增强短波红外InGaAs探测器透过率的纳米光天线研究
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摘要
过去几十年中,短波红外InGaAs探测器被广泛用于近红外探测系统中,通过将InGaAs光电探测器与纳米光天线结合可以增强光吸收并提高量子效率。然而,这种纳米光天线往往由聚焦离子束或电子束光刻制备而成,制备成本较高。本文介绍了一种更经济的沉积法来制备纳米光天线。用沉积法制备了纳米Ag颗粒阵列,Ag球平均半径为200 nm。研究了Ag纳米球阵列的表面等离子体效应对InGaAs光电探测器光吸收性能的影响,发现在整个近红外波段,InGaAs光电探测器帽层的透过率均显著提高。并且发现SiO2涂层激发了局域表面等离子体共振,分析了其对波长1?m附近的入射光的透过率增强效应。
Over the past few decades, the InP-based InGaAs photodetector has become an ideal choice for near-infrared detection systems. A possible way to increase its light absorption and quantum efficiency is by combining InGaAs photodetectors with optical nano-antennas. However, thes enano-antennas are usually prepared by focal-ion-or electron-beam lithography, which are time-consuming and costly processes. In this paper, we introduce an economical deposition method to fabricate optical nano-antennas. A Ag nanoparticle array, with 200 nm average radius, was obtained by deposition. The applicability of local surface plasmas to Ag nanoparticles for improving the absorbance of InP-based InGaAs photodetectors was investigated. The transmittance of the cap layer of the InGaAs photodetector was enhanced over almost the entire near-infrared spectrum. The enhancement of the transmittance near the 1?m wavelength was also analyzed. It was found that a SiO2 coating stimulates the local surface-plasmon resonance.
Over the past few decades, the InP-based InGaAs photodetector has become an ideal choice for near-infrared detection systems. A possible way to increase its light absorption and quantum efficiency is by combining InGaAs photodetectors with optical nano-antennas. However, thes enano-antennas are usually prepared by focal-ion-or electron-beam lithography, which are time-consuming and costly processes. In this paper, we introduce an economical deposition method to fabricate optical nano-antennas. A Ag nanoparticle array, with 200 nm average radius, was obtained by deposition. The applicability of local surface plasmas to Ag nanoparticles for improving the absorbance of InP-based InGaAs photodetectors was investigated. The transmittance of the cap layer of the InGaAs photodetector was enhanced over almost the entire near-infrared spectrum. The enhancement of the transmittance near the 1?m wavelength was also analyzed. It was found that a SiO2 coating stimulates the local surface-plasmon resonance.
引文
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[2]WESSEL J.Surface-enhanced optical microscopy[J].J.Opt Soc Am B,1985,2(9):1538-41.
[3]MALTZAHN G V,PARK J-H,AGRAWAL A,et al.Computationally Guided Photothermal Tumor Therapy Using Long-Circulating Gold Nanorod Antennas[J].Cancer Research,2009,69(9):3892-900.
[4]李欣远,纪穆为,王虹智,等.近红外光热转换纳米晶研究进展[J].中国光学,2017,10(5):541-554.LI Xinyuan,JI Muwei,WANG Hongzhi,et al.Research progress of near-infrared photothermal conversion nanocrystals[J].Chinese Optics,2017,10(5):541-554.
[5]CATCHPOLE K R,POLMAN A.Plasmonic solar cells[J].Optics Express,2008,16(26):21793.
[6]LIU N,TANG M L,HENTSCHEL M,et al.Nanoantenna-enhanced gas sensing in a single tailored nanofocus[J].Nature Materials,2011,10(8):631-6.
[7]朱业传,苑伟政,虞益挺.表面等离子体平面金属透镜及其应用[J].中国光学,2017,10(2):149-163.ZHU Yechuan,YUAN Weizheng,YU Yiting.Planar plasmonic lenses and their applications[J].Chinese Optics,2017,10(2):149-163.
[8]MURDOCH M,WATERHOUSE G I,NADEEM M A,et al.The effect of gold loading and particle size on photocatalytic hydrogen production from ethanol over Au/TiO2 nanoparticles[J].Nature Chemistry,2011,3(6):489.
[9]WU W,Bonakdar A,Mohseni H.Plasmonic enhanced quantum well infrared photodetector with high detectivity[J].Applied Physics Letters,2010,96(16):667.
[10]康冰心,李华高,王岭雪,等.利用表面等离子体波提高铂硅红外探测器量子效率[J].红外与毫米波学报,2016,35(5):550-6.KANG Bingxin,LI Huagao,WANG Lingxue,et al.Quantum efficiency enhancement for PtSi infrared detector by surface plasma waves[J].JInfrared MillimWaves,2016,35(5):550-6.
[11]PALIK E D.Handbook of Optical Constants of Solids[M].Satl lake city:Academic Press,1985.
[12]YAO P,LI T,LI X,et al.An optical nano-antenna structure of metallic ball array for enhancement of near-infrared photodetection[C]//Proc.SPIE 10462,AOPC 2017:Optical Sensing and Imaging Technology and Applications,2017.
[13]Bohren C F,Huffman D R.Absorption and Scattering of Light by Small Particles[M].New York:Wiley-Vch,2008.