Si_3N_4-TiZrN_2-TiN复合导电陶瓷
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摘要
以制备可用电火花加工的氮化硅基陶瓷材料为目的,用Zr N-Ti N作为导电相,以Y_2O_3、La_2O_3、Al N作为烧结助剂,在1750℃无压烧结Si_3N_4-Ti Zr N_2-Ti N复合导电陶瓷。测试了试样的烧结特性、机械性能及导电性能,用XRD和SEM分析表征了试样的物相和显微结构。其结果为:相对密度接近98%;试样的机械性能良好,抗弯强度可达到960 MPa,显微硬度为14.7 GPa,断裂韧性为7.6 MPa·m~(1/2);试样的电阻率由单相氮化硅陶瓷的10~(13)?·cm降低到复合导电陶瓷的10~(-2)?·cm数量级,可用电火花进行加工。物相分析表明,试样中生成了Ti Zr N_2新物相,形成了Si_3N_4-Ti Zr N_2-Ti N复合导电陶瓷。显微分析表明,试样中的三种晶粒均在2μm以下,具有相互结合紧密且分布较均匀的显微结构。
Si_3N_4-TiZrN_2-TiN electric ceramic composite was prepared by pressless sintering at 1750℃with Y_2O_3,La_2O_3 and Al N as sintering additives and Zr N-Ti N as electric phases.The sintering behavior,mechanical and electric properties of the composite were tested.The phase composition and microstructure of the composite were analyzed by XRD and SEM.The result shows that its relative density reaches 98%,its bending strength 960 MPa,its Vickers hardness 14.7 GPa,and its fracture toughness 7.6 MPa·m~(1/2).The electric resistivity of the samples decreases to as low as 10~(-2)?·cm from 10~(13)?·cm of single phase Si_3N_4.It makes electrical discharge machining of the composite possible.Phase composition analysis result shows a new phase of Ti Zr N_2 is formed in the samples and Si_3N_4-Ti Zr N_2-Ti N composite conductive ceramic is produced.The grains are less than 2μm,and the samples have a microstructure in which the Ti Zr N_2,Ti N and Si_3N_4 grains are closely bonded to each other and uniformly distributed.
Si_3N_4-TiZrN_2-TiN electric ceramic composite was prepared by pressless sintering at 1750℃with Y_2O_3,La_2O_3 and Al N as sintering additives and Zr N-Ti N as electric phases.The sintering behavior,mechanical and electric properties of the composite were tested.The phase composition and microstructure of the composite were analyzed by XRD and SEM.The result shows that its relative density reaches 98%,its bending strength 960 MPa,its Vickers hardness 14.7 GPa,and its fracture toughness 7.6 MPa·m~(1/2).The electric resistivity of the samples decreases to as low as 10~(-2)?·cm from 10~(13)?·cm of single phase Si_3N_4.It makes electrical discharge machining of the composite possible.Phase composition analysis result shows a new phase of Ti Zr N_2 is formed in the samples and Si_3N_4-Ti Zr N_2-Ti N composite conductive ceramic is produced.The grains are less than 2μm,and the samples have a microstructure in which the Ti Zr N_2,Ti N and Si_3N_4 grains are closely bonded to each other and uniformly distributed.
引文
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[3]蒋强国,古尚贤,刘伟,等.含Mg O-Lu2O3-Re2O3三元添加剂Si3N4陶瓷摩擦磨损性能的研究[J].人工晶体学报,2015,44(10):2869-2873.JIANG Q G,GU S X,LIU W,et al.Journal of Synthetic Crystals,2015,44(10):2869-2873.
[4]郭伟明,吴利翔,马提,等.Mg O-Al2O3Re2O3(R=Lu,Y)对无压烧结Si3N4陶瓷显微结构和性能的影响[J].人工晶体学报,2016,45(1):80-84.GUO W M,WU L X,MA T,et al.Journal of Synthetic Crystals,2016,45(1):80-84.
[5]JIANG YONG,WU LANER,SUN WENZHOU.Sintering behavior and properties of Si C/Si3N4 composite[J].Rare Metals,2015,2:95-100.
[6]HIROSAKI N,AKIMUNE Y.J Am Ceram Soc,1994,77:1093–1097.
[7]LIU Chien-Cheng.Microstructure and tool electrode erosion in EDMed of Ti N/Si3N4 composites[J].Materials Science and Engineering,2003,A363:221–227.
[8]KAWANO S,TAKAHASHI J,SHIMADA S.Highly electroconductive Ti N/Si3N4 composite ceramics fabricated by spark plasma sintering of Si3N4 particles with a nano-sized Ti N coating[J].J Mater Chem,2002,12:361-365.
[9]LIU Chien-Cheng,HUANG Jow-Lay.Effect of the electrical discharge machining on strength and reliability of Ti N/Si3N4composites[J].Ceramics International.2003,29:679–687.
[10]HERRMANN M,BALZER B,SCHUBERRT C,et al.Microstructure and properties of Si3N4-Ti(C,N)composites[J].J Eur Ceram Soc,1993,12:287-296.
[11]LIU K,REYNAERTS D,LAUWERS B.Influence of the pulse shape on the EDM performance of Si3N4–Ti N ceramic composite[J].CIRP Annals–Manufacturing Technology,2009,58:217–220.
[12]李家亮,陈斐,牛金叶.氮化硅陶瓷的低温常压烧结及其力学性能[J].硅酸盐通报,2011,30(6):1309-1313.LI J L,CHEN F,NIU J Y.Bulletin of the Chinese Ceramic Society,2011,30(6):1309-1313.
[13]古尚贤,郭伟明,曾俊杰,等.Si3N4-Ti C0.5N0.5复相陶瓷的制备及切削性能研究[J].人工晶体学报,2015,44(5):1259-1265.GU S X,GUO W M,ZENG J J,et al.Journal of Synthetic Crystals,2015,44(5):1259-1265.
[14]李景曦,伍尚华,郭伟明,等.Zr B2粒径对Si3N4-Zr B2陶瓷相组成、显微结构及电阻率的影响[J].人工晶体学报,2017,46(2):352-355.LI J X,WU S H,GUO W M,et al.Journal of Synthetic Crystals,2017,46(2):352-355.
[15]Andrievskii R A,Anisimova I A,Izv Akad Nauk SSSR,Neorg Mater,1991,27(7):1450-1453;Inorg Mater(Engl Transl),1991,27(7):1220-1223.
[16]WEISS J,GAUCKLER L J,LUKAS H L,et al.Journal of Materials Science,1981,16(11):2997-3005.