一种GOA产品静电失效的研究及改善
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摘要
在TFT-LCD(Thin film transistor-liquid crystal display)行业中,进行摩擦工艺制程时,玻璃基板与机台接触、分离;摩擦辊与玻璃基板摩擦、摩擦机台顶针上升过程,都容易产生静电击穿。针对一款在摩擦工艺过程中产生静电的GOA(Gate driver on Array)产品,结合摩擦工艺参数、生产环境,进行了一系列静电相关验证。验证发现:摩擦工艺中摩擦布寿命、环境湿度对静电发生影响很大。摩擦布寿命越靠后,静电越容易发生;湿度越大,静电越不容易发生。摩擦机台顶针上升速度、摩擦布类型也对静电发生有一定影响,顶针缓慢上升,静电不容易发生;摩擦棉布较尼龙布静电效果相对较好。而针对摩擦工艺发生的静电失效不良,光配向替代是一种根本的解决方法,导入光配向工艺后,摩擦相关静电失效不良由量产6.8%下降为0%。
In TFT-LCD industry,in the rubbing process,the contact and separation between glass and the stage,the friction process between the roller and glass,as well as the process of the rise of stage Pin,are all easy to produce ESD(Electro-static Discharge).For a GOA(Gate driver on Array)product which was Failed because of ESD in the RUB process,a series of ESD-related verifications were conducted in combination with rubbing process parameters and production environment.The verification found that the life of the RUB cloth and the humidity of the environment in the rubbing process have a great influence on the ESD.It is more likely that ESD will happen when the life of the rub cloth is lower.The higher the humidity,the less likely ESD is to occur.The rising speed of table Pin and the type of rubbing cloth also have a certain influence on the occurrence of ESD,The pin rises slowly and the ESD does not easily occur;Cotton is less prone to occurrence of ESD than nylon.For ESD in the rubbing process,optical alignment substitution is a fundamental solution.After the introduction of the optical alignment process,the rubbing-related ESD decreased from 6.8%to 0%.
In TFT-LCD industry,in the rubbing process,the contact and separation between glass and the stage,the friction process between the roller and glass,as well as the process of the rise of stage Pin,are all easy to produce ESD(Electro-static Discharge).For a GOA(Gate driver on Array)product which was Failed because of ESD in the RUB process,a series of ESD-related verifications were conducted in combination with rubbing process parameters and production environment.The verification found that the life of the RUB cloth and the humidity of the environment in the rubbing process have a great influence on the ESD.It is more likely that ESD will happen when the life of the rub cloth is lower.The higher the humidity,the less likely ESD is to occur.The rising speed of table Pin and the type of rubbing cloth also have a certain influence on the occurrence of ESD,The pin rises slowly and the ESD does not easily occur;Cotton is less prone to occurrence of ESD than nylon.For ESD in the rubbing process,optical alignment substitution is a fundamental solution.After the introduction of the optical alignment process,the rubbing-related ESD decreased from 6.8%to 0%.
引文
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[2]刘士奎,王超,杨雪,等.液晶显示领域之GOA技术专利分析[J].中国发明与专利,2013(6):21-28.LIU S K,WANG C,YANG X,et al.Analysis of GOA technology patents in the field of liquid crystal display[J].China Invention&Patent,2013(6):21-28.(in Chinese)
[3]刘同海,梁晓桐,高章飞,等.双侧GOA驱动TFT-LCD的常见线不良研究[J].电子世界,2018(5):186-188.LIU T H,LIANG X T,GAO Z F,et al.Study on common line defects of GOA driving TFT-LCD on both sides[J].Electronics World,2018(5):186-188.(in Chinese)
[4]李卿硕,吴倩,王莎.液晶模组ESD失效分析及防护研究[J].液晶与显示,2013,28(5):711-715.LI Q S,WU Q,WANG S.TFT-LCD module ESD failure analysis and protection research[J].Chinese Journal of Liquid Crystals and Displays,2013,28(5):711-715.(in Chinese)
[5]曾杰.集成电路新型ESD防护器件研究[D].杭州:浙江大学,2016.ZENG J.Research of novel ESD protection devices for integrated circuits[D].Hangzhou:Zhejiang University,2016.(in Chinese)
[6]李欣欣,龙春平,王威.TFT-LCD工艺与静电击穿[J].现代显示,2007(3):59-63,42.LI XX,LONG C P,WANG W.TFT-LCD process and ESD[J].Advanced Display,2007(3):59-63,42.(in Chinese)
[7]王丽娟,王百金.TFT制作中静电击穿的研究[J].长春理工大学学报,2004,27(1):74-76.WANG L J,WANG B J.The research of electrostatic breakdown in the production of TFT[J].Journal of Changchun University of Science and Technology,2004,27(1):74-76.(in Chinese)
[8]周刘飞,王杰,王鸣昕.光配向技术在液晶电视面板中的应用[J].液晶与显示,2016,31(1):87-92.ZHOU L F,WANG J,WANG M X.UV2Atechnology for LCD-TV panel[J].Chinese Journal of Liquid Crystals and Displays,2016,31(1):87-92.(in Chinese)
[9]罗斌.液晶光配向的研究进展[J].山东工业技术,2016(2):29.LUO B.Research progress of liquid crystal optical alignment[J].Shandong Industrial Technology,2016(2):29.(in Chinese)
[10]周学芹,杨丽,刘政明,等.光配向PI固烤时间与曝光能量对LCD光学及残影的影响[J].液晶与显示,2017,32(8):596-600.ZHOU X Q,YANG L,LIU Z M,et al.Effects of PI post-bake time and UV dosage on LCD optical performance and image sticking by photo-alignment[J].Chinese Journal of Liquid Crystals and Displays,2017,32(8):596-600.(in Chinese)