640x512偏振长波量子阱红外焦平面探测器研制
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摘要
介绍了大面阵偏振长波量子阱红外焦平面探测器组件的研制进展。在640×512规模20μm中心距面阵上,偏振焦平面采用了2×2子单元设计,子单元中每个像元分别刻蚀0°、90°、45°以及135°方向的一维线性光栅,来获得入射光不同偏振角度的信息。突破了长波量子阱材料外延和器件制备等关键技术,制备出面阵探测器芯片,实现了偏振长波红外探测的单片集成,配上杜瓦和制冷机,研制出噪声等效温差优于30m K的长波偏振640×512量子阱探测器组件。
The development of the large format polarimetric LWIR quantum well infrared FPA. The 20 μm pitch, 640 ×512 array was divided into 2 ×2 unit cells. Each pixel in the unit cell was etched a 1D lamellar grating on it, with four different orientations of 0 °, 90°, 45° and 135°, to get the polarimetric information of the incidence irradiation. Based on the QWIP FPA key technologies such as quantum well material epitaxy and chip preparation, the single-chip integration with LWIR and the polarization detection function was realized on the QWIP FPA. The 640 ×512 polarimetric LWIR QWIP FPA assembly with noise equivalent temperature difference(NETD) better than 30 m K was obtained with the integration the FPA chip with the Dewar and the sterling cooler.
The development of the large format polarimetric LWIR quantum well infrared FPA. The 20 μm pitch, 640 ×512 array was divided into 2 ×2 unit cells. Each pixel in the unit cell was etched a 1D lamellar grating on it, with four different orientations of 0 °, 90°, 45° and 135°, to get the polarimetric information of the incidence irradiation. Based on the QWIP FPA key technologies such as quantum well material epitaxy and chip preparation, the single-chip integration with LWIR and the polarization detection function was realized on the QWIP FPA. The 640 ×512 polarimetric LWIR QWIP FPA assembly with noise equivalent temperature difference(NETD) better than 30 m K was obtained with the integration the FPA chip with the Dewar and the sterling cooler.
引文
[1]Fan Jinxiang,Yang Jianyu.Dev elopment trends of infrared imaging detecting technology[J].Infrared and Laser Engineering,2012,41(12):3145-3153.(in chinese)范晋祥,杨建宇,红外成像探测技术发展趋势分析[J].红外与激光工程,2012,41(12):3145-3153.
[2]Schneider H,Liu H C.Quantum Well Infrared Photodetectors[M].springer,2006.
[3]Eric Costarda,Truffera Jean P.Two color QWIP and extended wavebands[C]//SPIE,2007,6542:65420X.
[4]Li Dongsheng,Zhou Xuchang.Study on the dual color QWIP FPA with MW/LW switch architecture[J].Infrared and Laser Engineering,2015,44(6):168-1685.(in chinese)李东升,周旭昌.中/长波切换工作模式的双色量子阱红外焦平面研制[J].红外与激光工程,2015,44(6):1681-1685.
[5]Zhou Xuchang,Tan Ying,Yang Chunzhang.Study on the Quantum Well Infrared Photodetector material[J].Infrared Technology,2013,35(8):463-466.(in chinese)周旭昌,谭英,杨春章.长波量子阱红外探测器材料技术研究[J].红外技术,2013,35(8):463-466.
[6]Chen C J,Choi K K.Corrugated quantum well infrared photodetectors for polarization detection[J].Appl Phys Lett,1999,74(6):862-864.
[7]Daneil W Beckman,James Van Anda.Polarization sensitive QWIP thermal imager[J].Infrared Physics&Technology,2001,42(3):323-328.
[8]Alexandru Nedelcu,Hugues Facoetti,Eric Costard,et al.Small pitch,large format long-wave infrared QWIP focal plane arrays for polarimetric imagery[C]//Infrared Technology and Applications XXXIII,2007,6542:65420U.
[9]Nicolas Perrin,Eric Belhaire,Patrice Marquet,et al.QWIP development status at Thales[C]//SPIE,2008,6940:694008.
[10]Barry Connor,Iain Carrie,Robert Craig,et al.Discriminative imaging using a LWIR polarimeter[C]//SPIE,2008,7113:71130K.
[2]Schneider H,Liu H C.Quantum Well Infrared Photodetectors[M].springer,2006.
[3]Eric Costarda,Truffera Jean P.Two color QWIP and extended wavebands[C]//SPIE,2007,6542:65420X.
[4]Li Dongsheng,Zhou Xuchang.Study on the dual color QWIP FPA with MW/LW switch architecture[J].Infrared and Laser Engineering,2015,44(6):168-1685.(in chinese)李东升,周旭昌.中/长波切换工作模式的双色量子阱红外焦平面研制[J].红外与激光工程,2015,44(6):1681-1685.
[5]Zhou Xuchang,Tan Ying,Yang Chunzhang.Study on the Quantum Well Infrared Photodetector material[J].Infrared Technology,2013,35(8):463-466.(in chinese)周旭昌,谭英,杨春章.长波量子阱红外探测器材料技术研究[J].红外技术,2013,35(8):463-466.
[6]Chen C J,Choi K K.Corrugated quantum well infrared photodetectors for polarization detection[J].Appl Phys Lett,1999,74(6):862-864.
[7]Daneil W Beckman,James Van Anda.Polarization sensitive QWIP thermal imager[J].Infrared Physics&Technology,2001,42(3):323-328.
[8]Alexandru Nedelcu,Hugues Facoetti,Eric Costard,et al.Small pitch,large format long-wave infrared QWIP focal plane arrays for polarimetric imagery[C]//Infrared Technology and Applications XXXIII,2007,6542:65420U.
[9]Nicolas Perrin,Eric Belhaire,Patrice Marquet,et al.QWIP development status at Thales[C]//SPIE,2008,6940:694008.
[10]Barry Connor,Iain Carrie,Robert Craig,et al.Discriminative imaging using a LWIR polarimeter[C]//SPIE,2008,7113:71130K.