表面杂质和节瘤缺陷诱导薄膜元件热熔融损伤
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摘要
在高功率激光系统中,光学薄膜元件表面杂质和体内节瘤缺陷是导致薄膜元件损伤的关键因素。通过建立强激光连续辐照下光学薄膜元件的热分析模型,分析在不同激光辐照时间和功率密度下,表面杂质和节瘤缺陷对光学薄膜元件损伤的影响及其规律。结果表明,在强激光连续辐照下,当表面杂质粒子尺寸处于一定范围内时,随着杂质粒子尺寸的增大,薄膜元件上的最高温度随之升高,且大而浅的节瘤缺陷种子对膜层的温升影响较大。随着激光功率密度的提高和激光辐照时间的增长,表面杂质造成薄膜元件热熔融损伤的粒子尺寸范围越大,节瘤缺陷造成薄膜元件热熔融损伤的种子深度和尺寸范围也越大。
In the high power laser system, surface impurities and nodule defects are the key factors causing laser-induced damage of thin film components. The influences and variations of surface impurities and nodule defects on the laser-induced damage of thin film components for different irradiation time and power density were analyzed by establishing the thermal analysis model of thin film components irradiated by continuous high power lasers. The results indicate that, when the surface impurities are irradiated by continuous high power lasers, and their size localizes within a certain range,the maximum temperature of the film components increases with the increasing of impurity size, and the large and shallow nodule defect seeds have a more obvious influence on the temperature rise of the film.With the increasing of the power density and the irradiation time, the range of the impurity size in which the surface impurities cause the thermal melting damage of the thin film components increases.Simultaneously, the range of the seed depth and size of the nodule defects causing the thermal melting damage of the thin film components is broaden.
In the high power laser system, surface impurities and nodule defects are the key factors causing laser-induced damage of thin film components. The influences and variations of surface impurities and nodule defects on the laser-induced damage of thin film components for different irradiation time and power density were analyzed by establishing the thermal analysis model of thin film components irradiated by continuous high power lasers. The results indicate that, when the surface impurities are irradiated by continuous high power lasers, and their size localizes within a certain range,the maximum temperature of the film components increases with the increasing of impurity size, and the large and shallow nodule defect seeds have a more obvious influence on the temperature rise of the film.With the increasing of the power density and the irradiation time, the range of the impurity size in which the surface impurities cause the thermal melting damage of the thin film components increases.Simultaneously, the range of the seed depth and size of the nodule defects causing the thermal melting damage of the thin film components is broaden.
引文
[1] Liu Zhichao, Zheng Yi, Pan Feng, et al. Effect of 1 064 nm laser conditioning on damage morphology change process on HfO2/SiO2reflective film[J]. Infrared and Laser Engineering, 2017, 46(6):0606003.(in Chinese)刘志超,郑轶,潘峰,等. 1 064 nm激光预处理对HfO2/SiO2反射膜损伤形态转化影响研究[J].红外与激光工程, 2017,46(6):0606003.
[2] Zhao Yuan′an, Hu Guohang, Liu Xiaofeng, et al. Laser conditioning technology and its applications[J]. Optics and Precision Engineering, 2016, 24(12):2938-2947.(in Chinese)赵元安,胡国行,刘晓凤,等.激光预处理技术及其应用[J].光学精密工程, 2016, 24(12):2938-2947.
[3] Tuniyazi Abudusalamu, Cheng Xinbin, Bao Ganghua, et al.Laser induced damage characteristics of nodules in thin-film polarizers[J]. Infrared and Laser Engineering, 2015, 44(8):2461-2466.(in Chinese)阿卜杜萨拉木·图尼亚孜,程鑫彬,鲍刚华,等.偏振分光膜中节瘤的激光损伤特性[J].红外与激光工程, 2015, 44(8):2461-2466.
[4] Miao Xinxiang. Metal pollution-induced mechanism of fused silica surface damage[D]. Mianyang:China Academy of Engineering Physics, 2009:40-50.(in Chinese)苗心向.金属污染诱导熔石英表面损伤机理研究[D].绵阳:中国工程物理研究院, 2009:40-50.
[5] Zhang Cuijuan, Fu Bo, Zhang Dayong, et al. Damage mechanisms of multiplayer films filters under continuous laser irradiation[J]. Applied Laser, 2009(5):431-434.(in Chinese)张翠娟,付博,张大勇,等.连续激光作用下滤光片熔坑形成机理研究[J].应用激光, 2009(5):431-434.
[6] Martin P, Morono A, Hodgson E R, et al. Laser induced damage enhancement due to stainless steel deposition on KS-4V and KU1 quart glasses[J]. Journal of Nuclear Materials,2004, 8(329-333):1442-1445.
[7] Sparks M, Duthler C J. Theory of infrared absorption and material failure in crystal containing inclusion[J]. Journal of Applied Physics, 1973, 44(7):3038-3045.
[8] Wang Libin, Ma Weixin, Ji Lailin, et al. Influence of metal particles on damage threshold of fused silica at 3[J]. Chinese Journal of Lasers, 2012, 39(5):22-26.(in Chinese)王立斌,马伟新,季来林,等.三倍频激光下金属颗粒对熔石英元件损伤阈值的影响[J].中国激光, 2012, 39(5):22-26.
[9] Zhang Yaoping, Xu Hong, Ling Ning, et al. Study on the surface defect density of infrared laser thin film[J]. Applied Laser, 2005, 25(3):165-168.(in Chinese)张耀平,许鸿,凌宁,等.红外激光薄膜表面缺陷研究[J].应用激光, 2005, 25(3):165-168.
[10] Xu Jiao, Chen Lixia, You Xinghai et al. Thermal stress damage of thin film components caused by surface impurities[J]. Acta Optica Sinica, 2017, 37(6):0614003.(in Chinese)徐娇,陈丽霞,游兴海,等.表面杂质诱导薄膜元件的热应力损伤[J].光学学报, 2017, 37(6):0614003.
[11] Cao Dingxiang. Study on thermal effects and thermal management in high power solid laser[D]. Changsha:National University of Defense Technology, 2008.(in Chinese)曹丁象.高功率固体激光系统的热效应及热管理研究[D].长沙:国防科学技术大学, 2008.
[12] Li Qin, Liu Haidong, Zhu Minbo. Application of thermal simulation in the structural design of electronic system[J].Electronics Process Technology, 2006(3):165-167, 181.(in Chinese)李琴,刘海东,朱敏波.热仿真在电子设备结构设计中的应用[J].电子工艺技术, 2006(3):165-167, 181.
[13] Hu Peng, Chen Faliang. Inclusion damage mechanisms of optical glass under laser irradiation[J]. High Power Laser and Particle Beams, 2005, 17(7):961-965.(in Chinese)胡鹏,陈发良.激光辐照下杂质诱导光学玻璃损伤的两种机理[J].强激光与粒子束, 2005, 17(7):961-965.
[14] Shan Y, He H, Wei C, et al. Thermomechanical analysis of nodule damage in HfO2/SiO2multilayer coatings[J]. Chinese Optics Letters, 2011, 9(10):103101-103104.
[15] Dijon J, Poulingue M, Hue J. Thermomechanical model of mirror laser damage at 1.06μm:I. Nodule ejection[C]//Laser-Induced Damage in Optical Materials, International Society for Optics and Photonics, 1999:387-397.
[16] Fan Zhengxiu, Shao Jianda, Yi Kui, et al. Optical Coating and Application[M]. Shanghai:Shanghai Jiao Tong University Press, 2014:509-510.(in Chinese)范正修,邵建达,易葵,等.光学薄膜及其应用[M].上海:上海交通大学出版社, 2014:509-510.
[17] Liu Guangtong. Atmospheric dust fall source analysis in hohhot[D]. Hohhot:Inner Mongolia Normal University,2008.(in Chinese)刘广通.呼和浩特市大气降尘及源分析[D].呼和浩特:内蒙古师范大学, 2008.
[18] Ma Hongping, Cheng Xinbin, Zhang Jinlong, et al. Damage growth characteristics of artificial nodules prepared by different processes[J]. Infrared and Laser Engineering,2017, 46(5):0521001.(in Chinese)马宏平,程鑫彬,张锦龙,等.不同工艺制备的人工节瘤的损伤生长特性[J].红外与激光工程, 2017, 46(5):0521001.
[19] Liu Hongbing, Tao Jie, Zhang Pingze, et al. Simulation of residual stress in functionally gradient Al2O3coatings[J].Chinese Journal of Mechanical Engineering, 2008, 44(8):26-32.(in Chinese)刘红兵,陶杰,张平则,等.功能梯度Al2O3涂层残余热应力分析[J].机械工程学报, 2008, 44(8):26-32.
[20] Lin Dawei. Research on extreme low loss mid-infrared reflect film[D]. Chengdu:Insititute of Optics and Electronics, Chinese Academy of Sciences, 2008.(in Chinese)林大伟.低损耗中红外薄膜的研究[J].成都:中国科学院光电技术研究所, 2008.
[21] Wei Chaoyang, He Hongbo, Shao Jianda, et al.Thermodynamics damage of optical coatings induced by absorbing inclusion thermal irradiation[J]. Acta Optica Sinica, 2008, 28(4):809-812.(in Chinese)魏朝阳,贺洪波,邵建达,等.吸收杂质热辐射诱导光学薄膜破坏的热力机制[J].光学学报, 2008, 28(4):809-812.
[22] Qiao Yanxin, Zhou Yang, Chen Shujin, et al. Effect of bobbin tool friction stir welding on microstructure and corrosion behavior of 6061-T6 aluminum alloy joint in 3.5%NaCl solution[J]. Acta Metallurgica Sinica, 2016, 52(11):1395-1402.(in Chinese)乔岩欣,周洋,陈书锦,等.双轴肩搅拌摩擦焊对6061-T6铝合表面组织及其在3.5%NaCl中腐蚀行为的影响[J].金属学报, 2016, 52(11):1395-1402.
[23] Huang Wei. Study on thin films technology for mid-farinfrared laser coatings[D]. Chengdu:Sichuan University,2005.黄伟.中远红外激光薄膜技术研究[D].成都:四川大学,2005.
[24] Ma Jing, Zhu Funan, Zhou Yanping, et al. Detection device of optical surface pollution for satellite and ground[J].Optical and Precision Engineering, 2016, 24(8):1878-1883.(in Chinese)马晶,朱福南,周彦平,等.星地两用光学表面污染检测装置[J].光学精密工程, 2016, 24(8):1878-1883.
[25] Sun Xiaoyan, Lei Zemin, Lu Xingqiang, et al. Mechanism of original damage of thin optical components induced by surface particle contamination[J]. Acta Physica Sinica, 2014,63(13):136-144.(in Chinese)孙晓艳,雷泽民,卢兴强,等.表面颗粒污染物诱导薄光学元件初始损伤的机理[J].物理学报, 2014, 63(13):136-144.
[26] Wang Libin. Research on the influence of metal particles on damage threshold of fused silica at 3[D]. Mianyang:China Academy of Engineering Physics, 2012.(in Chinese)王立斌.三倍频激光下金属颗粒对熔石英元件损伤阈值影响的研究[D].绵阳:中国工程物理研究院, 2012.
[27] Ling X, Shao J, Fan Z, et al. Thermal-mechanical modeling of nodular defect embedded within multilayer coatings[J].Journal of Vacuum Science and Technology, 2009, 27(2):183-186.
[28] Wang Ying, Zhang Yueguang, Liu Xu, et al. Analysis of laser intensification by nodular defects in mid-infrared high reflectance coatings[J]. Acta Physica Sinica, 2007, 56(11):6588-6591.(in Chinese)王颖,章岳光,刘旭,等.节瘤缺陷对中红外高反射膜电场增强影响的数值分析[J].物理学报, 2007, 56(11):6588-6591.
[29] Ye Jingfeng. Experimental investigation in laser induced damage to diamond-like carbon film[D]. Changsha:National University of Defense Technology, 2004.(in Chinese)叶景峰.类金刚石薄膜抗激光辐照性能实验研究[D].长沙:国防科学技术大学, 2004.
[2] Zhao Yuan′an, Hu Guohang, Liu Xiaofeng, et al. Laser conditioning technology and its applications[J]. Optics and Precision Engineering, 2016, 24(12):2938-2947.(in Chinese)赵元安,胡国行,刘晓凤,等.激光预处理技术及其应用[J].光学精密工程, 2016, 24(12):2938-2947.
[3] Tuniyazi Abudusalamu, Cheng Xinbin, Bao Ganghua, et al.Laser induced damage characteristics of nodules in thin-film polarizers[J]. Infrared and Laser Engineering, 2015, 44(8):2461-2466.(in Chinese)阿卜杜萨拉木·图尼亚孜,程鑫彬,鲍刚华,等.偏振分光膜中节瘤的激光损伤特性[J].红外与激光工程, 2015, 44(8):2461-2466.
[4] Miao Xinxiang. Metal pollution-induced mechanism of fused silica surface damage[D]. Mianyang:China Academy of Engineering Physics, 2009:40-50.(in Chinese)苗心向.金属污染诱导熔石英表面损伤机理研究[D].绵阳:中国工程物理研究院, 2009:40-50.
[5] Zhang Cuijuan, Fu Bo, Zhang Dayong, et al. Damage mechanisms of multiplayer films filters under continuous laser irradiation[J]. Applied Laser, 2009(5):431-434.(in Chinese)张翠娟,付博,张大勇,等.连续激光作用下滤光片熔坑形成机理研究[J].应用激光, 2009(5):431-434.
[6] Martin P, Morono A, Hodgson E R, et al. Laser induced damage enhancement due to stainless steel deposition on KS-4V and KU1 quart glasses[J]. Journal of Nuclear Materials,2004, 8(329-333):1442-1445.
[7] Sparks M, Duthler C J. Theory of infrared absorption and material failure in crystal containing inclusion[J]. Journal of Applied Physics, 1973, 44(7):3038-3045.
[8] Wang Libin, Ma Weixin, Ji Lailin, et al. Influence of metal particles on damage threshold of fused silica at 3[J]. Chinese Journal of Lasers, 2012, 39(5):22-26.(in Chinese)王立斌,马伟新,季来林,等.三倍频激光下金属颗粒对熔石英元件损伤阈值的影响[J].中国激光, 2012, 39(5):22-26.
[9] Zhang Yaoping, Xu Hong, Ling Ning, et al. Study on the surface defect density of infrared laser thin film[J]. Applied Laser, 2005, 25(3):165-168.(in Chinese)张耀平,许鸿,凌宁,等.红外激光薄膜表面缺陷研究[J].应用激光, 2005, 25(3):165-168.
[10] Xu Jiao, Chen Lixia, You Xinghai et al. Thermal stress damage of thin film components caused by surface impurities[J]. Acta Optica Sinica, 2017, 37(6):0614003.(in Chinese)徐娇,陈丽霞,游兴海,等.表面杂质诱导薄膜元件的热应力损伤[J].光学学报, 2017, 37(6):0614003.
[11] Cao Dingxiang. Study on thermal effects and thermal management in high power solid laser[D]. Changsha:National University of Defense Technology, 2008.(in Chinese)曹丁象.高功率固体激光系统的热效应及热管理研究[D].长沙:国防科学技术大学, 2008.
[12] Li Qin, Liu Haidong, Zhu Minbo. Application of thermal simulation in the structural design of electronic system[J].Electronics Process Technology, 2006(3):165-167, 181.(in Chinese)李琴,刘海东,朱敏波.热仿真在电子设备结构设计中的应用[J].电子工艺技术, 2006(3):165-167, 181.
[13] Hu Peng, Chen Faliang. Inclusion damage mechanisms of optical glass under laser irradiation[J]. High Power Laser and Particle Beams, 2005, 17(7):961-965.(in Chinese)胡鹏,陈发良.激光辐照下杂质诱导光学玻璃损伤的两种机理[J].强激光与粒子束, 2005, 17(7):961-965.
[14] Shan Y, He H, Wei C, et al. Thermomechanical analysis of nodule damage in HfO2/SiO2multilayer coatings[J]. Chinese Optics Letters, 2011, 9(10):103101-103104.
[15] Dijon J, Poulingue M, Hue J. Thermomechanical model of mirror laser damage at 1.06μm:I. Nodule ejection[C]//Laser-Induced Damage in Optical Materials, International Society for Optics and Photonics, 1999:387-397.
[16] Fan Zhengxiu, Shao Jianda, Yi Kui, et al. Optical Coating and Application[M]. Shanghai:Shanghai Jiao Tong University Press, 2014:509-510.(in Chinese)范正修,邵建达,易葵,等.光学薄膜及其应用[M].上海:上海交通大学出版社, 2014:509-510.
[17] Liu Guangtong. Atmospheric dust fall source analysis in hohhot[D]. Hohhot:Inner Mongolia Normal University,2008.(in Chinese)刘广通.呼和浩特市大气降尘及源分析[D].呼和浩特:内蒙古师范大学, 2008.
[18] Ma Hongping, Cheng Xinbin, Zhang Jinlong, et al. Damage growth characteristics of artificial nodules prepared by different processes[J]. Infrared and Laser Engineering,2017, 46(5):0521001.(in Chinese)马宏平,程鑫彬,张锦龙,等.不同工艺制备的人工节瘤的损伤生长特性[J].红外与激光工程, 2017, 46(5):0521001.
[19] Liu Hongbing, Tao Jie, Zhang Pingze, et al. Simulation of residual stress in functionally gradient Al2O3coatings[J].Chinese Journal of Mechanical Engineering, 2008, 44(8):26-32.(in Chinese)刘红兵,陶杰,张平则,等.功能梯度Al2O3涂层残余热应力分析[J].机械工程学报, 2008, 44(8):26-32.
[20] Lin Dawei. Research on extreme low loss mid-infrared reflect film[D]. Chengdu:Insititute of Optics and Electronics, Chinese Academy of Sciences, 2008.(in Chinese)林大伟.低损耗中红外薄膜的研究[J].成都:中国科学院光电技术研究所, 2008.
[21] Wei Chaoyang, He Hongbo, Shao Jianda, et al.Thermodynamics damage of optical coatings induced by absorbing inclusion thermal irradiation[J]. Acta Optica Sinica, 2008, 28(4):809-812.(in Chinese)魏朝阳,贺洪波,邵建达,等.吸收杂质热辐射诱导光学薄膜破坏的热力机制[J].光学学报, 2008, 28(4):809-812.
[22] Qiao Yanxin, Zhou Yang, Chen Shujin, et al. Effect of bobbin tool friction stir welding on microstructure and corrosion behavior of 6061-T6 aluminum alloy joint in 3.5%NaCl solution[J]. Acta Metallurgica Sinica, 2016, 52(11):1395-1402.(in Chinese)乔岩欣,周洋,陈书锦,等.双轴肩搅拌摩擦焊对6061-T6铝合表面组织及其在3.5%NaCl中腐蚀行为的影响[J].金属学报, 2016, 52(11):1395-1402.
[23] Huang Wei. Study on thin films technology for mid-farinfrared laser coatings[D]. Chengdu:Sichuan University,2005.黄伟.中远红外激光薄膜技术研究[D].成都:四川大学,2005.
[24] Ma Jing, Zhu Funan, Zhou Yanping, et al. Detection device of optical surface pollution for satellite and ground[J].Optical and Precision Engineering, 2016, 24(8):1878-1883.(in Chinese)马晶,朱福南,周彦平,等.星地两用光学表面污染检测装置[J].光学精密工程, 2016, 24(8):1878-1883.
[25] Sun Xiaoyan, Lei Zemin, Lu Xingqiang, et al. Mechanism of original damage of thin optical components induced by surface particle contamination[J]. Acta Physica Sinica, 2014,63(13):136-144.(in Chinese)孙晓艳,雷泽民,卢兴强,等.表面颗粒污染物诱导薄光学元件初始损伤的机理[J].物理学报, 2014, 63(13):136-144.
[26] Wang Libin. Research on the influence of metal particles on damage threshold of fused silica at 3[D]. Mianyang:China Academy of Engineering Physics, 2012.(in Chinese)王立斌.三倍频激光下金属颗粒对熔石英元件损伤阈值影响的研究[D].绵阳:中国工程物理研究院, 2012.
[27] Ling X, Shao J, Fan Z, et al. Thermal-mechanical modeling of nodular defect embedded within multilayer coatings[J].Journal of Vacuum Science and Technology, 2009, 27(2):183-186.
[28] Wang Ying, Zhang Yueguang, Liu Xu, et al. Analysis of laser intensification by nodular defects in mid-infrared high reflectance coatings[J]. Acta Physica Sinica, 2007, 56(11):6588-6591.(in Chinese)王颖,章岳光,刘旭,等.节瘤缺陷对中红外高反射膜电场增强影响的数值分析[J].物理学报, 2007, 56(11):6588-6591.
[29] Ye Jingfeng. Experimental investigation in laser induced damage to diamond-like carbon film[D]. Changsha:National University of Defense Technology, 2004.(in Chinese)叶景峰.类金刚石薄膜抗激光辐照性能实验研究[D].长沙:国防科学技术大学, 2004.