ITO薄膜表面等离子体共振波长的可控调节
|
摘要
采用直流磁控溅射的方式,在浮法玻璃衬底上制备了氧化铟锡(ITO)薄膜。通过改变薄膜沉积时间,制备出不同厚度的ITO薄膜。随着膜厚由16nm逐渐增大到271nm,其结晶程度得到增强,对应的载流子浓度由4.79×1020 cm-3增大到2.41×1021 cm-3,表面等离子体共振(SPR)波长由1802nm逐渐蓝移到1204nm,实现了近红外区域SPR波长较宽范围的可控调节。采用Drude自由电子气模型,对不同厚度ITO薄膜的SPR波长进行了理论计算,进一步证明了SPR波长的有效调节取决于膜厚对载流子浓度的影响作用。
The tin-doped indium oxide(ITO)thin films are fabricated on the float glass substrates by the direct current(DC)magnetron sputtering method.The ITO thin films with different thicknesses are fabricated by changing the deposition time.As the film thickness gradually increases from 16 nm to 271 nm,the crystallinity is enhanced and the corresponding carrier concentration is increased from 4.79×1020 cm-3 to 2.41 ×1021 cm-3.Thus the corresponding surface plasmon resonance(SPR)wavelength blueshifts from 1802 nm to 1204 nm.The controllable modulation of near infrared SPR wavelength within a relatively broad range is realized.The SPR wavelength of the ITO films with different film thicknesses are theoretically calculated by using the Drude free electron gas model,which further confirms that the effective modulation of SPR wavelength is determined by the influence of film thickness on carrier concentration.
The tin-doped indium oxide(ITO)thin films are fabricated on the float glass substrates by the direct current(DC)magnetron sputtering method.The ITO thin films with different thicknesses are fabricated by changing the deposition time.As the film thickness gradually increases from 16 nm to 271 nm,the crystallinity is enhanced and the corresponding carrier concentration is increased from 4.79×1020 cm-3 to 2.41 ×1021 cm-3.Thus the corresponding surface plasmon resonance(SPR)wavelength blueshifts from 1802 nm to 1204 nm.The controllable modulation of near infrared SPR wavelength within a relatively broad range is realized.The SPR wavelength of the ITO films with different film thicknesses are theoretically calculated by using the Drude free electron gas model,which further confirms that the effective modulation of SPR wavelength is determined by the influence of film thickness on carrier concentration.
引文
[1]Lu D,Liu Z.Hyperlenses and metalenses for far-field super-resolution imaging[J].Nature Communications,2012,3(6):1205.
[2]Kaur G,Yadav K L,Mitra A.Localized surface plasmon induced enhancement of electron-hole generation with silver metal island at n-Al…ZnO/pCu2O heterojunction[J].Applied Physics Letters,2015,107(5):053901.
[3]Dou X J,Min C J,Zhang Y Q,et al.Surface plasmon polaritons optical tweezers technology[J].Acta Optica Sinica,2016,36(10):1026004.豆秀婕,闵长俊,张聿全,等.表面等离激元光镊技术[J].光学学报,2016,36(10):1026004.
[4]Hao D,Hu C,Grant J,et al.Hybrid localized surface plasmon resonance and quartz crystal microbalance sensor for label free biosensing[J].Biosensors and Bioelectronics,2018,100:23-27.
[5]Barnes W L,Dereux A,Ebbesen T W.Surface plasmon subwavelength optics[J].Nature,2003,424(6950):824-830.
[6]Guo Q B,Liu X F,Qiu J R.Research progress of ultrafast nonlinear optics and applications of nanostructures with localized plasmon resonance[J].Chinese Journal of Lasers,2017,44(7):0703005.郭强兵,刘小峰,邱建荣.局域表面等离子体纳米结构的超快非线性光学及其应用研究进展[J].中国激光,2017,44(7):0703005.
[7]Li T,Chen J,Zhu S N.Manipulating surface plasmon propagation:From beam modulation to near-field holography[J].Laser&Optoelectronics Progress,2017,54(5):050002.李涛,陈绩,祝世宁.表面等离激元的传播操控:从波束调制到近场全息[J].激光与光电子学进展,2017,54(5):050002.
[8]Kanehara M,Koike H,Yoshinaga T,et al.Indium tin oxide nanoparticles with compositionally tunable surface plasmon resonance frequencies in the near-IRregion[J].Journal of the American Chemical Society,2009,131(49):17736-17737.
[9]Zhang B X,Chen S F,Fu L,et al.Dynamic patterning of microparticles via surface plasmon excitation[J].Chinese Journal of Lasers,2012,39(6):0610001.张兵心,陈淑芬,付雷,等.基于表面等离子体激发的光学操控技术[J].中国激光,2012,39(6):0610001.
[10]Jia R,Lin G,Zhao D,et al.Sandwich-structured Cu2O photodetectors enhanced by localized surface plasmon resonances[J].Applied Surface Science,2015,332:340-345.
[11]Bai Y,Gao C,Yin Y.Fully alloyed Ag/Au nanorods with tunable surface plasmon resonance and high chemical stability[J].Nanoscale,2017,9(39):14875-14880.
[12]You J B,Zhang X W,Dong J J,et al.Localizedsurface-plasmon enhanced the 357 nm forward emission from ZnMgO films capped by Pt nanoparticles[J].Nanoscale Research Letters,2009,4(10):1121-1125.
[13]Wang Y,Wang X,Li L W.Properties of light trapping of thin film solar cell based on surface plasmon polaritons[J].Laser&Optoelectronics Progress,2015,52(9):092401.王玥,王暄,李龙威.基于表面等离激元薄膜太阳能电池陷光特性的研究[J].激光与光电子学进展,2015,52(9):092401.
[14]Gao J.Investigation of siliver nanoparticle films in plasmonics for use as fluorescence enhancement of RH6G molecules[J].Laser&Optoelectronics Progress,2015,52(6):061601.高俊.Ag纳米薄膜的等离激元对RH6G分子的荧光增强研究[J].激光与光电子学进展,2015,52(6):061601.
[15]Karasawa T,Miyata Y.Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by dc reactive sputtering[J].Thin Solid Films,1993,223(1):135-139.
[16]Zeng W Q,Yao J K,He H B,et al.Influence of substrate temperature on the properties of tin-doped indium oxide thin films prepared by direct current magnetron sputtering[J].Chinese Journal of Lasers,2008,35(12):2031-2035.曾维强,姚建可,贺洪波,等.基底温度对直流磁控溅射ITO透明导电薄膜性能的影响[J].中国激光,2008,35(12):2031-2035.
[17]Zhang Y H,Guo W L,Qin Y,et al.Effects of ITOon proprieties of novel AlGaInP red LED[J].Acta Optica Sinica,2010,30(8):2401-2405.张勇辉,郭伟玲,秦园,等.ITO对新型AlGaInP红光LED特性的影响[J].光学学报,2010,30(8):2401-2405.
[18]Boltasseva A,Atwater H A.Low-loss plasmonic metamaterials[J].Science,2011,331(6015):290-291.
[19]Brewer S H,Franzen S.Indium tin oxide plasma frequency dependence on sheet resistance and surface adlayers determined by reflectance FTIR spectroscopy[J].The Journal of Physical Chemistry B,2002,106(50):12986-12992.
[20]Kamakura R,Fujita K,Murai S,et al.Controlling plasmonic properties of epitaxial thin films of indium tin oxide in the near-infrared region[J].Journal of Physics,2015,619(1):012056.
[21]Fang X,Mak C L,Zhang S,et al.Pulsed laser deposited indium tin oxides as alternatives to noble metals in the near-infrared region[J].Journal of Physics:Condensed Matter,2016,28(22):224009.
[22]Tuo Y F,Wu Y P,Huang M,et al.The surface plasmon resonance absorption of indium tin oxide nanoparticles and its control[J].Advanced Materials Research,2015,1118:160-165.
[23]Hao L,Diao X,Xu H,et al.Thickness dependence of structural,electrical and optical properties of indium tin oxide(ITO)films deposited on PETsubstrates[J].Applied Surface Science,2008,254(11):3504-3508.
[24]West P R,Ishii S,Naik G V,et al.Searching for better plasmonic materials[J].Laser&Photonics Reviews,2010,4(6):795-808.
[25]Gao M Z,Job R,Xue D S,et al.Thickness dependence of resistivity and optical reflectance of ITO films[J].Chinese Physics Letters,2008,25(4):1380-1383.
[2]Kaur G,Yadav K L,Mitra A.Localized surface plasmon induced enhancement of electron-hole generation with silver metal island at n-Al…ZnO/pCu2O heterojunction[J].Applied Physics Letters,2015,107(5):053901.
[3]Dou X J,Min C J,Zhang Y Q,et al.Surface plasmon polaritons optical tweezers technology[J].Acta Optica Sinica,2016,36(10):1026004.豆秀婕,闵长俊,张聿全,等.表面等离激元光镊技术[J].光学学报,2016,36(10):1026004.
[4]Hao D,Hu C,Grant J,et al.Hybrid localized surface plasmon resonance and quartz crystal microbalance sensor for label free biosensing[J].Biosensors and Bioelectronics,2018,100:23-27.
[5]Barnes W L,Dereux A,Ebbesen T W.Surface plasmon subwavelength optics[J].Nature,2003,424(6950):824-830.
[6]Guo Q B,Liu X F,Qiu J R.Research progress of ultrafast nonlinear optics and applications of nanostructures with localized plasmon resonance[J].Chinese Journal of Lasers,2017,44(7):0703005.郭强兵,刘小峰,邱建荣.局域表面等离子体纳米结构的超快非线性光学及其应用研究进展[J].中国激光,2017,44(7):0703005.
[7]Li T,Chen J,Zhu S N.Manipulating surface plasmon propagation:From beam modulation to near-field holography[J].Laser&Optoelectronics Progress,2017,54(5):050002.李涛,陈绩,祝世宁.表面等离激元的传播操控:从波束调制到近场全息[J].激光与光电子学进展,2017,54(5):050002.
[8]Kanehara M,Koike H,Yoshinaga T,et al.Indium tin oxide nanoparticles with compositionally tunable surface plasmon resonance frequencies in the near-IRregion[J].Journal of the American Chemical Society,2009,131(49):17736-17737.
[9]Zhang B X,Chen S F,Fu L,et al.Dynamic patterning of microparticles via surface plasmon excitation[J].Chinese Journal of Lasers,2012,39(6):0610001.张兵心,陈淑芬,付雷,等.基于表面等离子体激发的光学操控技术[J].中国激光,2012,39(6):0610001.
[10]Jia R,Lin G,Zhao D,et al.Sandwich-structured Cu2O photodetectors enhanced by localized surface plasmon resonances[J].Applied Surface Science,2015,332:340-345.
[11]Bai Y,Gao C,Yin Y.Fully alloyed Ag/Au nanorods with tunable surface plasmon resonance and high chemical stability[J].Nanoscale,2017,9(39):14875-14880.
[12]You J B,Zhang X W,Dong J J,et al.Localizedsurface-plasmon enhanced the 357 nm forward emission from ZnMgO films capped by Pt nanoparticles[J].Nanoscale Research Letters,2009,4(10):1121-1125.
[13]Wang Y,Wang X,Li L W.Properties of light trapping of thin film solar cell based on surface plasmon polaritons[J].Laser&Optoelectronics Progress,2015,52(9):092401.王玥,王暄,李龙威.基于表面等离激元薄膜太阳能电池陷光特性的研究[J].激光与光电子学进展,2015,52(9):092401.
[14]Gao J.Investigation of siliver nanoparticle films in plasmonics for use as fluorescence enhancement of RH6G molecules[J].Laser&Optoelectronics Progress,2015,52(6):061601.高俊.Ag纳米薄膜的等离激元对RH6G分子的荧光增强研究[J].激光与光电子学进展,2015,52(6):061601.
[15]Karasawa T,Miyata Y.Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by dc reactive sputtering[J].Thin Solid Films,1993,223(1):135-139.
[16]Zeng W Q,Yao J K,He H B,et al.Influence of substrate temperature on the properties of tin-doped indium oxide thin films prepared by direct current magnetron sputtering[J].Chinese Journal of Lasers,2008,35(12):2031-2035.曾维强,姚建可,贺洪波,等.基底温度对直流磁控溅射ITO透明导电薄膜性能的影响[J].中国激光,2008,35(12):2031-2035.
[17]Zhang Y H,Guo W L,Qin Y,et al.Effects of ITOon proprieties of novel AlGaInP red LED[J].Acta Optica Sinica,2010,30(8):2401-2405.张勇辉,郭伟玲,秦园,等.ITO对新型AlGaInP红光LED特性的影响[J].光学学报,2010,30(8):2401-2405.
[18]Boltasseva A,Atwater H A.Low-loss plasmonic metamaterials[J].Science,2011,331(6015):290-291.
[19]Brewer S H,Franzen S.Indium tin oxide plasma frequency dependence on sheet resistance and surface adlayers determined by reflectance FTIR spectroscopy[J].The Journal of Physical Chemistry B,2002,106(50):12986-12992.
[20]Kamakura R,Fujita K,Murai S,et al.Controlling plasmonic properties of epitaxial thin films of indium tin oxide in the near-infrared region[J].Journal of Physics,2015,619(1):012056.
[21]Fang X,Mak C L,Zhang S,et al.Pulsed laser deposited indium tin oxides as alternatives to noble metals in the near-infrared region[J].Journal of Physics:Condensed Matter,2016,28(22):224009.
[22]Tuo Y F,Wu Y P,Huang M,et al.The surface plasmon resonance absorption of indium tin oxide nanoparticles and its control[J].Advanced Materials Research,2015,1118:160-165.
[23]Hao L,Diao X,Xu H,et al.Thickness dependence of structural,electrical and optical properties of indium tin oxide(ITO)films deposited on PETsubstrates[J].Applied Surface Science,2008,254(11):3504-3508.
[24]West P R,Ishii S,Naik G V,et al.Searching for better plasmonic materials[J].Laser&Photonics Reviews,2010,4(6):795-808.
[25]Gao M Z,Job R,Xue D S,et al.Thickness dependence of resistivity and optical reflectance of ITO films[J].Chinese Physics Letters,2008,25(4):1380-1383.