质子交换X切LiNbO_3光波导的光学特性及其电光调制研究
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摘要
为了研究质子交换条件对光波导特性的影响,利用棱镜耦合m线法和IWKB(Inverse Wentzel-KramersBrillouin)法,研究了质子交换温度、交换时间和退火累积时间对光波导光学特性的影响。实验结果表明,在相同交换温度条件下,交换时间越长,波导表面折射率增量越大,波导深度越深;在相同交换时间条件下,温度越高,波导表面折射率增量越大,波导深度越深,温度对光波导的光学特性起重要作用。退火前波导折射率分布为阶跃型分布,退火后波导折射率为渐变型分布。在苯甲酸中掺入1%的苯甲酸锂、交换温度为230℃以及交换时间为45 min条件下可获得单模平面光波导。制作了X切Y传LiNbO_3单模条形光波导,并对单模条形光波导的电光调制进行了研究。结果表明,在半波电压范围内,随着调制电压的增加,光波导透射光相位增加,光波导透射光强随调制电压增加而减少。
In order to study the effect of proton exchange conditions on optical waveguide properties,the optical properties of proton exchanged optical waveguide and annealed optical waveguide were studied by prism coupling m lines and IWKB( Inverse Wentzel-Kramers-brillouin) method. The results show that the longer the exchange time,the greater of the surface refractive index increment and the deeper of the waveguide depth under the same exchange temperature,and the higher the exchange temperature,the greater of the surface refractive index increment and the deeper of the waveguide depth under the same exchange time,and the temperature plays an important role.Refractive index profile of the proton exchanged optical waveguide is from step type to gradual distribution after annealed. A single mode planar optical waveguide was obtained by 1% of lithium benzoate in benzoic acid for exchanging 45 minutes under temperature 230 ℃. The strip X-cut Ypropagation LiNbO_3 waveguide was fabricated and electro-optic modulation was studied,and the results show that with the increasing of modulation voltage below half wave voltage,the optical phase increase,but the transmission intensity decreases.
In order to study the effect of proton exchange conditions on optical waveguide properties,the optical properties of proton exchanged optical waveguide and annealed optical waveguide were studied by prism coupling m lines and IWKB( Inverse Wentzel-Kramers-brillouin) method. The results show that the longer the exchange time,the greater of the surface refractive index increment and the deeper of the waveguide depth under the same exchange temperature,and the higher the exchange temperature,the greater of the surface refractive index increment and the deeper of the waveguide depth under the same exchange time,and the temperature plays an important role.Refractive index profile of the proton exchanged optical waveguide is from step type to gradual distribution after annealed. A single mode planar optical waveguide was obtained by 1% of lithium benzoate in benzoic acid for exchanging 45 minutes under temperature 230 ℃. The strip X-cut Ypropagation LiNbO_3 waveguide was fabricated and electro-optic modulation was studied,and the results show that with the increasing of modulation voltage below half wave voltage,the optical phase increase,but the transmission intensity decreases.
引文
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[2]CHEN K,SUN B,CHEN F,et al.Lithium niobate photonic sensor for measurement of pulsed electric field with nanosecond risetime[J].Microwave and Optical Technology Letters,2011,54(2):421-423.
[3]SOHAM S,SIEW S Y,DENG Jun,et al.Fabrication and characterization of optical devices on Lithium Niobate on insulator chips[J].Procedia Engineering,2016,140:183-186.
[4]张德龙,丁桂兰,崔宇明,等.质子交换Li Nb O3光波导[J].物理学进展,2001,21(1):45-65.
[5]JACKEL J J,RICE C E,VESELKA J J.Proton exchange for high index waveguides in Li Nb O3[J].Applied Physics Letters,1982,41(7):607-609.
[6]FU Yun-liang,WU Ying-cai,YUAN Yi-fang,et al.Raman spectra of proton-exchanged Li Nb O3optical waveguide[J].China Physics Letters,2004,21(7):1292-1293.
[7]ZHANG Zhi-yong.A study on proton-exchanged and heat-treated Li Nb O3crystals by means of Raman and infrared spectrum[J].Physica B:Condensed Matter,2007,388(1-2):390-392.
[8]符运良,何猛雄,袁一方.质子交换Li Nb O3光波导的特性研究[J].光谱学与光谱分析,2006,26(12):2346-2349.
[9]CARGO J T,FILO A T,HUGHES M C,et al.Characterization of sucfuric acid proton-exchange niobate[J].Journal of Applied Physics,1990,67(2):627-633.
[10]GOTO N,YIP G L.Characterization of proton exchange and annealed Li Nb O3waveguide with pyrophosphoric acid[J].Applied Optics,1989,28(1)60-65.
[11]LONI A,KEYS R W,DELARUE R M,et al.Optical characterization of Z-cut proton-exchanged Li Nb O3waveguides fabricated using orthophosphoric and pyrophosphoric[J].IEEE proceedings,1989,136(6):297-300.
[12]陈硕,刘占元,刘鹏飞,等.硬脂酸质子交换X切Li Nb O3光波导的制备技术研究[J].半导体光电,2014,35(1):65-68.
[13]汪昌君,陈抱雪,方绵辉,等.硬脂酸高温质子交换α相铌酸锂光波导的制备技术研究[J].光学仪器,2015,37(5):436-438.
[14]陈硕,刘占元,牛晓晨,等.铌酸锂低半波导电压电光调制器研究[J].半导体光电,2017,38(3):342-344.
[15]劳世达,万玲玉,周煜,等.任意传播方向下铌酸锂晶体的横向电光效应研究[J].光学学报,2010,30(10):2972-2977.
[16]WEI Jue,XU Xiao-feng,GENG He-ping,et al.Measurement of refractive index profiles for planar waveguides[J].Acta Photonica Sinica,2005,34(4):534-536.
[17]CHIANG K.Construction of refractive index profiles of planar dielectric waveguides from the distribution of effective indices[J].Journal of Lightwave Technology,1985,LT-3(2):385-391.
[18]HEISMANN F,BUHL L L,ALFEENESS R C.Electrooptically tunable narrowband Ti:Li Nb O3wavelength filter[J].Electronics Letters,1987,23:572-574.
[19]PASSARO V M N,AMENISE M N,NESHEVA,et al.Li Nb O3optical waveguides formed in a new proton source[J].Journal of Lightwave Technology,2002,20(1):71-77.