CrN薄膜掺杂Mo元素改性研究
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  • 英文篇名:Modification of CrN Film by Mo Element Doping
  • 作者:宋沂泽 ; 高原 ; 王成磊 ; 彭凯
  • 英文作者:Song Yize;Gao Yuan;Wang Chenglei;Peng Kai;Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology;
  • 关键词:多弧离子镀 ; CrMoN复合薄膜 ; 耐腐蚀性能
  • 英文关键词:MAIP;;CrMoN;;corrosion resistance
  • 中文刊名:COSE
  • 英文刊名:Rare Metal Materials and Engineering
  • 机构:桂林电子科技大学广西信息材料重点实验室;
  • 出版日期:2017-11-15
  • 出版单位:稀有金属材料与工程
  • 年:2017
  • 期:v.46;No.376
  • 基金:国家自然科学基金(51264007);国家自然科学基金青年基金(51201043);; 广西科学研究与技术开发科技攻关计划项目(桂科攻12118020-2-2-1);; 广西信息材料重点实验室项目(桂科能1210908-10-Z);; 桂林电子科技大学-桂林电科院研究生联合培养基地专项经费资助项目(20121225-10-Z;20121225-03-Z)
  • 语种:中文;
  • 页:COSE201711058
  • 页数:5
  • CN:11
  • ISSN:61-1154/TG
  • 分类号:339-343
摘要
利用多弧离子镀技术,在4Cr13不锈钢表面制备CrN薄膜,并掺杂不同含量的Mo原子,制备CrMoN复合薄膜。用XRD、附着力划痕仪、显微硬度计和电化学测量仪分别检测复合薄膜的相结构、结合力、硬度以及在3.5%NaCl溶液、1 mol·L~(-1) NaOH溶液和1 mol·L~(-1) H_2SO_4溶液中的电化学腐蚀性能。结果表明;CrMoN复合薄膜形成了以NaCl型面心立方CrN结构为基础的(Cr,Mo)N结构;当Mo含量达到31.08%(原子分数)时,在(311)、(111)方向上出现Mo_2N的衍射峰,此时薄膜出现了CrN、(Cr,Mo)N和Mo_2N相结构并存的情况。当Mo的原子分数为7.09%时,结合力最大为57 N,显微硬度(HV)达到最大值29623 MPa;当Mo含量为14.26%时,在H_2SO_4溶液和NaOH溶液中耐蚀性能最好;当Mo含量为5.15%时,在NaCl溶液中耐蚀性能最好。复合薄膜腐蚀机理主要是局部腐蚀中的小孔腐蚀,缝隙腐蚀和电偶腐蚀也会发生。
        CrMoN coatings with different Mo contents were deposited on 4Cr13 stainless steel by multi-arc ion plating(MAIP). The binding force, hardness and corrosion resistance properties of CrMoN coatings were investigated by adhesion scratch tester, hardness instrument, and electrochemical measuring instrument, respectively. The electrochemical corrosion property was studied in 3.5% NaCl solution, 1 mol·L~(-1) NaOH solution and 1 mol·L~(-1) H_2SO_4 solution. The results indicate that NaCl-type fcc-phased(Cr, Mo)N is observed in the CrMoN composite coatings; when the Mo content is 31.08%, diffraction peaks of Mo_2N are observed in the direction of(311) and(111), with the coexisting of CrN,(Cr,Mo)N and Mo_2N. When the Mo content is 7.09%, the largest binding force 57 N and micro-hardness(HV) 29623 MPa are obtained; when the Mo content reaches to14.26%, the corrosion resistance of CrMoN coating is the optimum in 1 mol·L~(-1) NaOH solution; when the Mo content is 5.15%, the corrosion resistance of CrMoN coatings is the best in 3.5% NaCl solution. Corrosion mechanism of the coatings is mainly pitting corrosion with crevice corrosion and galvanic corrosion.
引文
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