硬脂酸高温质子交换α相铌酸锂光波导的制备技术研究
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摘要
采用稀释硬脂酸和高温质子交换技术,研究了单偏振α相铌酸锂光波导的制备工艺。开发了一种高温密闭装置,通过提高蒸汽压的方法实现了350℃质子交换。波导折射率分布测试采用了棱镜薄膜耦合m线技术结合统计迭代法拟合的方法,晶相分析采用了红外吸收光谱技术。实验结果表明,掺入1.1%硬脂酸锂质量比例的硬脂酸作为缓冲质子源,经350℃/6h高温质子交换,可以形成α相铌酸锂光波导,稀释度为1.3%时,同样的温度/时间条件下,可以获得632.8nm单模α相铌酸锂光波导。
The preparation process of single polarizationα-phase LiNbO3 optical waveguide is studied using dilution of stearic acid and high temperature proton exchange technology.A high temperature sealing device is developed.A method by increasing vapor pressure to achieve the350 ℃ proton exchange is proposed.Waveguide refractive index distribution is tested by using prism film coupling m-line technology and the statistical iterative method fitting.Crystal phase is analyzed by testing infrared absorption spectrum technique.The experimental results show thatα-phase LiNbO3 optical waveguide can be produced under the conditions of the stearic acid doped with 1.1%lithium stearate mass proportion as buffer proton source and 350℃/6hhigh temperature proton exchange.Single modeα-phase LiNbO3 optical waveguide at 632.8nm wavelength can be produced under the conditions of the same temperature,time and the dilution of 1.3%.
The preparation process of single polarizationα-phase LiNbO3 optical waveguide is studied using dilution of stearic acid and high temperature proton exchange technology.A high temperature sealing device is developed.A method by increasing vapor pressure to achieve the350 ℃ proton exchange is proposed.Waveguide refractive index distribution is tested by using prism film coupling m-line technology and the statistical iterative method fitting.Crystal phase is analyzed by testing infrared absorption spectrum technique.The experimental results show thatα-phase LiNbO3 optical waveguide can be produced under the conditions of the stearic acid doped with 1.1%lithium stearate mass proportion as buffer proton source and 350℃/6hhigh temperature proton exchange.Single modeα-phase LiNbO3 optical waveguide at 632.8nm wavelength can be produced under the conditions of the same temperature,time and the dilution of 1.3%.
引文
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[16]赵守安,潘裕斌,锺宝璇,等.十八酸质子交换铌酸锂光波导的性能及其退火性能的研究[J].中国激光,1996,23(9):806-810.
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[18]符运良,金国良,袁一方,等.质子交换铌酸锂光波导的红外吸收光谱[J].光谱学与光谱分析,2004,24(3):303-304.
[2]夏翔,袁一方,朱琦莹,等.退火质子交换LiNbO3光波导的工艺研究[J].光学仪器,2002,24(2):27-31.
[3]符运良,陈抱雪,傅军,等.X切LiNbO3晶体退火质子交换光波导特性研究[J].海南师范学院学报:自然科学版,2004,17(2):133-136.
[4]BORTZ M L,EYRES L A,FEJER M M.Depth profiling of the d33 nonlinear coefficient in annealed proton exchanged LiNbO3waveguides[J].Applied Physical Letters,1993,62(17):2012.
[5]曹霞,金晓峰,王治国,等.利用缓冲质子源制作LiNbO3波导:光学特性及稳定性研究[J].中国激光,2005,32(1):123-126.
[6]武继江,石邦任,孟庆超.H∶LiNbO3光波导[J].光机电信息,2005(12):20-27.
[7]赵明璐,王定理,马卫东.铌酸锂光波导制作工艺进展[J].光通信研究,2012(2):35-38.
[8]JACKEL J L,RICE C E,VESELKA J J.Proton exchange for high-index waveguides in LiNbO3[J].Applied Physics Letters,1982,41(7):607.
[9]张德龙,丁桂兰,崔宇明,等.质子交换LiNbO3光波导[J].物理学进展,2001,21(1):45-65.
[10]KIRJUSGJI Y N,FEDOROV V A.Dependences of the refractive indices on the proton concentration in H:LiNbO3 waveguides[J].Technical Physics,1999,44(3):307-316.
[11]KORKISHKO Y N,FEDOROV V A,FEOKTISTOVA O Y.LiNbO3 optical waveguide fabrication by high-temperature proton exchange[J].Journal of lightwave technology,2000,18(4):562-568.
[12]KORKISHKO Y N,FDEOROV V A,et al.Characterization ofα-phase soft proton-exchanged LiNbO3optical waveguides[J].Journal of the Optical Society of America A,2001,18(5):1186-1191.
[13]KORKISHKO Y N,FEDOROV V A,KOSTRITSKII S,et al.Integrated optical chip for fiber optical gyroscope fabricated by high temperature proton exchange[C]∥CLEO/Pacific Rim 2003.The 5th Pacific Rim Conference on Lasens and Electro-Optics.Taipei,Taiwan:IEEE,2003.
[14]STULL D R.Vapor pressure of pure substances organic and inorganic compounds[J].Industrial&Engineering Chemistry,1947,39(4):517-540.
[15]陈硕,刘占元,刘鹏飞,等.硬脂酸质子交换X切LiNbO_3光波导的制备技术研究[J].半导体光电,2014,35(1):65-68,148.
[16]赵守安,潘裕斌,锺宝璇,等.十八酸质子交换铌酸锂光波导的性能及其退火性能的研究[J].中国激光,1996,23(9):806-810.
[17]梁东波,唐杰,矶守,等.统计优化迭代法测量质子交换波导折射率分布[J].光学学报,2002,22(6):670-673.
[18]符运良,金国良,袁一方,等.质子交换铌酸锂光波导的红外吸收光谱[J].光谱学与光谱分析,2004,24(3):303-304.