氧化物单模脊形光波导分束器的优化设计及制作
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摘要
通过改进光波导的有效折射率法(EIM)方法,定义新的归一化参量,得出了脊形光波导模式归一化本征方程及单模条件的简单表达式.新的脊形光波导单模条件突破了以往理论对归一化外脊高(r)的限制,允许脊形光波导的参数r的取值进入r<0.5的范围,据此设计制作了单模工作的氧化物脊形光波导.新定义的归一化参量对分析计算脊形光波导具有通用性,为优化设计脊形光波导及其单模结构参数提供了便利性和更大的灵活性.
Effective index method using analyzing optical waveguides is improved by defining a new group of normalized parameters,which the simpler expressions of the normalized eigen equation and the single mode condition are achieved for ridge waveguides.The new single mode condition breaks the theory limit used for the normalized height( r) before,which permits( r<0.5),thereafter,an oxide single-mode ridge waveguide is designed and fabricated.The new defined normalized parameters are versatile for analyzing and calculating ridge waveguides,which provides more convenience and flexibility for optimal designing ridge waveguides and their structure parameter of the single mode ridge waveguides.
Effective index method using analyzing optical waveguides is improved by defining a new group of normalized parameters,which the simpler expressions of the normalized eigen equation and the single mode condition are achieved for ridge waveguides.The new single mode condition breaks the theory limit used for the normalized height( r) before,which permits( r<0.5),thereafter,an oxide single-mode ridge waveguide is designed and fabricated.The new defined normalized parameters are versatile for analyzing and calculating ridge waveguides,which provides more convenience and flexibility for optimal designing ridge waveguides and their structure parameter of the single mode ridge waveguides.
引文
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[18] ZHANG A,CHAN K T.Fabrication and characterization of PECVD oxynitride rectangular and rib optical waveguides[C]//Optoelectronics,Proceedings of the Sixth Chinese Symposium,IEEE,2003:124-127.
[2]周建华,游佰强,林静.PMMA脊形光波导的设计与场分析[J].光电子技术,2006,26(4):250-254.ZHOU J H,YOU B Q,LIN J.Design and field analysis of PMMA rib optical waveguides[J].Optoelectronic Technology,2006,26(4):250-254.
[3] BERROUANE W,ANANI M,CHAMA Z,et al. Effective index method applied on a Ga N/InxGa1-xN integrated optics waveguide[J].International Journal of Nanoelectronics and Materials,2018,7(3):313-322.
[4] KAISER P,MARCATILI E A J,MILLER S E.A new optical fiber[J].Bell Labs Technical Journal,1973,52(2):265-269.
[5]魏红振,余金中,张小峰,等.SOI及Ge Si/Si脊形光波导的模式与波导几何结构[J].光学学报,2001,21(5):556-558.WEI H Z,YU J Z,ZHNAG X F,et al.Geometric structures and modes of SOI and Ge Si/Si rib opticl waveguides[J].Acta Optica Sinica,2001,21(5):556-558.
[6]曾维友,毛书哲,陈伟.聚合物脊型光波导的有限元分析[J].湖北汽车工业学院学报,2012,26(3):49-51.ZENG W Y,MAO S Z,CHEN W.Finite element analysis of polymer rib optical waveguide[J].Journal of Hubei Automotive Industries Institute,2012,26(3):49-51.
[7] MARTINA D L,ANDREA I,GIOVANNI B.Determination of single mode condition in dielectric rib waveguide with large cross section by finite element analysis[J].Journal of Computational Electronics,2007,6:285-287.
[8]黄晖.SOI脊形光波导1 550 nm波长单模条件分析[D].北京:北京工业大学,2015:15-18.HUANG H.Analysis of single-mode condition for SOI waveguide at 1 550 nm wavelength[D]. Beijing:Beijing University of Technology,2015:15-18.
[9] PETERMANN K.Properties of optical rib-guides with large cross-section[J].Aeu-International Journal of Electronics and Communications,1976,30:139-140.
[10]蔡鑫伦,黄德修,张新亮.基于全矢量模式匹配法的三维弯曲波导本征模式计算[J].物理学报,2007,56(4):2 268-2 274.CAI X L,HUANG D X,ZHANG X L.Application of full vectorial mode matching method to the calculation of eigenmodes of three-dimensional bent waveguide0[J].Chinese Journal of Physics,2007,56(4):2 268-2 274.
[11]金永兴,徐江峰,王剑锋.脊形波导有限差分法分析[J].中国计量学院学报,2003,14(2):114-116.JIN Y X,XU J F,WANG J F.Finite difference method for rib waveguide analysis[J].Journal of China Insititute of Metrology,2003,14(2):114-116.
[12] LEE C H,KIM C,PARK J H,et al.Optimization of the buffer layer of a side-polished fiber-slab coupler based on 3-D alternating direct implicit beam propagation method[J].Journal of the Korean Physical Society,2010,56(1):329-332.
[13] CHAN S P,PNG C E,LIM S T,et al.Single-mode and polarization-independent silicon-on-insulator waveguides with small cross section[J].Journal of Light Wave Technology,2005,23(6):2 103-2 111.
[14] XIA J S,YU J Z.Single-mode condition for silicon rib waveguides with large cross-section[J].Optics Communications,2004,230:253-257.
[15] POWELL O.Single-mode condition for silicon rib waveguides[J].Journal of Light Wave Technology,2002,20(10):1 851-1 855.
[16]陆荣国,刘永智,廖进昆,等.聚合物Y分支脊形波导的单模条件[J].发光学报,2007,28(4):617-621.LU R G,LIU Y Z,LIAO J K,et al.Single mode condition of polymeric Y-junction rib waveguide[J].Chinese Journal of Luminescence,2007,28(4):617-621.
[17] SOREF R A,SCHMIDTCHEN J,PETERMANN K.Large single-mode rib wave-guides in Ge Si-Si and Si-on-Si O2[J].IEEE J Quantum Electron,1991,27:1 971-1 974.
[18] ZHANG A,CHAN K T.Fabrication and characterization of PECVD oxynitride rectangular and rib optical waveguides[C]//Optoelectronics,Proceedings of the Sixth Chinese Symposium,IEEE,2003:124-127.