铌酸锂晶体波导散斑温度传感器的研究
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摘要
采用飞秒激光直写技术在铌酸锂晶体中写入圆柱形包层光波导,利用激光在波导中传输所产生的散斑,基于平均散斑强度变化算法实现了对外界温度的传感,并验证了波导芯径对传感灵敏度的影响。实验证明,该传感器对温度的传感精度可达0.05℃,其动态范围可达20℃,且芯径为60μm的光波导较30μm光波导的传感灵敏度更高。该方案凭借晶体波导几何尺寸的特征,有效减小了传感系统的体积,并进一步拓展了晶体波导在集成光学系统中的应用。
The cylindrical cladding optical waveguides were fabricated in lithium niobate crystal by using the method of femtosecond laser direct writing.The temperature sensor,using the specklegram generated from laser transmissing in the waveguide,was achieved based on the average speckle intensity variation algorithm.And the influence of the core diameter of the waveguide on the sensitivity of the sensor was verified.Experimental results show that the temperature sensing resolution of this sensor can reach 0.05℃,and its dynamic range can reach20℃.The sensitivity of the optical waveguide with a core diameter of 60μm is much higher than that of the 30μm optical waveguide.The scheme effectively reduces the volume of the sensing system by virtue of the geometrical size of the crystal waveguide,and further expands the applications of the crystal waveguide in the integrated optical system.
The cylindrical cladding optical waveguides were fabricated in lithium niobate crystal by using the method of femtosecond laser direct writing.The temperature sensor,using the specklegram generated from laser transmissing in the waveguide,was achieved based on the average speckle intensity variation algorithm.And the influence of the core diameter of the waveguide on the sensitivity of the sensor was verified.Experimental results show that the temperature sensing resolution of this sensor can reach 0.05℃,and its dynamic range can reach20℃.The sensitivity of the optical waveguide with a core diameter of 60μm is much higher than that of the 30μm optical waveguide.The scheme effectively reduces the volume of the sensing system by virtue of the geometrical size of the crystal waveguide,and further expands the applications of the crystal waveguide in the integrated optical system.
引文
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[11]Yu F,Wen Meiyuan,Yin Shizhuo,et al.Submicrometer displacement sensing using inner-product multimode fiber speckle fields[J].Appl.Opt.,1993,32:4685-4689.
[12]Rodriguez-Cobo L,Lomer M,Cobo A,et al.Optical fiber strain sensor with extended dynamic range based on specklegrams[J].Sens.Actuators A-Phys.,2013,203:341-345.
[13]Rodriguez-Cobo L,Lomer M,Lopez-Higuera J M.Fiber specklegram sensors sensitivities at high temperatures[J].Proc.of SPIE,2015,9634:96347J.
[2]Salamu G,Pavel N.Power scaling from buried depressedcladding waveguides realized in Nd∶YVO4 by femtosecondlaser beam writing[J].Opt.Laser Technol.,2016,84:149-154.
[3]Cheng Chen,Romero C,Aldana J R V D,et al.Superficial waveguide splitters fabricated by femtosecond laser writing of LiTaO3crystal[J].Opt.Eng.,2015,54(6):067113.
[4]Chen Feng,Lv Jinman,Yuan Weihao,et al.Three-dimensional femtosecond laser fabrication of waveguide beam splitters in LiNbO3crystal[J].Opt.Mater.Express,2015,5(6):1274.
[5]Calmano T,Siebenmorgen J,Hellmig O,et al.Nd∶YAG waveguide laser with 1.3W output power fabricated by direct femtosecond laser writing[J].Appl.Phys.B,2010,100(1):131-135.
[6]Chen Weijin,Eaton S M,Zhang Haibin,et al.Broadband directional couplers fabricated in bulk glass with high repetition rate femtosecond laser pulses[J].Opt.Express,2008,16(15):11470-11480.
[7]Golan L,Shoham S.Speckle elimination using shift-averaging in high-rate holographic projection[J].Opt.Express,2009,17:1330-1339.
[8]Almoro P F,Pedrini G,Anand A,et al.Angular displacement and deformation analyses using a speckle-based wavefront sensor[J].Appl.Opt.,2009,48:932-940.
[9]Ramirezsanjuan J C,Regan C,Coyotlocelotl B,et al.Spatial versus temporal laser speckle contrast analyses in the presence of static optical scatterers[J].J.Biomed.Opt.,2014,19:106009.
[10]Pan K,Uang C M,Cheng Feng,et al.Multimode fiber sensing by using mean-absolute speckle-intensity variation[J].Appl.Opt.,1994,33:2095-2098.
[11]Yu F,Wen Meiyuan,Yin Shizhuo,et al.Submicrometer displacement sensing using inner-product multimode fiber speckle fields[J].Appl.Opt.,1993,32:4685-4689.
[12]Rodriguez-Cobo L,Lomer M,Cobo A,et al.Optical fiber strain sensor with extended dynamic range based on specklegrams[J].Sens.Actuators A-Phys.,2013,203:341-345.
[13]Rodriguez-Cobo L,Lomer M,Lopez-Higuera J M.Fiber specklegram sensors sensitivities at high temperatures[J].Proc.of SPIE,2015,9634:96347J.