平面绝对检测闭环自检实验研究
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摘要
基于Ai C和Wyant J C的奇偶函数法,提出了4步旋转绝对检测方法,减少了旋转次数,将第二次测量的旋转角度选为90°。实验基于HOOL L9600A-HS3干涉仪,采用4步旋转绝对检测方法,将3个平面两两互检计算出3个平面的绝对面形。其中平面C的表面面形起伏高度均方根(RMS)值和峰谷(PV)值分别为3. 460 nm和35. 227 nm,经闭环自检后的测量结果分别为3. 783 nm和34. 305 nm以及3. 669 nm和34. 252 nm,数据基本一致,表明测量数据能够实现闭环自检。使用该方法对中国计量科学研究院的标准平面镜进行测量,平面的RMS值和峰谷PV值分别为2. 400 nm和19. 600 nm,与该院的测量结果 2. 000 nm和16. 000 nm对比,两者的测量偏差在nm量级,充分证明了实验的有效性及高重复性;此外实验还分析了温度对测量结果的影响。
Based on the Ai C and Wyant J C method of odd and even functions,a four-step rotary absolute test method is proposed to reduce the number of rotations and select the rotation angle of the second measurement as 90°. Experiment is based on HOOL L9600 A-HS3 interferometer,using four-step rotation absolute measurement method,the three planes test with each other to calculate the absolute surface of the three planes,in which the plane C surface topography height root mean square( RMS) value and peak valley( PV) are 3. 460 nm and 35. 227 nm. After closed-loop self-test,measurement results are 3. 783 nm and 34. 305 nm,3. 669 nm and 34. 252 nm,it indicating that the measurement data can be closedloop self-test. Using this method,the plane of National Institute of Metrology in China is measured. The RMS value and and the PV value of the plane are 2. 400 nm and 19. 600 nm,respectively,which are compared with the measurement results of 2. 000 nm and 16. 000 nm of National Institute of Metrology. The measurement deviation is on the order of nm,the measurement results fully proves the effectiveness of the experiment and high repeatability. In addition,the experiment also analyzes the influence of temperature on the measurement results.
Based on the Ai C and Wyant J C method of odd and even functions,a four-step rotary absolute test method is proposed to reduce the number of rotations and select the rotation angle of the second measurement as 90°. Experiment is based on HOOL L9600 A-HS3 interferometer,using four-step rotation absolute measurement method,the three planes test with each other to calculate the absolute surface of the three planes,in which the plane C surface topography height root mean square( RMS) value and peak valley( PV) are 3. 460 nm and 35. 227 nm. After closed-loop self-test,measurement results are 3. 783 nm and 34. 305 nm,3. 669 nm and 34. 252 nm,it indicating that the measurement data can be closedloop self-test. Using this method,the plane of National Institute of Metrology in China is measured. The RMS value and and the PV value of the plane are 2. 400 nm and 19. 600 nm,respectively,which are compared with the measurement results of 2. 000 nm and 16. 000 nm of National Institute of Metrology. The measurement deviation is on the order of nm,the measurement results fully proves the effectiveness of the experiment and high repeatability. In addition,the experiment also analyzes the influence of temperature on the measurement results.
引文
[1]徐洋,唐锋,王向朝,等.平面面形绝对检验技术测量误差分析[J].中国激光,2011,1008009:21-26.Xu Y,Tang F,Wang X C,et al. Measurement error analysis of absolute flatness surface test[J]. Chinese Journal of Lasers,2011,1008009:21-26.
[2]孙文卿,陈磊,徐晨.两平晶方法平面绝对检验技术[J].东南大学学报(自然科学版),2010,40(z1):326-330.Sun W Q,Chen L,Xu C. Absolute measurement of planarity with two-flat test[J]. Journal of Southeast University(Natural Science Edition),2010,40(z1):326-330.
[3]张之江,于瀛洁,张善钟.高精度平面度测量方法的研究[J].计量学报,2000,21(2):119-124.Zhang Z J,Yu Y J,Zhang S Z. Study on the Method of High Accuracy Flatness Measurement[J]. Acta Metrologica Sinica,2000,21(2):119-124.
[4]张恒,黄杨,康岩辉.高精度激光平面干涉测量系统误差的研究分析方法[J].计量学报,2010,31(z1):124-127.Zhang H, Huang Y, Kang Y H. The Error Analysis Method for a Laser Plane Interferometer[J]. Acta Metrologica Sinica,2010,31(z1):124-127.
[5]苏东奇.光学面形绝对检测技术研究[D].北京:中国科学院大学,2013.
[6]朱郁葱,杨国光,董太和.标准光学面形的建立与绝对检测[J].计量学报,1989,10(4):285-289.Zhu Y C,Yang G G,Dong T H. Absolute Calibration and Fabrication of Standard Optical Surface[J]. Acta Metrologica Sinica,1989,10(4):285-289.
[7] Liu Xiao mei. Absolute measurement of optical flat[D].Nanjing:Nanjing University of Science&Technology,2004.
[8] Schulz G,Schwider J. Precise measurement of planeness[J]. Applied Optics,1967,6(6):1077-1084.
[9] Keenan P B. Pseudo-shear interferometry[C]//Proceedings of SPIE,1983,429:2-9.
[10] Fritz B S. Absolute calibration of an optical flat[J]. Opt Eng,1984,23(4):379-383.
[11] Ai C,Wyant J C. Absolute testing of flats decomposed to even and odd function[C]//Proceedings of SPIE,1992,1776:73-83.
[12] Klaus R. Freischlad. Absolute interferometric testing based on reconstruction of rotational shear[J]. Applied Optics,2001,40(10):1637-1648.
[13]孙佳媛,陈磊,徐晨.平晶平面度测量方法的研究[J].计量学报,2010,31(z1):204-207.Sun J Y, Chen L, Xu C. Study of Planeness Measurement of Optical Flat[J]. Acta Metrologica Sinica,2010,31(z1):204-207.
[14]郑显锋,田爱玲,刘丙才,等.三平面互检方法的研究[C]//2011西部光子学学术会议论文摘要集,西安,2011.
[15]田爱玲,郑显锋,刘丙才,等.三维面型的绝对测量[J].西安工业大学学报,2012,32(6):431-436.Tian A L,Zheng X F,Liu B C,et al. An absolute measurement of three-dimensional shape[J]. Journal of Xi'an Technology University,2012,32(6):431-436.
[16] Han S,Novak E. High accuracy absolute flatness testing using a commercial interferometer[C]//Proceedings of SPIE,2000,4231:277-282.
[17]贾辛,邢廷文,魏豪明,等.采用奇偶函数法的平面面形绝对测量技术仿真分析[J].红外与激光工程,2012,41(2):500-505.Jia X, Xing T W, Wei H M,et al. Analysis and simulation of absolute test of flats decomposed to even and odd functions[J]. Infrared and Laser Engineering,2012,41(2):500-505.
[18]李宇琛,韩森,吴泉英,等.基于奇偶函数法的绝对检测实验研究[J].应用光学,2017,38(3):469-475.Li Y C,Han S,Wu Q Y,et al. Absolute test of flats based on even or odd functions[J]. Journal of Applied Optics,2017,38(3):469-475.
[2]孙文卿,陈磊,徐晨.两平晶方法平面绝对检验技术[J].东南大学学报(自然科学版),2010,40(z1):326-330.Sun W Q,Chen L,Xu C. Absolute measurement of planarity with two-flat test[J]. Journal of Southeast University(Natural Science Edition),2010,40(z1):326-330.
[3]张之江,于瀛洁,张善钟.高精度平面度测量方法的研究[J].计量学报,2000,21(2):119-124.Zhang Z J,Yu Y J,Zhang S Z. Study on the Method of High Accuracy Flatness Measurement[J]. Acta Metrologica Sinica,2000,21(2):119-124.
[4]张恒,黄杨,康岩辉.高精度激光平面干涉测量系统误差的研究分析方法[J].计量学报,2010,31(z1):124-127.Zhang H, Huang Y, Kang Y H. The Error Analysis Method for a Laser Plane Interferometer[J]. Acta Metrologica Sinica,2010,31(z1):124-127.
[5]苏东奇.光学面形绝对检测技术研究[D].北京:中国科学院大学,2013.
[6]朱郁葱,杨国光,董太和.标准光学面形的建立与绝对检测[J].计量学报,1989,10(4):285-289.Zhu Y C,Yang G G,Dong T H. Absolute Calibration and Fabrication of Standard Optical Surface[J]. Acta Metrologica Sinica,1989,10(4):285-289.
[7] Liu Xiao mei. Absolute measurement of optical flat[D].Nanjing:Nanjing University of Science&Technology,2004.
[8] Schulz G,Schwider J. Precise measurement of planeness[J]. Applied Optics,1967,6(6):1077-1084.
[9] Keenan P B. Pseudo-shear interferometry[C]//Proceedings of SPIE,1983,429:2-9.
[10] Fritz B S. Absolute calibration of an optical flat[J]. Opt Eng,1984,23(4):379-383.
[11] Ai C,Wyant J C. Absolute testing of flats decomposed to even and odd function[C]//Proceedings of SPIE,1992,1776:73-83.
[12] Klaus R. Freischlad. Absolute interferometric testing based on reconstruction of rotational shear[J]. Applied Optics,2001,40(10):1637-1648.
[13]孙佳媛,陈磊,徐晨.平晶平面度测量方法的研究[J].计量学报,2010,31(z1):204-207.Sun J Y, Chen L, Xu C. Study of Planeness Measurement of Optical Flat[J]. Acta Metrologica Sinica,2010,31(z1):204-207.
[14]郑显锋,田爱玲,刘丙才,等.三平面互检方法的研究[C]//2011西部光子学学术会议论文摘要集,西安,2011.
[15]田爱玲,郑显锋,刘丙才,等.三维面型的绝对测量[J].西安工业大学学报,2012,32(6):431-436.Tian A L,Zheng X F,Liu B C,et al. An absolute measurement of three-dimensional shape[J]. Journal of Xi'an Technology University,2012,32(6):431-436.
[16] Han S,Novak E. High accuracy absolute flatness testing using a commercial interferometer[C]//Proceedings of SPIE,2000,4231:277-282.
[17]贾辛,邢廷文,魏豪明,等.采用奇偶函数法的平面面形绝对测量技术仿真分析[J].红外与激光工程,2012,41(2):500-505.Jia X, Xing T W, Wei H M,et al. Analysis and simulation of absolute test of flats decomposed to even and odd functions[J]. Infrared and Laser Engineering,2012,41(2):500-505.
[18]李宇琛,韩森,吴泉英,等.基于奇偶函数法的绝对检测实验研究[J].应用光学,2017,38(3):469-475.Li Y C,Han S,Wu Q Y,et al. Absolute test of flats based on even or odd functions[J]. Journal of Applied Optics,2017,38(3):469-475.