氧化铝基体3.7μm与4.8μm双波段带通滤光膜研制
|
摘要
以红外光学和薄膜技术为理论背景,详细介绍了氧化铝基体表面3.7μm与4.8μm双波段带通滤光膜的特性、制备及测试方法。氧化铝(Al_2O_3)由于其透光区域较宽,牢固度好,便于光学系统使用而被经常应用于中波红外光学系统中。采用软件优化计算和双面镀制截止带通滤光膜的方案,通过速率控制、离子辅助等工艺方法研制成功了可靠性和光谱特性皆优的双波段带通滤光薄膜。分析认为设计结构和优化算法对于薄膜通带平坦度、截止深度以及透过率有着明显的影响。制备工艺方面,除了合适的蒸发速率外,采取缓慢蒸发和弱离子能量辅助也是很重要的关键技术,最终光谱透过率测试平均大于87%,通过了环境测试,符合使用要求。
The characteristics, preparation and testing methods of 3.7 μm and 4.8 μm double band-pass filter on the surface of alumina substrate were introduced in the background of infrared optical and thin film technology. Alumina(Al_2O_3) was used in medium wave infrared optical systems usually because of its wide light transmission area and good fastness and ease of use in optical systems. The two-band bandpass filter with excellent reliability and spectral characteristics were successfully developed by means of speed control and ion assisted process. The films were characterized by software optimization and double-coating of pass-filters. The analysis shows that the design structure and the optimization algorithm have a significant impact on the passband flatness, cut-off depth and transmittance of the film. Preparation process, in addition to the appropriate evaporation rate, the use of slow evaporation and weak ion energy assist was also very important key technology. The final spectral transmittance test averaged over 87%and passed environmental tests to meet the usage requirements.
The characteristics, preparation and testing methods of 3.7 μm and 4.8 μm double band-pass filter on the surface of alumina substrate were introduced in the background of infrared optical and thin film technology. Alumina(Al_2O_3) was used in medium wave infrared optical systems usually because of its wide light transmission area and good fastness and ease of use in optical systems. The two-band bandpass filter with excellent reliability and spectral characteristics were successfully developed by means of speed control and ion assisted process. The films were characterized by software optimization and double-coating of pass-filters. The analysis shows that the design structure and the optimization algorithm have a significant impact on the passband flatness, cut-off depth and transmittance of the film. Preparation process, in addition to the appropriate evaporation rate, the use of slow evaporation and weak ion energy assist was also very important key technology. The final spectral transmittance test averaged over 87%and passed environmental tests to meet the usage requirements.
引文
[1]Chen Chaoping,Shi Jiantao,Guo Rui,et al.Design and preparation of mid-infrared band-pass filter[J].Journal of Applied Optics,2012,33:595-598.(in Chinese)陈朝平,师建涛,郭芮,等.中红外带通滤光片的设计与制备[J].应用光学,2012,33:595-598.
[2]Tang Jinfa,Gu Peifu.Modern Optical Thin Film Technology[M].Hangzhou:Zhejiang University Press,2006:107-110.(in Chinese)唐晋发,顾培夫.现代光学薄膜技术[M].杭州:浙江大学出版社,2006:107-110.
[3]Zhu Zhen.Application of optical films in laser and infrared technology[J].Laser&Infrared,2006,36(S):792-796.(in Chinese)朱震.光学薄膜在激光与红外技术中的应用[J].激光与红外,2006,36(S):792-796.
[4]Zhang Jinsheng,Zhang Jinlong,Ning Yongqiang,et al.Design and optimization of 1 555 nm broad-bandpass filter film[J].Chinese Optics,2013,6(4):557-562.(in Chinese)张金胜,张金龙,宁永强,等.1 555 nm宽带通滤光膜的设计和优化[J].中国光学,2013,6(4):557-562.
[5]Gong Dawei,Fu Xiuhua,Geng Siyu,et al.Design and manufacture of infrared double waveband laser filter films[J].Chinese Optics,2011,4(3):293-298.(in Chinese)宫大为,付秀华,耿似玉,等.红外双波段激光滤光膜的研制[J].中国光学,2011,4(3):293-298.
[6]Bu Yikun,Zhao Li,Zheng Quan.Design method of high damage threshold laser mirror[J].Infrared and Laser Engineering,2006,35(2):183-186.(in Chinese)卜轶坤,赵丽,郑权.高损伤阈值激光反射镜的设计方法[J].红外与激光工程,2006,35(2):183-186.
[7]Huang Wei,Zhang Yundong.Ion beam assisted deposition of infrared wideband antireflection coating on micro-optical component used in low temperature[J].Opt Technol,1998,24(3):94-96.(in Chinese)黄伟,张云洞.离子束辅助淀积低温微光学元件红外宽带增透膜[J].光学技术,1998,24(3):94-96.
[8]Yu Tianyan,Zhu Furong,Liu Dingquan,et al.Design and deposition of broad band IR antireflection coatings on Zn S lens[J].Acta Optica Sinica,2005,25(2):270-273.(in Chinese)于天燕,朱福荣,刘定权,等.硫化锌透镜中长波红外宽带增透膜的研制[J].光学学报,2005,25(2):270-273.
[9]Ai Wanjun,Xiong Shengming.Large optical coatings fabricated by ion assisted technology[J].Infrared and Laser Engineering,2015,44(S1):183-188.(in Chinese)艾万君,熊胜明.离子束辅助沉积大口径光学薄膜[J].红外与激光工程,2015,44(S1):183-188.
[10]Liu Huasong,Jiang Chenghui,Li Shida,et al.Effect of vacuum annealing on optical and microstructure properties of zinc sulfide thin film[J].Optics and Precision Engineering,2017,25(8):2038-2045.(in Chinese)刘华松,姜承慧,李士达,等.真空热处理对硫化锌薄膜光学与微结构特性的影响[J].光学精密工程,2017,25(8):2038-2045.
[2]Tang Jinfa,Gu Peifu.Modern Optical Thin Film Technology[M].Hangzhou:Zhejiang University Press,2006:107-110.(in Chinese)唐晋发,顾培夫.现代光学薄膜技术[M].杭州:浙江大学出版社,2006:107-110.
[3]Zhu Zhen.Application of optical films in laser and infrared technology[J].Laser&Infrared,2006,36(S):792-796.(in Chinese)朱震.光学薄膜在激光与红外技术中的应用[J].激光与红外,2006,36(S):792-796.
[4]Zhang Jinsheng,Zhang Jinlong,Ning Yongqiang,et al.Design and optimization of 1 555 nm broad-bandpass filter film[J].Chinese Optics,2013,6(4):557-562.(in Chinese)张金胜,张金龙,宁永强,等.1 555 nm宽带通滤光膜的设计和优化[J].中国光学,2013,6(4):557-562.
[5]Gong Dawei,Fu Xiuhua,Geng Siyu,et al.Design and manufacture of infrared double waveband laser filter films[J].Chinese Optics,2011,4(3):293-298.(in Chinese)宫大为,付秀华,耿似玉,等.红外双波段激光滤光膜的研制[J].中国光学,2011,4(3):293-298.
[6]Bu Yikun,Zhao Li,Zheng Quan.Design method of high damage threshold laser mirror[J].Infrared and Laser Engineering,2006,35(2):183-186.(in Chinese)卜轶坤,赵丽,郑权.高损伤阈值激光反射镜的设计方法[J].红外与激光工程,2006,35(2):183-186.
[7]Huang Wei,Zhang Yundong.Ion beam assisted deposition of infrared wideband antireflection coating on micro-optical component used in low temperature[J].Opt Technol,1998,24(3):94-96.(in Chinese)黄伟,张云洞.离子束辅助淀积低温微光学元件红外宽带增透膜[J].光学技术,1998,24(3):94-96.
[8]Yu Tianyan,Zhu Furong,Liu Dingquan,et al.Design and deposition of broad band IR antireflection coatings on Zn S lens[J].Acta Optica Sinica,2005,25(2):270-273.(in Chinese)于天燕,朱福荣,刘定权,等.硫化锌透镜中长波红外宽带增透膜的研制[J].光学学报,2005,25(2):270-273.
[9]Ai Wanjun,Xiong Shengming.Large optical coatings fabricated by ion assisted technology[J].Infrared and Laser Engineering,2015,44(S1):183-188.(in Chinese)艾万君,熊胜明.离子束辅助沉积大口径光学薄膜[J].红外与激光工程,2015,44(S1):183-188.
[10]Liu Huasong,Jiang Chenghui,Li Shida,et al.Effect of vacuum annealing on optical and microstructure properties of zinc sulfide thin film[J].Optics and Precision Engineering,2017,25(8):2038-2045.(in Chinese)刘华松,姜承慧,李士达,等.真空热处理对硫化锌薄膜光学与微结构特性的影响[J].光学精密工程,2017,25(8):2038-2045.