摘要
基于分段连续仿真的方法,以计算得到的电爆炸时金属气体压力作为输入,将桥区的电爆炸等效成压缩气体对外膨胀做功,对一种微机电技术制造的由聚酰亚胺覆盖的平面高压开关的导通过程进行了仿真研究。仿真结果表明:高压电极出现电流的滞后时间是由触发极桥区电爆炸过程决定的,高压电极是由电爆炸金属气体膨胀直接连通的。最后制造了开关样品,测试得到的电路波形与仿真符合地很好。
Based on piecewise constant simulation, a research on the conduction characteristics of planar discharge switch(PDS) covered by polyimide, which was manufactured by micro electric mechanical techniques was carried out, via taking the metal vapor pressure calculated in electric exploding as input, and the electric exploding of the bridge area is considered as doing work by compressed gas expanding. The simulation showed that the lagging time of current in high voltage electrodes is determined by the exploding progress of triggers, the exploding metal gas expands and conducts the high voltage poles directly. At last, a PDS sample is fabricated and the tested circuit waveform coincides with the simulator very well.
引文
[1]Richardson D D,Northeast E D,Ryan P F X.An exploding foil flying plate generator[R].MRL-R-1133,1988.
[2]Wang G J,Deng X Y,Tan F L,et al.Velocity measurement of the small size flyer of exploding foil initiator[J].Explosion and Shock Waves,2008,28(1):28-32.
[3]王桂吉,赵剑衡,唐小松,等.平面一维应变电炮加载技术研究[J].高压物理学报,2005,19(3):269-274.
[4]陈维青,曾正中,等.触发管型气体火花开关触发电极结构研究[J].强激光与粒子束,2005,17(8):1 213-1 215.
[5]K.W.Chu and G.L.Scott.A comparison of high-voltage switches[R].SAND99-0154,1999.
[6]王桂吉,吴刚,赵剑衡,唐小松,韩梅.平面火花隙三电极开关研制及性能测试[J].强激光与粒子束,2006,18(2):349-352.
[7]Dr.Thomas A.Baginski,Dr.Keith A.Thomas.A robust one-shot switch for high power pulse applications[C]//Annual Fuze Conference 2008.University and Los Alamos National Laboratories,2008.
[8]Thomas A.Baginski.A robust planar triggered spark gap switch for high power pulse applications[C]//Annual Fuze Conference 2009.Auburn University,2009.
[9]Thomas A.Baginski,Robert Neal Dean.Micromachined planar triggered spark gap switch[J].IEEE Transactions on components,packaging and manufacturing technology,2011,1(9):1480-1 485.
[10]周密,孟庆英,韩克华,钱勇,秦国圣.爆炸平面开关的设计及研究[J].火工品,2012(6):12-15.
[11]周镇威,杨卓青,丁桂甫,陆闻静,沈慧.微型平面式气体火花开关的设计和制作[J].强激光与粒子束,2012,24(5):1 256-1260.