高功率激光系统硅橡胶材料放气特性研究
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摘要
研究了高功率激光系统主要非金属材料硅橡胶的放气特性,采用静态定容升压法测量了硅橡胶和80℃4 h热真空预处理后硅橡胶的放气率,利用四极质谱计检测和定性分析了热真空预处理前、后硅橡胶放出气体的成分;结果表明,热真空预处理前、后硅橡胶的放气率分别为2.69×10~(-7)和6.47×10~(-8)Pam~3/s·cm~2,在真空环境下均释放了可凝挥发物;研究表明,80℃4h热真空预处理后硅橡胶的放气率和可凝挥发物释放量降低至未经热真空预处理的硅橡胶的1/4,且放气率低于1×10~(-7)Pam~3/s·cm~2,适合作为高功率激光系统的非金属材料。本文还讨论了降低高功率激光系统硅橡胶放气率和可凝挥发物释放量的方法。
We experimentally addressed the outgassing properties of the silicone rubber,an important non-metallic materialin high-power laser system and a major contamination source of the optics. The influence of the baking conditions,such as the pressure,baking temperature and time,on the outgassing rate and outgassing compositions was investigated in constant volume method and with quadrupole mass spectrometer. The results show that the baking at 80℃ for 4h easily decreased the outgassing rate of silicone rubber from 2. 69 × 10~(-7)down to 6. 47 × 10~(-8)Pam~3/ s·cm~2,and reduced the release of condensable volatile matter from silicone rubber by 75%. Baked at 80℃for 4 h,the silicone rubber has an outgassing rate lower than 1 × 10~(-7)Pam~3/ s·cm~2. We suggest that the silicon rubber baked under the optimized conditions may be a good material for fabrication of the high power laser system.
We experimentally addressed the outgassing properties of the silicone rubber,an important non-metallic materialin high-power laser system and a major contamination source of the optics. The influence of the baking conditions,such as the pressure,baking temperature and time,on the outgassing rate and outgassing compositions was investigated in constant volume method and with quadrupole mass spectrometer. The results show that the baking at 80℃ for 4h easily decreased the outgassing rate of silicone rubber from 2. 69 × 10~(-7)down to 6. 47 × 10~(-8)Pam~3/ s·cm~2,and reduced the release of condensable volatile matter from silicone rubber by 75%. Baked at 80℃for 4 h,the silicone rubber has an outgassing rate lower than 1 × 10~(-7)Pam~3/ s·cm~2. We suggest that the silicon rubber baked under the optimized conditions may be a good material for fabrication of the high power laser system.
引文
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[2]Wegner P,Aunerbach J,Biesiada T,et al.NIF Final Optics System:Frequency Conversion and Beam Codition[C].Proc of SPIE,2006,5341:180-189
[3]程晓峰,王洪彬,苗心向,等.高功率固体激光驱动器污染控制及片状放大器洁净度改进[J].强激光与粒子束,2013,25(5):227-231
[4]程晓峰,苗心向,陈远斌,等.神光-Ⅲ主机激光装置片状放大器洁净控制进展[J].强激光与粒子束,2012,24(1):1-3
[5]Pryatel J A,Gourdin W H,Hampton G J,et al.Qualification of Materials for Applicatios in High Fluence Lasers[C].Proc of SPIE,2006,6403:5-10
[6]董猛,冯焱,成永军,等.材料在真空环境下放气的测试技术研究[J].真空与低温,2014,20(1):31-35
[7]张涤新,曾祥坡,冯焱,等.材料放气率测量方法评述[J].真空,2010,47(6):1-6
[8]成永军,李得天,张涤新,等.基于双通道方法对不锈钢高温出气性能的研究[J].真空科学与技术学报,2011,31(3):368-371
[9]成永军,李得天,张涤新,等.极高真空校准室内残余气体的成分分析[J].真空科学与技术学报,2010,30(1):54-59