结合激光准直的二维转角动态测量系统
|
摘要
为了克服现有二维转角动态测量方法结构复杂、成本昂贵的缺点,提出了结合激光准直的二维转角动态测量方法。首先,根据二维转角测量的关键问题提出基于激光准直的测量方法,采用准直激光作为测量基准,以远端的位置探测器作为检测器件。接着,设计测量系统和各组成模块,根据测量要求对系统中的关键模块进行设计和优化。然后,具体设计系统中的测量算法,完成测量模型建立。最后,在±2°范围内进行实验测试和分析。实验结果表明:系统可动态测量,稳定性好,测量重复性误差为1μrad,X轴非线性误差为1.8%,Y轴非线性误差为1.7%,动态带载响应频率在±0.01°内优于200Hz,基本满足二维转角测量的高精度、高重复性、高稳定性的要求。
To dynamically measure a two-dimensional rotation angle and overcome the shortcomings of a complicated structure and high costs,a method based on laser collimation was proposed and a measurement system was established.First,a method was proposed based on the key measurement requirements.A collimated laser was used as a measurement datum and a remote position detector as a detection device.Second,a measurement system was developed,each module was designed,and the main modules were optimized.Third,the model was established completely after an algorithm was produced.Finally,tests were performed and the obtained data were analyzed within±2°.The experimental results show that the stability of the system is positive,the measurement repeatability error is 1μrad,the X-and Y-axis nonlinearity errors are 1.8%and 1.7%,respectively,and the dynamic band response frequency is better than 200 Hz within±0.01°.The study confirms that the system basically offers high precision,high repeatability,high stability,and a dynamic measurement of a two-dimensional rotation angle.
To dynamically measure a two-dimensional rotation angle and overcome the shortcomings of a complicated structure and high costs,a method based on laser collimation was proposed and a measurement system was established.First,a method was proposed based on the key measurement requirements.A collimated laser was used as a measurement datum and a remote position detector as a detection device.Second,a measurement system was developed,each module was designed,and the main modules were optimized.Third,the model was established completely after an algorithm was produced.Finally,tests were performed and the obtained data were analyzed within±2°.The experimental results show that the stability of the system is positive,the measurement repeatability error is 1μrad,the X-and Y-axis nonlinearity errors are 1.8%and 1.7%,respectively,and the dynamic band response frequency is better than 200 Hz within±0.01°.The study confirms that the system basically offers high precision,high repeatability,high stability,and a dynamic measurement of a two-dimensional rotation angle.
引文
[1]何杨锋.高精度双轴角度测量仪的研究与设计[D].马鞍山:安徽工业大学,2016.HE Y F.High-precision biaxial angle measuring instrument research and design[D].Maanshan:Anhui University of Technology,2016.(in Chinese)
[2]陶卫,浦昭邦,孙运斌.角度测量技术的发展[J].激光杂志,2002(2):5-7.TAO W,PU ZH B,SUN Y B.Development of angle measurement technology[J].Journal of Laser,2002(2):5-7.(in Chinese)
[3]周红锋,宫爱玲.小角度测量的光学方法[J].云南民族大学学报:自然科学版,2006,15(2):130-133.ZHOU H F,GONG A L.Optical methods of small angle measurement[J].Journal of Yunnan University for Nationalities:Natural Science,2006,15(2):130-133.(in Chinese)
[4]李金阳,吴简彤,韩慧群.小角度测量的光学方法及应用[J].应用科技,2006,33(7):15-18.LI J Y,WU J T,HAN H Q.Optical method and application of small angle measurement[J].Applied Science and Technology,2006,33(7):15-18.(in Chinese)
[5]王明,高志慧.圆光栅结构参数误差分析[J].机械制造与自动化,2017,46(2):9-12,40.WANG M,GAO ZH H.Error analysis of structural parameters of circular grating[J].Machinery Manufacturing and Automation,2017,46(2):9-12,40.(in Chinese)
[6]耿旭.基于内反射原理测量小角度变化量的技术研究[D].南京:南京理工大学,2015.GENG X.Based on the Principle of Internal Reflection Measurement of Small-angle Changes in the Technical Research[D].Nanjing:Nanjing University of Science and Technology,2015.(in Chinese)
[7]邵建桥,蒋铭,徐毅,等.利用光学分度头标定转角测量装置的方法探讨[J].工业计量,2016(s1):72.SHAO J Q,JIANG M,XU Y,et al..Discussion on the method of calibrating the rotation angle measuring device by using optical indexing head[J].Industrial Measurement,2016(S1):72.(in Chinese)
[8]王贵甫,陈桂林,陈雨良.激光干涉仪数字测角的新方法及其应用[J].光学精密工程,2001,9(1):85-88.WANG G P,CHEN G L,CHEN Y L.Laser interferometry digital angle measurement method and its application[J].Opt.Precision Eng.,2001,9(1):85-88.(in Chinese)
[9]田留德,赵建科,王涛,等.测试设备位姿失调对自准直仪法测量圆分度误差的影响[J].光学精密工程,2017,25(9):2267-2276.TIAN L D,ZHAO J K,WANG T,et al..Influence of attitude and attitude mismatch of test equipment on circle indexing errors measured by self-collimator[J].Opt.Precision Eng.,2017,25(9):2267-2276.(in Chinese)
[10]SUZUKI T,GREIVENKAMP J E,SASAKI O.Wide-range two-dimensional small rotation-angle measurement by use of fringe projection[J].SPIE,2005,5633:580662.
[11]SUZUKI T,ENDO T,SASAKI O,et al..Twodimensional small-rotation-angle measurement using an imaging method[J].Optical Engineering,2015,45(4):7-13.
[12]SASAKI,OSAMI.Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer[J].Optical Engineering,2003,42(4):1132-1136.
[13]陈士亮,李海榕.激光准直仪及其在工业上的应用[J].南昌大学学报:工科版,1980(2):25-32.CHEN SH L,LI H R.Laser collimator and its application in industry[J].Journal of Nanchang University:Engineering and Technology,1980(2):25-32.(in Chinese)
[2]陶卫,浦昭邦,孙运斌.角度测量技术的发展[J].激光杂志,2002(2):5-7.TAO W,PU ZH B,SUN Y B.Development of angle measurement technology[J].Journal of Laser,2002(2):5-7.(in Chinese)
[3]周红锋,宫爱玲.小角度测量的光学方法[J].云南民族大学学报:自然科学版,2006,15(2):130-133.ZHOU H F,GONG A L.Optical methods of small angle measurement[J].Journal of Yunnan University for Nationalities:Natural Science,2006,15(2):130-133.(in Chinese)
[4]李金阳,吴简彤,韩慧群.小角度测量的光学方法及应用[J].应用科技,2006,33(7):15-18.LI J Y,WU J T,HAN H Q.Optical method and application of small angle measurement[J].Applied Science and Technology,2006,33(7):15-18.(in Chinese)
[5]王明,高志慧.圆光栅结构参数误差分析[J].机械制造与自动化,2017,46(2):9-12,40.WANG M,GAO ZH H.Error analysis of structural parameters of circular grating[J].Machinery Manufacturing and Automation,2017,46(2):9-12,40.(in Chinese)
[6]耿旭.基于内反射原理测量小角度变化量的技术研究[D].南京:南京理工大学,2015.GENG X.Based on the Principle of Internal Reflection Measurement of Small-angle Changes in the Technical Research[D].Nanjing:Nanjing University of Science and Technology,2015.(in Chinese)
[7]邵建桥,蒋铭,徐毅,等.利用光学分度头标定转角测量装置的方法探讨[J].工业计量,2016(s1):72.SHAO J Q,JIANG M,XU Y,et al..Discussion on the method of calibrating the rotation angle measuring device by using optical indexing head[J].Industrial Measurement,2016(S1):72.(in Chinese)
[8]王贵甫,陈桂林,陈雨良.激光干涉仪数字测角的新方法及其应用[J].光学精密工程,2001,9(1):85-88.WANG G P,CHEN G L,CHEN Y L.Laser interferometry digital angle measurement method and its application[J].Opt.Precision Eng.,2001,9(1):85-88.(in Chinese)
[9]田留德,赵建科,王涛,等.测试设备位姿失调对自准直仪法测量圆分度误差的影响[J].光学精密工程,2017,25(9):2267-2276.TIAN L D,ZHAO J K,WANG T,et al..Influence of attitude and attitude mismatch of test equipment on circle indexing errors measured by self-collimator[J].Opt.Precision Eng.,2017,25(9):2267-2276.(in Chinese)
[10]SUZUKI T,GREIVENKAMP J E,SASAKI O.Wide-range two-dimensional small rotation-angle measurement by use of fringe projection[J].SPIE,2005,5633:580662.
[11]SUZUKI T,ENDO T,SASAKI O,et al..Twodimensional small-rotation-angle measurement using an imaging method[J].Optical Engineering,2015,45(4):7-13.
[12]SASAKI,OSAMI.Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer[J].Optical Engineering,2003,42(4):1132-1136.
[13]陈士亮,李海榕.激光准直仪及其在工业上的应用[J].南昌大学学报:工科版,1980(2):25-32.CHEN SH L,LI H R.Laser collimator and its application in industry[J].Journal of Nanchang University:Engineering and Technology,1980(2):25-32.(in Chinese)