摘要
根据W波段行波管的设计要求,考虑加工设备的固有精度,编写测量程序,实现了折叠波导多周期微结构的自动精密测量。实际应用时,利用视频影像测量显微镜、工具显微镜、激光共聚焦显微镜和高度计完成了W波段行波管折叠波导慢波结构关键几何尺寸的全自动和半自动测量,分析了测量误差的来源,提出了最大限度减小误差的方法,各个尺寸的测量精度全部控制在1.5μm以内,测量时间从原来的3 h缩短到了1 h以内,显著提高了工作效率,为折叠波导行波管的批量生产节约了时间和人力成本。
Herein,we reported the novel technique for full-and semi-automatic measurement of the microstructures of multi-period folded waveguide(FWG) of traveling wave tube(TWT).The dimensions of the microstructure of W-band FWG slow wave structure,including,but not limited to the period length,groove's depth/width/steepness,straight-edge length,e-beam channel radius,surface roughness of serpentine-groove bottom and assembly hole size,were precisely measured with video measuring microscope,tool microscope,laser confocal microscope and altimeter;and the measured results were processed with self-developed data-analysis programs.Moreover,the measurement errors were analyzed.The test results show that the measurement accuracy(time) can be controlled to within 1.5 μm(60 min).We suggest that the new time-saving,high-efficiency measurement method be of some technological interest in production of FWG-TWT.
引文
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