超光滑光学元件表面疵病检测与控制
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摘要
零件表面形貌是工件在不同加工过程中形成的结果。通过对表面疵病宏观与微观形貌研究,以实现对加工过程中产生疵病源头准确定位与控制。依据超光滑表面疵病特点,提出了有针对性的疵病两步测量法,设计了激光辅助显微镜检测设备检测疵病的形状、位置及方向等宏观特征;再采用白光干涉仪和原子力显微镜对这一疵病进行了深入的微观形貌检测,实现了对最大深度0.1μm疵病的检测。两步测量法可以有效地控制并检测超光滑表面的疵病。
The super-smooth surface morphology reflects the machining process.The source of the defects can be detected and controlled exactly by research on the surface defects of the macroscopic.According to the characteristics of ultra-smooth polishing surface defects,the two-step measurement method is proposed.The equipment of laser assisted detection microscope which located the geometric of defects is designed.The white-light interferometer and AFM are used to detect the defects deeply.Two-step measurement method can realize defects measure depth by 0.1μm.It can control and detect the defects of ultra-smooth surface effectively.
The super-smooth surface morphology reflects the machining process.The source of the defects can be detected and controlled exactly by research on the surface defects of the macroscopic.According to the characteristics of ultra-smooth polishing surface defects,the two-step measurement method is proposed.The equipment of laser assisted detection microscope which located the geometric of defects is designed.The white-light interferometer and AFM are used to detect the defects deeply.Two-step measurement method can realize defects measure depth by 0.1μm.It can control and detect the defects of ultra-smooth surface effectively.
引文
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[3]杨福兴.激光核聚变光学元件超精密加工技术的研究[J].光学技术,2003,29(6):649-651.YANG Fu xing.Study on the technology of the ultra precision machining for the optical components in laser nuclear fusion[J].Optical Technique,2003,29(6):649-651.
[4]陈光,熊长新.超光滑加工精磨过程中损伤层与余量匹配的研究[J].光学与光电技术,2015,13(1):68-73.CHEN Guang,XIONG Chang-xin.Research on surface damage and process redundancy match during grinding in super-smooth fabrication[J].Optics&Optoelectronic Technology,2015,13(1):68-73.
[5]袁顺山,程子清,陈光.微晶玻璃超光滑抛光过程中抛光剂选型实验研究[J].光学与光电技术,2015,13(4):87-90.YUAN Shun-shan,CHENG Zi-qing,CHEN Guang.Experimental study on the selection of polishing powder during super-smooth polishing progress of glass-ceramic[J].Optics&Optoelectronic Technology,2015,13(4):87-90.
[6]中华人民共和国国家质量监督检验检疫总局.GB/T 1185-2006光学零件表面疵病[S].北京:中国标准出版社,2017.
[7]《光学零件工艺手册》编写组.光学零件工艺手册[M].北京:国防工业出版社,1977.Technology manual of optical parts writing group.Technology manual of optical parts[M].Beijing:National Defend Industry Press,1977.
[8]Tae-Young KWON,Manivannan Ramachandran,Jin-Goo Park.Scratch formation and its mechanism in chemical mechanical planarization[J].Friction,2013,1(4):279-305.
[9]杨甬英,陆春华,梁蛟,等.光学元件表面缺陷的显微散射暗场成像及数字化评价系统[J].光学学报,2007,27(6):1031-1037.YANG Yong-ying,LU Chun-hua,LIANG Jiao,et al.Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J].Acta Optica Sinica,2007,27(6):1031-1037.
[10]戴明奎,徐徳衍.光学元件的疵病检验与研究现状[J].光学仪器,1996,18(4):31-39.DAI Ming-kui,XU De-Yan.The present situation of imperfections testing and researching on the optical components[J].Optical Instruments,1996,18(4):31-39.
[11]D马拉卡拉.光学车间检测[M].杨力,伍凡,译.北京:机械工业出版社,2012.D Malacara.Optical shop testing[M].YANG Li,WU Fan,Transl..Beijing:China Machine Press,2012.
[12]朱杰,孙润广.原子力显微镜基本原理及其方法研究[J].生命科学仪器,2005,3(1):22-26.ZHU Jie,SUN Run-guang.Introduction to atomic microscope and its manipulation[J].Life Science Instruments,2005,3(1):22-26.
[13]华杰,徐盛明,池汝安,等.原子力显微镜测定力-距离曲线的原理和应用[J].金属矿山,2003,319(1):25-30.HUA Jie,XU Sheng-ming,CHI Ru-an,et al.Principles of force-distance curve determination by atomic forcemicroscopy[J].Metal Mine,2003,319(1):25-30.
[14]Bruker.Icon AFM manuals[M].Madison:Bruker Corporation,2012.