碳含量对电弧增强反应磁控溅射方法制备BCN薄膜热稳定性的影响
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摘要
利用电弧增强反应磁控溅射(AEMS)方法在高速钢基体上制备了BCN薄膜,通过改变石墨靶功率来调整BCN薄膜中碳元素的含量,采用傅里叶变换红外光谱仪、高分辨透射电镜、显微硬度计和划痕仪等设备研究了BCN薄膜的热稳定性。结果表明:BCN薄膜在高温下具有较好的热稳定性;随着碳含量的增加,高温退火后BCN薄膜原子排列的有序度增加,部分结合键发生转化或分解,结合力下降,BCN薄膜的热稳定性降低。
BCN thin film was deposited on high speed steel substrate by arc enhanced reactive magnetron sputtering(AEMS).Carbon content of the BCN thin film was adjusted by changing graphite target′s power.Thermal stability of the BCN thin film was studied by techniques of Fourier-transform infrared absorption,highresolution transmission electron microscopy,micro-hardness indentation and scratch testing.The results indicate that the BCN thin film had a good thermal stability at elevated temperature.With the increase of carbon content,the atom arrangement order degree of the BCN thin film increased after vacuum annealing at elevated temperature,some of the binding bonds were transformed or decomposed,adhesion strength decreased,and thermal stability of the BCN thin film became poor.
BCN thin film was deposited on high speed steel substrate by arc enhanced reactive magnetron sputtering(AEMS).Carbon content of the BCN thin film was adjusted by changing graphite target′s power.Thermal stability of the BCN thin film was studied by techniques of Fourier-transform infrared absorption,highresolution transmission electron microscopy,micro-hardness indentation and scratch testing.The results indicate that the BCN thin film had a good thermal stability at elevated temperature.With the increase of carbon content,the atom arrangement order degree of the BCN thin film increased after vacuum annealing at elevated temperature,some of the binding bonds were transformed or decomposed,adhesion strength decreased,and thermal stability of the BCN thin film became poor.
引文
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[2]YU J,WANG E G,XU G C.Synthesis and characterization of B-C-N compounds on molybdenum[J].Journal of Materials Research,1999,14(3):1137-1141.
[3]MARTINEZ E,LOUSA A,ESTEVE J.Micromechanical and microtribological properties of BCN thin films near the B4C composition deposited by r.f.magnetron sputtering[J].Diamond and Related Materials,2001,10(9):1892-1896.
[4]THAMM T,KORNERK U,BOHNE W,et al.Characterization of PECVD boron carbonitride layers[J].Applied Surface Science,2005,252(1):223-226.
[5]FREIRE F L,MARIOTTO G,ACHETE C A,et al.Amorphous hydrogenated carbon nitride films obtained by plasma-enhanced chemical vapour deposition[J].Surface and Coatings Technology,1995,75(1):382-386.
[6]ZHOU F,ADACHI K,KATO K.Comparisons of tribological property of a-C,a-CNx and BCN coatings sliding against SiC balls in water[J].Surface and Coatings Technology,2006,200(14/15):4471-4478.
[7]ZHOU F,ADACHI K,KATO K.Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition[J].Thin Solid Films,2006,497(1/2):210-217.
[8]CHEN X Y,WANG Z H,MA S L,et al.Microstructure and tribological properties of ternary BCN thin films with different carbon contents[J].Diamond and Related Materials,2010,19(10):1225-1229.
[9]KOMATSU T,SAMEDIMA M,AWANO T,et al.Creation of superhard B-C-N heterodiamond using an advanced shock wave compression technology[J].Journal of Materials Processing Technology,1999,85(1/2/3):69-73.
[10]陈向阳,张瑾,马胜利,等.具有TiN过渡层的BCN薄膜制备与力学性能[J].稀有金属材料与工程,2016,45(2):503-506.
[11]CARETTI I,JIMENEZ I,GAGO R,et al.Tribological properties of ternary BCN films with controlled composition and bonding structure[J].Diamond and Related Materials,2004,13(4):1532-1537.