物理气相沉积在镁合金表面防护领域的研究现状
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摘要
镁合金表面耐腐蚀性能、耐磨性能较差,物理气相沉积(PVD)镀膜技术是一种提高镁合金表面性能的有效方法。总结了PVD镀膜防腐蚀层和耐磨层的特性,分析了涂层耐腐蚀耐磨的机理和存在的不足。综述了镁合金表面PVD膜层的研究进展,阐述了物理气相沉积技术对镁合金的表面改性的应用现状,并对该技术在镁合金上的发展进行了概括,指出了目前PVD技术在镁合金表面防护领域的新前景,为今后PVD技术对镁合金表面防护的研究与发展提供了相关参考。
The corrosion resistance and wear resistance of magnesium alloys are poor,and physical vapor deposition( PVD) coating technology is an effective way to improve the surface properties of magnesium alloys. The properties of anticorrosive and wear-resistant layers of PVD coating were summarized,and the mechanism and shortcomings of corrosion resistance and wear resistance of coatings were analyzed. Besides,the research progress of PVD coating on the surface of magnesium alloy was reviewed,and the surface modification of magnesium alloy by physical vapor deposition was described,as well as the application and development of the technology on magnesium alloys were summarized. Finally,the new prospects of PVD technology in the field of magnesium alloy surface protection were pointed out. This work would provide a reference for the research and development of PVD technology on the surface protection of magnesium alloy in the future.
The corrosion resistance and wear resistance of magnesium alloys are poor,and physical vapor deposition( PVD) coating technology is an effective way to improve the surface properties of magnesium alloys. The properties of anticorrosive and wear-resistant layers of PVD coating were summarized,and the mechanism and shortcomings of corrosion resistance and wear resistance of coatings were analyzed. Besides,the research progress of PVD coating on the surface of magnesium alloy was reviewed,and the surface modification of magnesium alloy by physical vapor deposition was described,as well as the application and development of the technology on magnesium alloys were summarized. Finally,the new prospects of PVD technology in the field of magnesium alloy surface protection were pointed out. This work would provide a reference for the research and development of PVD technology on the surface protection of magnesium alloy in the future.
引文
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[2]李超楠,夏琦兴,王莹,等.硫酸铜浓度对镁合金微弧氧化膜层热控性能的影响[J].材料保护,2017,50(10):48-51,64.
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[4] ULACIA I,HURTADO I,IMBERT J,et al.Experimental and Numerical Study of Electromagnetic Forming of AZ31B Magnesium Alloy Sheet[J]. Steel Research International,2010,80(5):344-350.
[5] LUO F,LI Q,ZHONG X K,et al.Corrosion electrochemical behaviors of silane coating coated magnesium alloy in Na Cl solution containing cerium nitrate[J]. Materials&Corrosion,2015,63(2):148-154.
[6]刘杰,秦聪祥. PVD法制备的Ti Al N/Al2O3复合涂层氧化铝陶瓷刀具切削性能研究[J].组合机床与自动化加工技术,2017(6):122-125.
[7]吴庆猛,张康,张冰,等.真空镀膜法制备纳米银颗粒膜局域表面等离激元共振特性的研究[J].真空科学与技术学报,2017(2):211-218.
[8] GOLI E,AGHAJANI H. A study on corrosion resistance of Al magnetron sputtering coated AZ31 magnesium alloy[J].Vacuum,2018,152:231-238.
[9]吴化,陈涛,宋力. PVD法制备(Ti,Al)N涂层中残余应力对其质量的影响[J].材料工程,2013(2):60-64.
[10]邵泽宽.涂层刀具的现状研究[J].有色金属科学与工程,2017,8(6):57-64.
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[12]谢祖华,李云妹. PVD表面改性技术在模具上的应用[J].机电技术,2011,34(6):87-90.
[13] KONSTANTINOS-DIONYSIOS B,LOANNIS M,NIKOLAOS M,et al. Wear of Tools Coated with Various PVD Films:Correlation with Impact Test Results by Means of FEM Simulations[J]. Plasma Processes&Polymers,2007,4(3):301-310.
[14]李黎明.气相沉积制备锂离子电池正极薄膜研究进展[J].材料导报,2006,20:296-298.
[15]杨亮,周丽梅,敖建平,等.电化学沉积制备的Cu(In,Ga)Se2薄膜性能研究[J].化学工程与装备,2010(4):14-16.
[16] LIM H K,BYUN S H,LEE J Y,et al. Radiological,histological,and hematological evaluation of hydroxyapatite-coated resorbable magnesium alloy screws placed in rabbit tibia[J].Journal of Biomedical Materials Research,2017,1105(6):1 636-1 644.
[17] BAI C Y,LI J W,TA W B,et al. In vivo Study on the Corrosion Behavior of Magnesium Alloy Surface Treated with Micro-Arc Oxidation and Hydrothermal Deposition[J]. Orthopaedic Surgery,2017,9(3):296-303.
[18]谢新明,李金龙,王永欣,等. Ti Si(CN)系列涂层的结构和性能研究进展[J].表面技术,2017(11):55-61.
[19]肖晓华,陈松,国听,等.陶瓷膜对牙轮钻头滑动轴承摩擦磨损性能的影响[J].金属热处理,2016(10):75-80.
[20] STASZUK M,PAKULA D,CHLADEK G,et al. Investigation of the structure and properties of PVD coatings and ALD+PVD hybrid coatings deposited on sialon tool ceramics[J].Vacuum,2018,154:272-284.
[21] LIU W,CAO F,ZHONG L,et al.Influence of rare earth element Ce and La addition on corrosion behavior of AZ91 magnesium alloy[J]. Materials&Corrosion,2009,60(10):795-803.
[22] DIAB M,PANG X,JAHED H. The Effect of Pure Aluminum Cold Spray Coating on Corrosion and Corrosion Fatigue of Magnesium(3%Al-1%Zn)Extrusion[J]. Surface and Coatings Technology,2017,309:423-425.
[23] WU W W,LI X Y,DONG H S,et al.Deposition and Microstructural Characterisation of GLC Coatings on AZ31 Magnesium Alloy[J]. Plasma Processes And Polymers,2009,6(S1):S473-S477.
[24] TAO Y,XIONG T,SUN C,et al. Effect ofα-Al2O3on the Properties of Cold Sprayed Al/α-Al2O3Composite Coatings on AZ91D Magnesium Alloy[J]. Applied Surface Science,2009,256(1):261-266.
[25] BASHIR M I,SHAFIQ M,NAEEM M,et al. Enhanced surface properties of aluminum by PVD-Ti N coating combined with cathodic cage plasma nitriding[J]. Surface and Coatings Technology,2017,327:59-65.
[26]王振林,杨惠,杨栋华.镁合金磁控溅射镀铝耐蚀防护层研究[J].中国机械工程,2008,19(8):993-997.
[27]韦春贝,代明江,高阳,等. AZ91D镁合金磁控溅射镀铝膜及其化学转化后的耐蚀性[J].电镀与涂饰,2012(4):30-33.
[28]沈钰,祝向荣. AZ31镁合金表面磁控溅射Al和Ti N的试验研究[J].轻合金加工技术,2014,42(8):56-61.
[29]黄佳木,罗先盛. AZ31镁合金表面磁控溅射Si N薄膜的性能研究[J].材料导报:纳米与新材料专辑,2008(3):384-386.
[30]王宁,王静,王传兴,等. AZ31B镁合金表面沉积类金刚石膜的研究[J].石油化工高等学校学报,2016,29(6):6-10.
[31]吴楠,赵红阳,郭媛媛,等. AZ31镁合金沉积类金刚石薄膜的表面形貌和腐蚀行为[J].中国表面工程,2014,27(1):81-86.
[32]冯世杰,梁伟,薛晋波. AZ91D镁合金表面真空蒸镀锌铝复合涂层的研究[J].稀有金属,2010,34(5):678-684.
[33]冯凯,李铸国,张超.镁合金表面Ni+C涂层的耐腐蚀与耐磨性能研究[J].表面技术,2017,46(3):28-33.
[34]王浩楠,李显争.纯钛表面钛钯合金层制备及耐蚀性能[J].材料热处理学报,2016,37(S1):130-135.
[35] XIONG Y,GAOG X,JIANG Y. Effect of initial texture on fatigue properties of extruded ZK60 magnesium alloy[J]. Fatigue&Fracture of Engineering Materials&Structures,2018,41(6):1 243-1 244.
[36]曹辉,郝仪,孙树臣,等.电子束表面改性对镁合金耐磨性的影响[J].轻金属,2011,43(6):45-49.
[37]吴杏,陈飞.汽车用AZ91D镁合金表面改性实验研究[J].电镀与环保,2017,37(3):6-8.
[38]李忠厚,马芹芹,杨迪,等.多弧离子镀Ti/Ti N膜的耐磨耐蚀性研究[J].热处理技术与装备,2014(4):20-23.
[39]孙永花,王波,王若云,等. AZ91D镁合金表面原位合成Ti O2陶瓷层及其性能的研究[J].真空科学与技术学报,2016,36(9):1 071-1 076.
[40]李忠厚,郭腾腾,宫学博,等.磁控溅射镀钛提高AZ31镁合金耐磨耐腐蚀性能的研究[J].表面技术,2015,43(6):121-124.
[41] MOMENI S,TILLMANN W,POHL M. Composite cavitation resistant PVD coatings based on Ni Ti thin films[J]. Materials&Design,2016,110:830-838.
[42] REZANKA S,MACK D E,MAUER G,et al.Investigation of the resistance of open-column-structured PS-PVD TBCs to erosive and high-temperature corrosive attack[J]. Surface and Coatings Technology,2017,324:222-235.
[43]袁佟,邓畅光,毛杰,等.等离子喷涂-物理气相沉积制备7YSZ热障涂层及其热导率研究[J].材料工程,2017,45(7):1-6.
[44]张而耕,朱州,张体波.超硬纳微米PVD涂层技术在刀具领域的应用及研究进展[J].表面技术,2015,44(4):89-96.
[45]刘立强,王晓临,李真一,等.太阳能高效利用减反射技术研究进展[J].山东建筑大学学报,2016,31(6):606-613.
[2]李超楠,夏琦兴,王莹,等.硫酸铜浓度对镁合金微弧氧化膜层热控性能的影响[J].材料保护,2017,50(10):48-51,64.
[3] YUAN J,GAO J,WANG J H,et al. Preparation and corrosion resistance of Ni-P bilayer on magnesium alloy[J]. Materials&Corrosion,2017,68(12):1 377-1 388.
[4] ULACIA I,HURTADO I,IMBERT J,et al.Experimental and Numerical Study of Electromagnetic Forming of AZ31B Magnesium Alloy Sheet[J]. Steel Research International,2010,80(5):344-350.
[5] LUO F,LI Q,ZHONG X K,et al.Corrosion electrochemical behaviors of silane coating coated magnesium alloy in Na Cl solution containing cerium nitrate[J]. Materials&Corrosion,2015,63(2):148-154.
[6]刘杰,秦聪祥. PVD法制备的Ti Al N/Al2O3复合涂层氧化铝陶瓷刀具切削性能研究[J].组合机床与自动化加工技术,2017(6):122-125.
[7]吴庆猛,张康,张冰,等.真空镀膜法制备纳米银颗粒膜局域表面等离激元共振特性的研究[J].真空科学与技术学报,2017(2):211-218.
[8] GOLI E,AGHAJANI H. A study on corrosion resistance of Al magnetron sputtering coated AZ31 magnesium alloy[J].Vacuum,2018,152:231-238.
[9]吴化,陈涛,宋力. PVD法制备(Ti,Al)N涂层中残余应力对其质量的影响[J].材料工程,2013(2):60-64.
[10]邵泽宽.涂层刀具的现状研究[J].有色金属科学与工程,2017,8(6):57-64.
[11] EERDEN M,PAPA F,KRUG T,et al.Higher Tool Productivity due to New Generation of PVD Coatings[J]. Vakuum in Forschung Und Praxis,2012,24(1):6-8.
[12]谢祖华,李云妹. PVD表面改性技术在模具上的应用[J].机电技术,2011,34(6):87-90.
[13] KONSTANTINOS-DIONYSIOS B,LOANNIS M,NIKOLAOS M,et al. Wear of Tools Coated with Various PVD Films:Correlation with Impact Test Results by Means of FEM Simulations[J]. Plasma Processes&Polymers,2007,4(3):301-310.
[14]李黎明.气相沉积制备锂离子电池正极薄膜研究进展[J].材料导报,2006,20:296-298.
[15]杨亮,周丽梅,敖建平,等.电化学沉积制备的Cu(In,Ga)Se2薄膜性能研究[J].化学工程与装备,2010(4):14-16.
[16] LIM H K,BYUN S H,LEE J Y,et al. Radiological,histological,and hematological evaluation of hydroxyapatite-coated resorbable magnesium alloy screws placed in rabbit tibia[J].Journal of Biomedical Materials Research,2017,1105(6):1 636-1 644.
[17] BAI C Y,LI J W,TA W B,et al. In vivo Study on the Corrosion Behavior of Magnesium Alloy Surface Treated with Micro-Arc Oxidation and Hydrothermal Deposition[J]. Orthopaedic Surgery,2017,9(3):296-303.
[18]谢新明,李金龙,王永欣,等. Ti Si(CN)系列涂层的结构和性能研究进展[J].表面技术,2017(11):55-61.
[19]肖晓华,陈松,国听,等.陶瓷膜对牙轮钻头滑动轴承摩擦磨损性能的影响[J].金属热处理,2016(10):75-80.
[20] STASZUK M,PAKULA D,CHLADEK G,et al. Investigation of the structure and properties of PVD coatings and ALD+PVD hybrid coatings deposited on sialon tool ceramics[J].Vacuum,2018,154:272-284.
[21] LIU W,CAO F,ZHONG L,et al.Influence of rare earth element Ce and La addition on corrosion behavior of AZ91 magnesium alloy[J]. Materials&Corrosion,2009,60(10):795-803.
[22] DIAB M,PANG X,JAHED H. The Effect of Pure Aluminum Cold Spray Coating on Corrosion and Corrosion Fatigue of Magnesium(3%Al-1%Zn)Extrusion[J]. Surface and Coatings Technology,2017,309:423-425.
[23] WU W W,LI X Y,DONG H S,et al.Deposition and Microstructural Characterisation of GLC Coatings on AZ31 Magnesium Alloy[J]. Plasma Processes And Polymers,2009,6(S1):S473-S477.
[24] TAO Y,XIONG T,SUN C,et al. Effect ofα-Al2O3on the Properties of Cold Sprayed Al/α-Al2O3Composite Coatings on AZ91D Magnesium Alloy[J]. Applied Surface Science,2009,256(1):261-266.
[25] BASHIR M I,SHAFIQ M,NAEEM M,et al. Enhanced surface properties of aluminum by PVD-Ti N coating combined with cathodic cage plasma nitriding[J]. Surface and Coatings Technology,2017,327:59-65.
[26]王振林,杨惠,杨栋华.镁合金磁控溅射镀铝耐蚀防护层研究[J].中国机械工程,2008,19(8):993-997.
[27]韦春贝,代明江,高阳,等. AZ91D镁合金磁控溅射镀铝膜及其化学转化后的耐蚀性[J].电镀与涂饰,2012(4):30-33.
[28]沈钰,祝向荣. AZ31镁合金表面磁控溅射Al和Ti N的试验研究[J].轻合金加工技术,2014,42(8):56-61.
[29]黄佳木,罗先盛. AZ31镁合金表面磁控溅射Si N薄膜的性能研究[J].材料导报:纳米与新材料专辑,2008(3):384-386.
[30]王宁,王静,王传兴,等. AZ31B镁合金表面沉积类金刚石膜的研究[J].石油化工高等学校学报,2016,29(6):6-10.
[31]吴楠,赵红阳,郭媛媛,等. AZ31镁合金沉积类金刚石薄膜的表面形貌和腐蚀行为[J].中国表面工程,2014,27(1):81-86.
[32]冯世杰,梁伟,薛晋波. AZ91D镁合金表面真空蒸镀锌铝复合涂层的研究[J].稀有金属,2010,34(5):678-684.
[33]冯凯,李铸国,张超.镁合金表面Ni+C涂层的耐腐蚀与耐磨性能研究[J].表面技术,2017,46(3):28-33.
[34]王浩楠,李显争.纯钛表面钛钯合金层制备及耐蚀性能[J].材料热处理学报,2016,37(S1):130-135.
[35] XIONG Y,GAOG X,JIANG Y. Effect of initial texture on fatigue properties of extruded ZK60 magnesium alloy[J]. Fatigue&Fracture of Engineering Materials&Structures,2018,41(6):1 243-1 244.
[36]曹辉,郝仪,孙树臣,等.电子束表面改性对镁合金耐磨性的影响[J].轻金属,2011,43(6):45-49.
[37]吴杏,陈飞.汽车用AZ91D镁合金表面改性实验研究[J].电镀与环保,2017,37(3):6-8.
[38]李忠厚,马芹芹,杨迪,等.多弧离子镀Ti/Ti N膜的耐磨耐蚀性研究[J].热处理技术与装备,2014(4):20-23.
[39]孙永花,王波,王若云,等. AZ91D镁合金表面原位合成Ti O2陶瓷层及其性能的研究[J].真空科学与技术学报,2016,36(9):1 071-1 076.
[40]李忠厚,郭腾腾,宫学博,等.磁控溅射镀钛提高AZ31镁合金耐磨耐腐蚀性能的研究[J].表面技术,2015,43(6):121-124.
[41] MOMENI S,TILLMANN W,POHL M. Composite cavitation resistant PVD coatings based on Ni Ti thin films[J]. Materials&Design,2016,110:830-838.
[42] REZANKA S,MACK D E,MAUER G,et al.Investigation of the resistance of open-column-structured PS-PVD TBCs to erosive and high-temperature corrosive attack[J]. Surface and Coatings Technology,2017,324:222-235.
[43]袁佟,邓畅光,毛杰,等.等离子喷涂-物理气相沉积制备7YSZ热障涂层及其热导率研究[J].材料工程,2017,45(7):1-6.
[44]张而耕,朱州,张体波.超硬纳微米PVD涂层技术在刀具领域的应用及研究进展[J].表面技术,2015,44(4):89-96.
[45]刘立强,王晓临,李真一,等.太阳能高效利用减反射技术研究进展[J].山东建筑大学学报,2016,31(6):606-613.