Y C, Chang C T, Hsiao Y C et al. Surface&Coatings Technology[J], 2014, 259:219
[25] Chen Xiangyang(陈向阳),Zhang Jin(张瑾),Ma Shengli(马胜利)et al. Rare Metal Materials and Engineering(稀有金属工材料与程)[J],2016, 45(2):503
[2] Gu Yan(谷燕). Thesis for Master(硕士论文)[D]. Dalian:Dalian University of Technology, 2006
[3] Dong Yun(董允),Zhang Yansen(张延森),Lin Xiaopin(林晓娉). Modern Surface Engineering Technology(现代表面工程技术)[M]. Beijing:China Machine Press, 1994:177
[4] Xu Binshi(徐滨士),Liu Shican(刘世参),Liang Xiubing(梁秀兵). Journal of Mechanical Engineering(机械工程学报)[J],2003, 39(10):21
[5] Qu Jingxin(曲敬信),Wang Honghong(汪泓宏).Handbook of Surface Engineering(表面工程手册)[M]. Beijing:Chemical Industry Press, 2003:357
[6] Yao Shoushan(姚寿山),Li Geyang(李戈扬),Hu Wenbin(胡文彬). Surface and Coatings Technology(表面科学与技术)[M].Beijing:China Machine Press, 2005:45
[7]Wang X M,Shao T M. Rare Metal Materials and Engineering[J], 2011, 40(2):481
[8] Henderson P S, Kelly P J, Arnell R D et al. Surface&Coatings Technology[J], 2003, 174:779
[9] Zhang J,Xue Q,Li S X,Applied Surface Science[J], 2013,280:626
[10] Ali S, Paul K. Surface&Coatings Technology[J], 2013, 229:151
[11] Ehiasarian A P, New R, Munz W D et al. Vacuum[J], 2002, 65:147
[12] Alami J, Sarakinos K, Mark G et al. Applied Physics Letters[J], 2006, 89(15):154104
[13] Shimizu T, Teranishi Y, Morikawa K et al. Thin Solid Films[J], 2015, 581:39
[14] Sarakinos K, Alami J, Konstantinidis S. Surface&Coatings Technology[J], 2010, 204:1661
[15] Lin J, Moore J J, Mishra Betal. Surface&Coatings Technology[J], 2009, 204:936
[16] Kouznetsov V,Maca'k K,Schneider J M. Surface&Coatings Technology[J], 1999, 122:290
[17] Helmersson U, Lattemann M, Bohlmark J. Thin Solid Films[J], 2006, 513:1
[18] Hecimovic A, Burcalova K, Ehiasarian A P. Journal of Physics D Applied Physics[J], 2008, 41:1459
[19] Bobzin K, Brogelmann T, Brugnara R H et al. Surface&Coatings Technology[J], 2015, 284:310
[20] Zhao Y H, Yang W J, Guo C Q et al. Acta Metal Sinca[J],2015,28(8):984
[21] Kohlscheen J, Stock H, Mayr P. Surface&Coatings Technology[J],2001,142:992
[22] Huang J H, Lau K W, Yu G P. Surface&Coatings Technology[J], 2005, 191:17
[23] Wang Zhenyu(王振玉),Xu Sheng(徐胜),Zhang Dong(张栋)et al. Acta Metallurgica Sinica(金属学报)[J],2014,50(5):540
[24] Yang Y C, Chang C T, Hsiao Y C et al. Surface&Coatings Technology[J], 2014, 259:219
[25] Chen Xiangyang(陈向阳),Zhang Jin(张瑾),Ma Shengli(马胜利)et al. Rare Metal Materials and Engineering(稀有金属工材料与程)[J],2016, 45(2):503