二氧化锡透明导电薄膜的研究进展
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摘要
透明导电薄膜具有透明性和导电性,在平板显示器、太阳能电池、触摸屏等领域有着重要的作用。SnO_2是制备透明导电薄膜最具潜力的材料之一。结合国内外SnO_2透明导电薄膜的研究现状,主要对SnO_2薄膜的透明导电原理、制备方法和掺杂改性研究进展进行综述。
Transparent conductive thin film has an important role in the field of flat panel display,solar cell and touch panel with transparency and conductivity.SnO_2 is one of the most promising materials for the fabrication of transparent conductive films.In this paper,based on the research status of SnO_2 transparent conductive films at home and abroad,the conductive principle,researching progress of preparation method and doping modification of SnO_2 thin films are reviewed.
Transparent conductive thin film has an important role in the field of flat panel display,solar cell and touch panel with transparency and conductivity.SnO_2 is one of the most promising materials for the fabrication of transparent conductive films.In this paper,based on the research status of SnO_2 transparent conductive films at home and abroad,the conductive principle,researching progress of preparation method and doping modification of SnO_2 thin films are reviewed.
引文
[1]成立顺,孙本双,钟景明,等.ITO透明导电薄膜的研究进展[J].稀有金属快报,2008,27(3):10-16.
[2]范志新.氧化物半导体透明导电薄膜最佳掺杂含量理论计算[J].半导体学报,2002,11(2):589-592.
[3]NI J,ZHAO X,ZHENG X,et al.Electrical,structural,photoluminescence and optical properties of p-type conducting,antimony-doped Sn O2 thin films[J].Acta Mater,2009,57(1):278-285.
[4]XU J W,WANG H,YANG L,et al.Low temperature growth of highly crystallized ZnO:Al films by ultrasonic spray pyhrolysis from acetylacetone salt[J].Mater Sci Eng B,2010,167:182-186.
[5]吴绍航.SnO 2基与ZnO基透明导电薄膜的研究[D].北京:中国科学院大学,2015.
[6]SUNG U L,WON S C,Hong B Y.Synthesis and characterization of Sn O2:Sb film by dc magnetron sputtering method for applications to transparent electrodes[J].PHYSICAS CRIPTA,2007,129:312-315.
[7]刘宏燕,颜悦,望咏林,等.透明导电氧化物薄膜材料研究进展[J].航空材料学报,2015,4(35):63-82.
[8]YANG W H,YU S H,ZHANG Y.Properties of Sbdoped SnO 2 transparent conductive thin films deposited by radio-frequency magnetron sputtering[J].Thin Solid Films,2013,542:285-288.
[9]宁洁.射频磁控溅射法制备氧化锡基透明导电氧化物薄膜[D].辽宁:辽宁科技大学,2013.
[10]王东丽.超声喷雾热解法制备SnO 2∶F薄膜及性能分析[D].西安:西安理工大学,2009.
[11]陈小龙,蒲永平,吴胜红,等.热喷涂法制备Sb掺杂的SnO 2薄膜[J].陕西科技大学学报,2010,28(03):28-30.
[12]郝喜红,许启明,赵鹏,等.喷雾热解法制备掺氟的氧化锡透明导电膜[J].研究与试制,2005,2(24):7-10.
[13]邢帅,刘钟馨,姜宏,等.常压CVD法制备Sb掺杂SnO 2薄膜的性能研究[J].材料导报B:研究篇,2015,29(4):19-24.
[14]REMESA Z N,YATES V K.Optical properties of SnO 2∶F films deposited by atmospheric pressure CVD[J].Thin Solid Films,2009,517:6287-6289.
[15]王贺,魏长平,彭春佳,等.SnO 2∶Sb透明导电薄膜的制备及光电性能[J].硅酸盐学报,2012,40(7):945-949.
[16]TSAY C Y,LIANG S C.Fabrication of p-type conductivity in SnO 2 thin films through Ga doping[J].Journal of Alloys and Compounds,2015,622:644-650.
[17]赵祯,张建民,吴姣,等.ATO透明导电薄膜的研究进展[J].机械工程材料,37(10):5-20.
[18]KIM H,AUYEUNG R C Y,PIQUE A.Transparent conducting F-doped SnO 2 thin films grown by pulsed laser deposition[J].Thin Solid Films,2008,516:5052-5056.
[19]MORAISA E A,SCALVIB L V A,GERALDOAV,et al.Electro-optical properties of Er-doped Sn O2 thin films[J].Journal of the European Ceramic Society,2004,24:1857-1860.
[20]冯先进.高质量SnO 2薄膜的制备及特性研究[D].济南:山东大学,2008.
[21]张聚宝,侯春,翁文剑,等.喷雾热解法制备SnO 2:Sb透明导电薄膜[J].硅酸盐学报,2003,31(11):1063-1068.
[22]周翔.APCVD法制备ATO薄膜及工艺参数对膜结构、性能影响的研究[D].武汉:武汉理工大学,2007.
[23]邓志兵.溶胶-凝胶法制备ATO透明导电薄膜的光电性能[D].武汉:华中科技大学,2006.
[24]Moure-Floresa F de,Guill′en-Cervantesb A,NietoZepedab K E,et al.SnO 2:F thin films deposited by RF magnetron sputtering:effect of the SnF 2 amount in the target on the physical properties[J].Revista Mexicana de Fisica,2013,59:335-338.
[25]A.E.Rakhshani,Y.Makdisi,H.A.Ramazaiyan,J.Electronic and optical properties of fluorine-doped tin oxide films[J].Appl.Phys,1998,2(83):1049-1057.
[26]FUKANO T.Low-temperature growth of highly crystallized transparent conductive fluorine-doped tin oxide films by intermittent spray pyrolysis deposition[J].Solar Energy Materrials and Solar Cells,2004,82(4):567-575.
[27]罗文秀,李凤玲.几种MOCVD掺杂SnO 2膜的结构、透明度与导电性[J].无机材料学报,1990,5(2):185-188.
[28]GANDHI T I,RAMESH R B,RAMAMURTHI K,et al.Effect of Mn doping on the electrical and optical properties of SnO 2 thin lms deposited by chemical spray pyrolysis technique[J].Thin Solid Films,2016,598:195-203.
[29]Zhao J,Zhao X J,Ni J M,et al.Structural,electrical and optical properties of p-type transparent conducting SnO 2:Al film derived from thermal diffusion of Al/SnO 2/Al multilayer thin films[J].Acta Materialia,2010,19(58):6243-6248.
[30]廖亚琴,李愿杰,黄添懋.透明导电薄膜现状与发展趋势[J].东方电气评论,2014,28(109):13-18.
[31]陈帅,赵小如,段利兵,等.SiO 2缓冲层对溶胶-凝胶法制备的SnO 2:Sb薄膜光电性能的影响[J].材料导报B,研究篇,2012,26(5):27-29.
[32]MAO W F,XIONG B Y,Li Q C,et al.Influences of defects and Sb valence states on the temperature dependent conductivity of Sb doped SnO 2 thin films[J].Physics Letters A,2015,379:1946-1950.
[33]J.Mazlooma,F.E.Ghodsia,M.Gholamib.Fiber-like stripe ATO(Sn O2:Sb)nanostructured thin films grown by sol-gel method:Optical,topographical and electrical properties[J].Journal of Alloys and Compounds,2013,579:384-393.
[34]DEMET T T,BAHATTIN D G.The relationship between the doping levels and some physical properties of SnO 2:F thin lms spray-deposited on optical glass[J].Academy of Sciences,2012,79:137-150.
[35]SHADIA J,IKHMA Y,RIYAD N,et al.Effect of Processing on the Electrical Properties of Spray-Deposited Sn O2:F Thin Films[J].American Journal of Applied Sciences,2008,5(6):672-677.
[36]A.V.Moholkar a,S.M.Pawar b,K.Y.Rajpure,et al.Solvent-dependent growth of sprayed FTO thin films with mat-like morphology[J].Solar Energy Materials&Solar Cells,92(2008):1439-1444.
[37]JEYADHEEPAN K,THAMILSELVAN M,KYUNGHAE K,et al.Optoelectronic properties of R-F magnetron sputtered Cadmium Tin Oxide(Cd2SnO 4)thin films for CdS/CdT e thin film solar cell applications[J].Journal of Alloys and Compounds,2015,620:185-191.
[38]侯环宇.喷雾热解法制备氧化锡薄膜工艺及性能研究[D].呼和浩特:内蒙古大学,2005.
[39]JOSEPH D P,RENUGAMBAL P,SARAVANAN M.Effect of Li doping on the structural,optical and electrical properties of spray deposited SnO 2 thin lms[J].Thin Solid Films,2009,517:6129-6136.
[40]AHMED S F,KHAN S,Ghosh P K,et al.Effect of Al doping on the conductivity type inversion and electrooptical properties of SnO 2 thin films synthesized by solgel technique[J].J Sol-Gel Sci.Techn,2006,39:241-247.
[41]LEE J J,HA J Y,CHOI W K,et al.Doped Sn O2Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread[J].ACS Comb.Sci.,2015,17:247-252.
[42]XIAO X D,DONG G P,SHAO J D,et al.Optical and electrical properties of SnO 2:Sb thin films deposited by oblique angle deposition[J].Volume,2010,256(6):1636-1640.
[43]GOLOBOSTANFARD M R,ABDIZADEH H S,MOHAMMADI S,et al.Carbon nanotube/indium tin oxide hybrid transparent conductive film:Effect of nanotube diameter[J].Solar Energy Materials&Solar Cells,2015,132:418-424.
[2]范志新.氧化物半导体透明导电薄膜最佳掺杂含量理论计算[J].半导体学报,2002,11(2):589-592.
[3]NI J,ZHAO X,ZHENG X,et al.Electrical,structural,photoluminescence and optical properties of p-type conducting,antimony-doped Sn O2 thin films[J].Acta Mater,2009,57(1):278-285.
[4]XU J W,WANG H,YANG L,et al.Low temperature growth of highly crystallized ZnO:Al films by ultrasonic spray pyhrolysis from acetylacetone salt[J].Mater Sci Eng B,2010,167:182-186.
[5]吴绍航.SnO 2基与ZnO基透明导电薄膜的研究[D].北京:中国科学院大学,2015.
[6]SUNG U L,WON S C,Hong B Y.Synthesis and characterization of Sn O2:Sb film by dc magnetron sputtering method for applications to transparent electrodes[J].PHYSICAS CRIPTA,2007,129:312-315.
[7]刘宏燕,颜悦,望咏林,等.透明导电氧化物薄膜材料研究进展[J].航空材料学报,2015,4(35):63-82.
[8]YANG W H,YU S H,ZHANG Y.Properties of Sbdoped SnO 2 transparent conductive thin films deposited by radio-frequency magnetron sputtering[J].Thin Solid Films,2013,542:285-288.
[9]宁洁.射频磁控溅射法制备氧化锡基透明导电氧化物薄膜[D].辽宁:辽宁科技大学,2013.
[10]王东丽.超声喷雾热解法制备SnO 2∶F薄膜及性能分析[D].西安:西安理工大学,2009.
[11]陈小龙,蒲永平,吴胜红,等.热喷涂法制备Sb掺杂的SnO 2薄膜[J].陕西科技大学学报,2010,28(03):28-30.
[12]郝喜红,许启明,赵鹏,等.喷雾热解法制备掺氟的氧化锡透明导电膜[J].研究与试制,2005,2(24):7-10.
[13]邢帅,刘钟馨,姜宏,等.常压CVD法制备Sb掺杂SnO 2薄膜的性能研究[J].材料导报B:研究篇,2015,29(4):19-24.
[14]REMESA Z N,YATES V K.Optical properties of SnO 2∶F films deposited by atmospheric pressure CVD[J].Thin Solid Films,2009,517:6287-6289.
[15]王贺,魏长平,彭春佳,等.SnO 2∶Sb透明导电薄膜的制备及光电性能[J].硅酸盐学报,2012,40(7):945-949.
[16]TSAY C Y,LIANG S C.Fabrication of p-type conductivity in SnO 2 thin films through Ga doping[J].Journal of Alloys and Compounds,2015,622:644-650.
[17]赵祯,张建民,吴姣,等.ATO透明导电薄膜的研究进展[J].机械工程材料,37(10):5-20.
[18]KIM H,AUYEUNG R C Y,PIQUE A.Transparent conducting F-doped SnO 2 thin films grown by pulsed laser deposition[J].Thin Solid Films,2008,516:5052-5056.
[19]MORAISA E A,SCALVIB L V A,GERALDOAV,et al.Electro-optical properties of Er-doped Sn O2 thin films[J].Journal of the European Ceramic Society,2004,24:1857-1860.
[20]冯先进.高质量SnO 2薄膜的制备及特性研究[D].济南:山东大学,2008.
[21]张聚宝,侯春,翁文剑,等.喷雾热解法制备SnO 2:Sb透明导电薄膜[J].硅酸盐学报,2003,31(11):1063-1068.
[22]周翔.APCVD法制备ATO薄膜及工艺参数对膜结构、性能影响的研究[D].武汉:武汉理工大学,2007.
[23]邓志兵.溶胶-凝胶法制备ATO透明导电薄膜的光电性能[D].武汉:华中科技大学,2006.
[24]Moure-Floresa F de,Guill′en-Cervantesb A,NietoZepedab K E,et al.SnO 2:F thin films deposited by RF magnetron sputtering:effect of the SnF 2 amount in the target on the physical properties[J].Revista Mexicana de Fisica,2013,59:335-338.
[25]A.E.Rakhshani,Y.Makdisi,H.A.Ramazaiyan,J.Electronic and optical properties of fluorine-doped tin oxide films[J].Appl.Phys,1998,2(83):1049-1057.
[26]FUKANO T.Low-temperature growth of highly crystallized transparent conductive fluorine-doped tin oxide films by intermittent spray pyrolysis deposition[J].Solar Energy Materrials and Solar Cells,2004,82(4):567-575.
[27]罗文秀,李凤玲.几种MOCVD掺杂SnO 2膜的结构、透明度与导电性[J].无机材料学报,1990,5(2):185-188.
[28]GANDHI T I,RAMESH R B,RAMAMURTHI K,et al.Effect of Mn doping on the electrical and optical properties of SnO 2 thin lms deposited by chemical spray pyrolysis technique[J].Thin Solid Films,2016,598:195-203.
[29]Zhao J,Zhao X J,Ni J M,et al.Structural,electrical and optical properties of p-type transparent conducting SnO 2:Al film derived from thermal diffusion of Al/SnO 2/Al multilayer thin films[J].Acta Materialia,2010,19(58):6243-6248.
[30]廖亚琴,李愿杰,黄添懋.透明导电薄膜现状与发展趋势[J].东方电气评论,2014,28(109):13-18.
[31]陈帅,赵小如,段利兵,等.SiO 2缓冲层对溶胶-凝胶法制备的SnO 2:Sb薄膜光电性能的影响[J].材料导报B,研究篇,2012,26(5):27-29.
[32]MAO W F,XIONG B Y,Li Q C,et al.Influences of defects and Sb valence states on the temperature dependent conductivity of Sb doped SnO 2 thin films[J].Physics Letters A,2015,379:1946-1950.
[33]J.Mazlooma,F.E.Ghodsia,M.Gholamib.Fiber-like stripe ATO(Sn O2:Sb)nanostructured thin films grown by sol-gel method:Optical,topographical and electrical properties[J].Journal of Alloys and Compounds,2013,579:384-393.
[34]DEMET T T,BAHATTIN D G.The relationship between the doping levels and some physical properties of SnO 2:F thin lms spray-deposited on optical glass[J].Academy of Sciences,2012,79:137-150.
[35]SHADIA J,IKHMA Y,RIYAD N,et al.Effect of Processing on the Electrical Properties of Spray-Deposited Sn O2:F Thin Films[J].American Journal of Applied Sciences,2008,5(6):672-677.
[36]A.V.Moholkar a,S.M.Pawar b,K.Y.Rajpure,et al.Solvent-dependent growth of sprayed FTO thin films with mat-like morphology[J].Solar Energy Materials&Solar Cells,92(2008):1439-1444.
[37]JEYADHEEPAN K,THAMILSELVAN M,KYUNGHAE K,et al.Optoelectronic properties of R-F magnetron sputtered Cadmium Tin Oxide(Cd2SnO 4)thin films for CdS/CdT e thin film solar cell applications[J].Journal of Alloys and Compounds,2015,620:185-191.
[38]侯环宇.喷雾热解法制备氧化锡薄膜工艺及性能研究[D].呼和浩特:内蒙古大学,2005.
[39]JOSEPH D P,RENUGAMBAL P,SARAVANAN M.Effect of Li doping on the structural,optical and electrical properties of spray deposited SnO 2 thin lms[J].Thin Solid Films,2009,517:6129-6136.
[40]AHMED S F,KHAN S,Ghosh P K,et al.Effect of Al doping on the conductivity type inversion and electrooptical properties of SnO 2 thin films synthesized by solgel technique[J].J Sol-Gel Sci.Techn,2006,39:241-247.
[41]LEE J J,HA J Y,CHOI W K,et al.Doped Sn O2Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread[J].ACS Comb.Sci.,2015,17:247-252.
[42]XIAO X D,DONG G P,SHAO J D,et al.Optical and electrical properties of SnO 2:Sb thin films deposited by oblique angle deposition[J].Volume,2010,256(6):1636-1640.
[43]GOLOBOSTANFARD M R,ABDIZADEH H S,MOHAMMADI S,et al.Carbon nanotube/indium tin oxide hybrid transparent conductive film:Effect of nanotube diameter[J].Solar Energy Materials&Solar Cells,2015,132:418-424.