折叠波导几何尺寸自动测量方法及误差分析
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摘要
根据W波段行波管的设计要求,考虑加工设备的固有精度,编写测量程序,实现了折叠波导多周期微结构的自动精密测量。实际应用时,利用视频影像测量显微镜、工具显微镜、激光共聚焦显微镜和高度计完成了W波段行波管折叠波导慢波结构关键几何尺寸的全自动和半自动测量,分析了测量误差的来源,提出了最大限度减小误差的方法,各个尺寸的测量精度全部控制在1.5μm以内,测量时间从原来的3 h缩短到了1 h以内,显著提高了工作效率,为折叠波导行波管的批量生产节约了时间和人力成本。
Herein,we reported the novel technique for full-and semi-automatic measurement of the microstructures of multi-period folded waveguide(FWG) of traveling wave tube(TWT).The dimensions of the microstructure of W-band FWG slow wave structure,including,but not limited to the period length,groove's depth/width/steepness,straight-edge length,e-beam channel radius,surface roughness of serpentine-groove bottom and assembly hole size,were precisely measured with video measuring microscope,tool microscope,laser confocal microscope and altimeter;and the measured results were processed with self-developed data-analysis programs.Moreover,the measurement errors were analyzed.The test results show that the measurement accuracy(time) can be controlled to within 1.5 μm(60 min).We suggest that the new time-saving,high-efficiency measurement method be of some technological interest in production of FWG-TWT.
Herein,we reported the novel technique for full-and semi-automatic measurement of the microstructures of multi-period folded waveguide(FWG) of traveling wave tube(TWT).The dimensions of the microstructure of W-band FWG slow wave structure,including,but not limited to the period length,groove's depth/width/steepness,straight-edge length,e-beam channel radius,surface roughness of serpentine-groove bottom and assembly hole size,were precisely measured with video measuring microscope,tool microscope,laser confocal microscope and altimeter;and the measured results were processed with self-developed data-analysis programs.Moreover,the measurement errors were analyzed.The test results show that the measurement accuracy(time) can be controlled to within 1.5 μm(60 min).We suggest that the new time-saving,high-efficiency measurement method be of some technological interest in production of FWG-TWT.
引文
[1] 颜胜美,苏伟,王亚军.140GHz多注折叠波导结构的特性与微铣削工艺研究[J].真空科学与技术学报,2016,36(7):830-836
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[11] LAWRENCE IVES,CAROL KORY,MIKE ROAD,et al.MEMS-Based TWT Development[C].IVEC 2003,Korea:Seoul,2003:64-65
[12] 徐晓峰.测量MEMS中几何量的方法的探讨[J].计量与测试技术,2016,43(5):20-21
[13] 李军.万能工具显微镜与影像测量仪的选择[J].中国计量,2014,(9):113
[14] 钟文斌.平面及斜面拐角高速铣削的力与粗糙度研究[D].广州:广东工业大学,2014
[15] 谢数冰.影像测量仪尺寸测量示值误差的不确定度分析[J].工业计量,2012,22(1):39-40
[16] 潘攀,李含雁,唐烨.340GHz行波管设计与实验研究[C].第二十届电真空会议,2016
[17] 吴亚琴,王玉春,梁田,等.扩散焊技术在W波段行波管折叠波导制备中的应用[J].真空电子技术,2017,(05):80-83
[18] 蔡军,冯进军,胡银富,等.W波段折叠波导行波管震荡抑制[J].强激光与粒子束,2013,25(5):1195-1199
[2] 马天军,孙建海,陈振海,等.折叠波导高频结构UV-LIGA技术研究[J].真空科学与技术学报,2015,35(11):1356-1361
[3] 胡银富,冯进军,潘攀,等.220GHz行波管设计与工艺实验研究[J].空间电子技术,2013(4):36-39
[4] 李含雁,冯进军,白国栋.DRIE技术加工W波段行波管折叠波导慢波结构的研究[J].中国电子科学研究院学报,2011,6(4):427-431
[5] 徐翔,胡林林,阎磊,等.0.22THz折叠波导行波管部件设计与加工[J].强激光与粒子束,2012,24(9):2135-2140
[6] 陈同江,冯进军,蔡军.短毫米波折叠波导慢波结构精密加工技术[J].真空电子技术,2009,(01):64-66
[7] 王亚军,徐翔,颜胜美,等.微加工工艺误差对THz折叠波导行波管性能的影响[J].太赫兹科学与电子信息学报,2015,13(2):179-183
[8] 冯进军,胡银富,蔡军,等.W波段行波管发展评述[J].真空电子技术,2010,(02):27-32
[9] SOJK,SHIN Y M,JANG K H,el at.Experimental Investigation of Micro-fabricated Folded Waveguide Backward Wave Oscillator for Sub Millimeter Application[C].IRMMW-THz 2006,China:Shanghai,2006:315
[10] CHAN-WOOK BAIK,YOUNG-MOK SON,SUN IL KIM,et al.Microfabricated Coupled-Cavity Backward-Wave Os-cillator for Terahertz Imaging[C].IVEC 2008,IEEE International,CA:Monterey,2008:398-399
[11] LAWRENCE IVES,CAROL KORY,MIKE ROAD,et al.MEMS-Based TWT Development[C].IVEC 2003,Korea:Seoul,2003:64-65
[12] 徐晓峰.测量MEMS中几何量的方法的探讨[J].计量与测试技术,2016,43(5):20-21
[13] 李军.万能工具显微镜与影像测量仪的选择[J].中国计量,2014,(9):113
[14] 钟文斌.平面及斜面拐角高速铣削的力与粗糙度研究[D].广州:广东工业大学,2014
[15] 谢数冰.影像测量仪尺寸测量示值误差的不确定度分析[J].工业计量,2012,22(1):39-40
[16] 潘攀,李含雁,唐烨.340GHz行波管设计与实验研究[C].第二十届电真空会议,2016
[17] 吴亚琴,王玉春,梁田,等.扩散焊技术在W波段行波管折叠波导制备中的应用[J].真空电子技术,2017,(05):80-83
[18] 蔡军,冯进军,胡银富,等.W波段折叠波导行波管震荡抑制[J].强激光与粒子束,2013,25(5):1195-1199