基于映射图像匹配的子孔径拼接技术
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摘要
为实现微球形貌检测中子孔径数据的快速、准确拼接,给出基于点衍射干涉原理的微球形貌检测模型,分析了干涉场横向分辨率的分布规律,提出基于映射图像匹配的子孔径拼接方法。通过形貌数据的等尺度变换,实现横向分辨率均匀化,并将三维点云数据进行降维处理,映射生成二维图像,从而将形貌数据的旋转关系转化为图像坐标的平移关系,再通过图像匹配算法对特征点进行匹配,得出子孔径坐标系间的对应关系,从而实现拼接。最后通过仿真实验验证了该方法的可行性和有效性。
In order to stitch the sub-aperture data rapidly and precisely in microsphere profile inspection,the model of microsphere surface measurement was given, which was based on point diffraction interference. After analyzing the distribution of interference field lateral resolution in detail, a method of sub-aperture stitching based on mapping image matching was proposed. After equal-scale transformation of profile data, the homogenization of lateral resolution was achieved. The dimension of 3D point clouds data was reduced to a mapped 2D image for transforming the sub-aperture rotation-ship of the profile data to a translation relation on the CCD coordinate system. And the corresponding transformation offset between sub-apertures could be obtained by the feature points matching in ways of image matching algorithm, so the sub-aperture stitching could be realized. Finally, the feasibility and effectiveness of the proposed mapping image matching method for sub-aperture stitching was proved by the simulation experiment.
In order to stitch the sub-aperture data rapidly and precisely in microsphere profile inspection,the model of microsphere surface measurement was given, which was based on point diffraction interference. After analyzing the distribution of interference field lateral resolution in detail, a method of sub-aperture stitching based on mapping image matching was proposed. After equal-scale transformation of profile data, the homogenization of lateral resolution was achieved. The dimension of 3D point clouds data was reduced to a mapped 2D image for transforming the sub-aperture rotation-ship of the profile data to a translation relation on the CCD coordinate system. And the corresponding transformation offset between sub-apertures could be obtained by the feature points matching in ways of image matching algorithm, so the sub-aperture stitching could be realized. Finally, the feasibility and effectiveness of the proposed mapping image matching method for sub-aperture stitching was proved by the simulation experiment.
引文
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[3]Wang Ning,Jia Xin,Xing Tingwen.Test of shallow asphere using sub-aperture stitching method[J].Infrared and Laser Engineering,2013,42(9):2525-2530.(in Chinese)王宁,贾辛,刑廷文.子孔径拼接检测浅度非球面[J].红外与激光工程,2013,42(9):2525-2530.
[4]Deng Wantao,Wang Kaiwei,Bai Jian,et al.Elimination of reference surface error on high-accuracy subaperture stitching[J].Infrared and Laser Engineering,2014,43(4):1194-1199.(in Chinese)邓万涛,汪凯巍,白剑,等.高精度子孔径拼接中参考面误差的去除方法[J].红外与激光工程,2014,43(4):1194-1199.
[5]Zhang Yu,Jin Chunshui,Ma Dongmei,et al.Key technology for fiber phase-shifting point diffraction interferometer[J].Infrared and Laser Engineering,2015,44(1):254-259.(in Chinese)张宇,金春水,马冬梅,等.光纤相移点衍射干涉仪关键技术[J].红外与激光工程,2015,44(1):254-259.
[6]Fu Qiang,Shen Feng,Rao Changhui.Distributed stochastic parallel gradient descent based on point diffraction interferometer[J].Infrared and Laser Engineering,2011,40(12):2451-2457.(in Chinese)付强,沈峰,饶长辉.基于点衍射干涉仪的分布式随机并行梯度下降算法[J].红外与激光工程,2011,40(12):2451-2457.
[7]Wu Mengqi,Li Zhongwei,Zhong Kai,et al.Adaptive point cloud registration method based on geometric features and photometric features[J].Acta Optica Sinica,2015,35(2):0215002.(in Chinese)伍梦琦,李中伟,钟凯,等.基于几何特征和图像特征的点云自适应拼接方法[J].光学学报,2015,35(02):0215002.
[8]Zhang Qiang,Hao Kai,Li Haibin.Research on scale invariant feature transform feature matching based on underwater curve constraint[J].Acta Optica Sinica,2014,34(2):2015003.(in Chinese)张强,郝凯,李海滨.水下环境中基于曲线约束的SIFT特征匹配算法研究[J].光学学报,2014,34(2):2015003.
[9]Chen Kai,Zhang Da,Zhang Yuansheng.Point cloud data processing method of cavity 3D laser scanner[J].Acta Optica Sinica,2013,33(8):0812003.(in Chinese)陈凯,张达,张元生.采空区三维激光扫描点云数据处理方法[J].光学学报,2013,33(8):0812003.
[10]Lei Yuzhen,Li Zhongwei,Zhong Kai,et al.Mismatching marked points correction method based on random sample consensus algorithm[J].Acta Optica Sinica,2013,33(3):0315002.(in Chinese)雷玉珍,李中伟,钟凯,等.基于随机抽样一致算法的误匹配标志点校正方法[J].光学学报,2013,33(3):0315002.