串联双微环谐振腔系统的相干特性研究
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摘要
为研究硅基光波导中耦合诱导透明和光学Fano共振效应,设计并加工了一种串联双环谐振腔结构。通过高温退火表面光滑化处理,使得波导粗糙度降低为0.545 nm,实验中利用垂直光栅耦合法对结构进行测试,测试结果表明:当两环半径相等时,由于相消干涉,产生CRIT效应;当两环半径不相等时,产生谐振分离现象。同时与传统的单环谐振腔结构相比,串联双环谐振腔结构半高全宽(FWHM)增强了3倍,并且降落端口消光比增加了20 dB。
In order to study the coupling-induced transparency and optical Fano resonance effect in silicon-based optical waveguide, a series-connected double-ring resonator structure was designed and fabricated. Smooth surface by high temperature annealing treatment, the waveguide roughness decreased to 0.545 nm. The structure was tested by the vertical grating coupling method. The test results show that when the two rings have the same radius, the CRIT effect occurs due to the destructive interference. When the two rings are not equal in radius, resonance separation occurs. Meanwhile, compared with the conventional single ring resonator structure, the full width at half maximum(FWHM) of the series double ring resonator structure is enhanced 3 times, and the drop port extinction ratio is increased by about 20 dB. This is of great importance in applications such as optical filters and optical biosensors.
In order to study the coupling-induced transparency and optical Fano resonance effect in silicon-based optical waveguide, a series-connected double-ring resonator structure was designed and fabricated. Smooth surface by high temperature annealing treatment, the waveguide roughness decreased to 0.545 nm. The structure was tested by the vertical grating coupling method. The test results show that when the two rings have the same radius, the CRIT effect occurs due to the destructive interference. When the two rings are not equal in radius, resonance separation occurs. Meanwhile, compared with the conventional single ring resonator structure, the full width at half maximum(FWHM) of the series double ring resonator structure is enhanced 3 times, and the drop port extinction ratio is increased by about 20 dB. This is of great importance in applications such as optical filters and optical biosensors.
引文
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[3] 邓丽莉.基于SOI的光学微环谐振腔设计及性能研究[D].太原:太原理工大学,2015.
[4] 石强.SOI光波导微环结构的优化设计与加工[D].太原:太原理工大学,2014.
[5] 臧俊斌.集成光波导微环谐振腔的电光调制特性研究[D].太原:中北大学,2013.
[6] FAN X,WHITE I M,SHOPOVA S I,et al.Sensitive optical biosensors for unlabeled targets:a review [J].Analytical Chimica Acta,2008,620(1/2):8.
[7] BAASKE M,VOLLMER F.Optical resonator biosensors:molecular diagnostic and nanoparticle detection on an integrated platform [J].Chem Phys Chem A European Journal of Chemical Physics & Physical Chemistry,2012,13(2):427-436.
[8] CLAES T,MOLERA J G,VOSK D,et al.Label-free biosensing with a slot-waveguide-based ring resonator in Silicon on Insulator [J].IEEE Photonics Journal,2009,1(3):197-204.
[9] ZHANG S,GENOV D A,WANG Y,et al.Plasmon-induced transparency in metamaterials [J].Physical Review Letters,2008,101(4):047401.
[10] SMITH D D,CHANG H,FULLER K A,et al.Coupled-resonator-induced transparency [J].Physical Review A,2004,69(6):666-670.
[11] LU H,LIU X,WANG L,et al.Ultrafast all-optical switching in nanoplasmonic waveguide with Kerr nonlinear resonator [J].Optics Express,2011,19(4):2910.
[12] HONG l,zhang c,feng l,et al.frequency tracking and Locking Method Used in Resonator Micro-Optic Gyro [J].Chinese Journal of Lasers,2011,10(1):14-17.
[13] SHAKYA J,LIPSON M,XU Q.Direct measurement of tunable optical delays on chip analogue toelectromagnetically induced transparency [J].Optics Express,2006,14(14):6463-6468.
[14] XU Q,DONG P,LIPSON M.Breaking the delay-bandwidth limit in a photonic structure [J].Nature Physics,2007,3(6):406-410.
[15] 王永华.基于SOI级联双环的耦合谐振腔诱导透明效应的研究[D].太原:中北大学,2014.