电容式微波功率传感器的MEMS悬臂梁力学模型
|
摘要
建立了MEMS悬臂梁的静态、动态力学解析模型。采用遍历搜索和龙格库塔算法,分析了在静电力作用下MEMS悬臂梁的运动规律。考虑到MEMS悬臂梁的引入对检测系统匹配特性的影响,在建立的力学模型的基础上研究了系统匹配特性的解析模型,得到MEMS梁与下拉极板的间距改变对系统匹配特性的影响。在8～12 GHz范围内,在8、9、10、11、12 GHz处的回波损耗仿真结果分别为-22.044 6、-21.141 5、-20.281 7、-19.562 0、-19.155 6 dB,而回波损耗测试结果分别为-22.044 6、-20.931 0、-19.948 2、-19.072 2、-18.285 2 dB。实验结果表明,通过建立的力学解析模型、匹配特性模型仿真得到的回波损耗仿真结果与测试结果较吻合,这对改善电容式微波功率检测系统的综合性能具有一定的指导意义。
The static and dynamic mechanical analytical models of MEMS cantilever beams were established in turn. The traversing search and Runge-Kutta algorithm were used to analyze the motion law of MEMS cantilever beam under electrostatic force. Secondly, considering the influence of MEMS beam, the analytical model of the matching characteristics of the system was studied on the basis of the established mechanical model. Finally, the influence of change in the spacing between the MEMS beam and the pull-down plate on the matching characteristics was analyzed. The experimental results showed that in 8, 9, 10, 11 and 12 GHz, the return loss of simulation results obtained by established models were-22.044 6,-21.141 5,-20.281 7,-19.562 0,-19.155 6 dB respectively. The return loss of experimental results were-22.044 6,-20.931 0,-19.948 2,-19.072 2,-18.285 2 dB respectively. The results obtained by the simulation of established model were in good agreement with the tested results, which had a guidance for improving the comprehensive performance of the capacitive microwave power detection system.
The static and dynamic mechanical analytical models of MEMS cantilever beams were established in turn. The traversing search and Runge-Kutta algorithm were used to analyze the motion law of MEMS cantilever beam under electrostatic force. Secondly, considering the influence of MEMS beam, the analytical model of the matching characteristics of the system was studied on the basis of the established mechanical model. Finally, the influence of change in the spacing between the MEMS beam and the pull-down plate on the matching characteristics was analyzed. The experimental results showed that in 8, 9, 10, 11 and 12 GHz, the return loss of simulation results obtained by established models were-22.044 6,-21.141 5,-20.281 7,-19.562 0,-19.155 6 dB respectively. The return loss of experimental results were-22.044 6,-20.931 0,-19.948 2,-19.072 2,-18.285 2 dB respectively. The results obtained by the simulation of established model were in good agreement with the tested results, which had a guidance for improving the comprehensive performance of the capacitive microwave power detection system.
引文
[1] 罗元,万沙浪,甘如饴,等.一种基于MEMS的新型镂空压电悬臂梁能量采集器 [J].微电子学,2016,46(3):419-423,428.
[2] 谢勇,来强涛,陈华,等.MEMS谐振器中高增益跨阻放大器设计 [J].微电子学与计算机,2016,33(3):46-49.
[3] FERNANDEZ L J,WIEGERINK R J,FLOKSTRA J,et al.A capacitive RF power sensor based on MEMS technology [J].J Micromech & Microengineer,2006,16(7):1099-1107.
[4] HAN L,HΜANG Q A,LIAO X P.A micromachined inline-type wideband microwave power sensor based on GaAs MMIC technology [J].J Microelectromech Syst,2009,3(18):705-713.
[5] YI Z X,LIAO X P,HAN L,et al.An integrated microwave power and frequency sensor for 1-10 GHz application [J].IEEE Sensors J,2015,15(10):5465-5471.
[6] YI Z X,YAN H,LIAO X P.Modeling of differential power sensor based on seesaw structure for microwave communication application [J].IEEE Trans Elec Dev,2017,64(11):4664-4670.
[7] YI Z X,LIAO X P.Experiment of the MEMS wind sensor based on temperature-balanced mode [J].IEEE Sensors J,2017,17(8):2316-2317.
[8] CHU C L,LIAO X P,CHEN C.Improved dynamic range of microwave power sensor by MEMS cantilever beam [J].J Microelectromech Syst,2017,26(6):1183-1185.
[9] WANG D B,LIAO X P.A terminating-type MEMS microwave power sensor and its amplification system [J].J Micromech & Microengineer,2010,20(7):075021-1 - 075021-8.
[10] 茅惠兵,忻佩胜,胡梅丽,等.微机电微波/射频开关的力学分析及其工艺研究 [J].微电子学,2003,33(4):273-275.
[11] 王云瑞,伍萍辉,曾成.基于MEMS传感器的双轨迹融合导航系统 [J].微电子学与计算机,2018,35(5):116-119.
[12] 张焕卿,白雪婧,王德波.热电式MEMS微波功率传感器模型的研究 [J].仪器仪表学报,2018,39(1):110-117.
[13] 张洗玉,王旭,陈国庆.基于塞贝克效应的热电转换仪器的研制 [J].仪表技术与传感器,2018(4):32-35.
[14] 黄从朝,黄庆安,廖小平.一种新型MEMS微波功率传感器的理论模型与优化设计 [J].传感技术学报,2006,19(5):1938-1950.
[15] WANG D B,GAO B,ZHAO J,et al.Optimization of thermoelectric microwave power sensors based on thin-membrane structure [J].Chin J Elec,2015,24(4):884-888.
[2] 谢勇,来强涛,陈华,等.MEMS谐振器中高增益跨阻放大器设计 [J].微电子学与计算机,2016,33(3):46-49.
[3] FERNANDEZ L J,WIEGERINK R J,FLOKSTRA J,et al.A capacitive RF power sensor based on MEMS technology [J].J Micromech & Microengineer,2006,16(7):1099-1107.
[4] HAN L,HΜANG Q A,LIAO X P.A micromachined inline-type wideband microwave power sensor based on GaAs MMIC technology [J].J Microelectromech Syst,2009,3(18):705-713.
[5] YI Z X,LIAO X P,HAN L,et al.An integrated microwave power and frequency sensor for 1-10 GHz application [J].IEEE Sensors J,2015,15(10):5465-5471.
[6] YI Z X,YAN H,LIAO X P.Modeling of differential power sensor based on seesaw structure for microwave communication application [J].IEEE Trans Elec Dev,2017,64(11):4664-4670.
[7] YI Z X,LIAO X P.Experiment of the MEMS wind sensor based on temperature-balanced mode [J].IEEE Sensors J,2017,17(8):2316-2317.
[8] CHU C L,LIAO X P,CHEN C.Improved dynamic range of microwave power sensor by MEMS cantilever beam [J].J Microelectromech Syst,2017,26(6):1183-1185.
[9] WANG D B,LIAO X P.A terminating-type MEMS microwave power sensor and its amplification system [J].J Micromech & Microengineer,2010,20(7):075021-1 - 075021-8.
[10] 茅惠兵,忻佩胜,胡梅丽,等.微机电微波/射频开关的力学分析及其工艺研究 [J].微电子学,2003,33(4):273-275.
[11] 王云瑞,伍萍辉,曾成.基于MEMS传感器的双轨迹融合导航系统 [J].微电子学与计算机,2018,35(5):116-119.
[12] 张焕卿,白雪婧,王德波.热电式MEMS微波功率传感器模型的研究 [J].仪器仪表学报,2018,39(1):110-117.
[13] 张洗玉,王旭,陈国庆.基于塞贝克效应的热电转换仪器的研制 [J].仪表技术与传感器,2018(4):32-35.
[14] 黄从朝,黄庆安,廖小平.一种新型MEMS微波功率传感器的理论模型与优化设计 [J].传感技术学报,2006,19(5):1938-1950.
[15] WANG D B,GAO B,ZHAO J,et al.Optimization of thermoelectric microwave power sensors based on thin-membrane structure [J].Chin J Elec,2015,24(4):884-888.