拉曼光谱用热电制冷CCD探测器的设计与性能
|
摘要
设计了一种热电制冷电子耦合元件(CCD)探测器,并对其特性进行了分析。介绍了该CCD探测器的真空制冷结构、电路、应用软件,并对各个部分的设计思路、功能、效果进行了详细论述。对该探测器的暗电流噪声和读出噪声进行了测试,结果表明:在温度为-30℃、读出频率为250kHz的条件下,该探测器的读出噪声为56e-,其暗电流噪声为0.232e-·(pixel·s)-1;使用该热电制冷CCD探测器测试空气的自发拉曼散射信号,在温度为-30℃、曝光时间为10s的条件下,O_2、N_2和H_2O的自发拉曼散射峰的相对高度分别为3303,7768,843ADU,其中N_2峰的信背比和信噪比分别为14.8和24.9。所设计的CCD探测器具有探测微弱自发拉曼散射信号的能力。
A kind of thermoelectric cooling charge-coupled device(CCD)detector is designed and its performance is analyzed.The vacuum refrigeration structure,electric circuit,application software of this CCD detector and their design thoughts,functions and effects are introduced.The dark current noise and the readout noise of this detector are tested.The results show that,the readout noise is 56 e-and the dark current noise is 0.232 e-·(pixel·s)-1 at the temperature of-30℃ and the reading frequency of 250 kHz.The spontaneous Raman scattering signal of the ambient atmosphere is obtained by this detector.Under the temperature of-30℃ and the exposure time of 10 s,the relative heights of the spontaneous Raman scattering peaks for the O_2,N_2 and H_2O are 3303,7768,843 ADU,respectively,in which the signal-background-ratio and the signal-noise-ratio of the N_2 peak are 14.8 and 24.9,respectively.The designed CCD detector possesses a detection ability for the weak spontaneous Raman scattering signals.
A kind of thermoelectric cooling charge-coupled device(CCD)detector is designed and its performance is analyzed.The vacuum refrigeration structure,electric circuit,application software of this CCD detector and their design thoughts,functions and effects are introduced.The dark current noise and the readout noise of this detector are tested.The results show that,the readout noise is 56 e-and the dark current noise is 0.232 e-·(pixel·s)-1 at the temperature of-30℃ and the reading frequency of 250 kHz.The spontaneous Raman scattering signal of the ambient atmosphere is obtained by this detector.Under the temperature of-30℃ and the exposure time of 10 s,the relative heights of the spontaneous Raman scattering peaks for the O_2,N_2 and H_2O are 3303,7768,843 ADU,respectively,in which the signal-background-ratio and the signal-noise-ratio of the N_2 peak are 14.8 and 24.9,respectively.The designed CCD detector possesses a detection ability for the weak spontaneous Raman scattering signals.
引文
[1]Xu C G,Jia Y T,Yan X G,et al.Semiconductor refrigeration technology and its application[J].Mechanical Engineering&Automation,2012,3:209-211.徐昌贵,贾艳婷,闫献国,等.半导体制冷技术及其应用[J].机械工程与自动化,2012,3:209-211.
[2]Agnelli G,Nanni D,Cola S,et al.Thermoelectriccooled 2k×2k CCD imaging camera for wide-field telescopes[J].Proceedings of SPIE,1998,3355:316764.
[3]Meidinger N,Andritschke R,Assmann W,et al.CCD detector development for the eROSITA space telescope[C].IEEE Nuclear Science Symposuim&Medical Imaging Conference,2010:12060470.
[4]Ingleya R,Hutchinsona I B,Edwardsa H G M,et al.ExoMars Raman laser spectrometer breadboard:Detector design and performance[J].Proceedings of SPIE,2011,8152:815215.
[5]Keel W C,Oswalt T,Mack P,et al.The remote observatories of the southeastern association for research in astronomy(SARA)[J].Publications of the Astronomical Society of the Pacific,2016,129(971):015002.
[6]He Y Q,Du Y F,Gao W,et al.The cooling control system for focal plane assembly of astronomical satellite camera based on TEC[J].Proceedings of SPIE,2017,10256:102562H.
[7]Williamson A P,Kiefer J.Towards low-cost Raman spectroscopy by using a conventional CCD camera[C].3D Image Acquisition and Display:Technology,Perception and Applications,2016,JT3A:JT3A.10.
[8]Zhang D H,Yao D Z,Liu W,et al.System design of high-speed science-grade CCD camera[J].OptoElectronic Engineering,2005,32(11):87-92.张大海,姚大志,刘伟,等.高速科学CCDCAMERA系统设计[J].光电工程,2005,32(11):87-92.
[9]Jin W Q,Zhang J S,Liu G R,et al.Investigation on a high-performance cooling CCD imaging module based on CCD device of industrial level[J].Journal of Applied Optics,1900,29(1):1-4.金伟其,张加深,刘广荣,等.一种基于工业级CCD器件的高性能制冷CCD成像组件[J].应用光学,2008,29(1):1-4.
[10]Zhang Q,Huang S H,Zhao X,et al.The design and implementation of CCD refrigeration system of imaging spectrometer[J].Acta Photonica Sinica,2017,46(3):165-171.张泉,黄书华,赵欣,等.机载成像光谱仪CCD制冷系统设计与实现[J].光子学报,2017,46(3):165-171.
[11]Zhang N,Wen Z L,G J,et al.Design of a scientific grade CCD camera with high sensitivity and refrigeration[J].Semiconductor Optoelectronics,2016,37(4):580-583.张娜,温中流,龚婧,等.一种高灵敏度制冷型科学级CCD相机的设计[J].半导体光电,2016,37(4):580-583.
[12]Xu W H,Wu H D.Design of ultra-high resolution CCD imaging systems[J].Optics&Precision Engineering,2012,20(7):1603-1610.许文海,吴厚德.超高分辨率CCD成像系统的设计[J].光学精密工程,2012,20(7):1603-1610.
[13]Zheng L L,Jin G,Qu H S,et al.Space-borne CCDimaging circuit system with high signal-to-noise ratio[J].Optics&Precision Engineering,2016,24(8):2027-2036.郑亮亮,金光,曲宏松,等.高信噪比星载CCD成像电路系统[J].光学精密工程,2016,24(8):2027-2036.
[14]Chang Z,Wang Y,Si F Q,et al.Design and implementation of ultraviolet imaging system based on scientific grade CCD[J].Chinese Journal of Lasers,2017,44(8):0804002.常振,王煜,司福祺,等.基于科学级CCD的紫外成像系统设计与实现[J].中国激光,2017,44(8):0804002.
[15]Zhao J,Zuo D L,Wang X B.Study on thermoelectrically cooled CCD in Raman spectrum detection system for gas analysis[J].Laser&Optoelectronics Progress,2016,53(7):070401.赵俊,左都罗,王新兵.气体拉曼光谱检测系统中热电制冷CCD研究[J].激光与光电子学进展,2016,53(7):070401.
[16]Hamamatus Photonics K K.Data sheet of CCD image sensors:S11071/S10420-1series[EB/OL].(2017-11-13)[2018-01-05].https:∥www.hamamatsu.com/jp/en/product/type/S10420-1106-01/index.html.
[17]Hamamatsu Photonics K K.Driver circuit for CCDimage sensor(S10420/S11071/S11510series)[EB/OL].(2017-02-14)[2018-01-05].https:∥www.hamamatsu.com/jp/en/product/type/C11287/index.html.
[18]Li Z,Yu A L,Zuo D L,et al.Analysis and correction of slit curvature in spectrograph with high NA[J].Acta Optica Sinica,2015,35(6):0630004.李哲,余安澜,左都罗,等.大口径光谱系统狭缝弯曲的分析与矫正[J].光学学报,2015,36(6):0630004.
[19]Zuo D L,Yu A L,Li Z,et al.Application of imaging spectrometer in gas analysis by Raman scattering[J].Proceedings of SPIE,2015,96110:96110N.
[20]Li J,Zhao J K,Chang M,et al.Radiometric calibration of photographic camera with a composite plane array CCD in laboratory[J].Optics&Precision Engineering,2017,25(1):73-83.李晶,赵建科,昌明,等.复合面阵CCD摄影相机的实验室辐射定标[J].光学精密工程,2017,25(1):73-83.
[21]Cheng S B,Zhang H G,Liu H,et al.Performance measurement of mechanical shutter and dark current for scientific-grade optical CCD[J].Acta Optica Sinica,2012,32(2):0204001.程书博,张惠鸽,刘浩,等.科学级光学CCD暗电流及机械快门时间响应特性测试[J].光学学报,2012,32(2):0204001.
[22]Widenhorn R,Mundermann L,Rest A,et al.MeyerNeldel rule for dark current in charge-coupled devices[J].Journal of Applied Physics,2001,89(12):8179-8182.
[23]Xia G,Huang C,Wu S,et al.Method of measuring gain and readout noise of miniature spectrometer[J].Acta Optica Sinica,2017,37(1):0112001.夏果,黄禅,吴骕,等.微型光谱仪增益及读出噪声的测量方法[J].光学学报,2017,37(1):0112001.
[24]Yu A,Zuo D,Li B,et al.Parabolic cell for lowbackground Raman analysis of gas samples[J].Applied Optics,2016,55(13):3650.
[25]Princeton Instruments.Data sheet of Pixis:400[EB/OL].(2017-06-23)[2018-01-05].https:∥www.princetoninstruments.com/products/PIXIS-CCD.
[26]Albraheem L,Al-Khalifa H S.Raman spectroscopy for chemical analysis[M].New York:John Wiley&Sons,2000.
[2]Agnelli G,Nanni D,Cola S,et al.Thermoelectriccooled 2k×2k CCD imaging camera for wide-field telescopes[J].Proceedings of SPIE,1998,3355:316764.
[3]Meidinger N,Andritschke R,Assmann W,et al.CCD detector development for the eROSITA space telescope[C].IEEE Nuclear Science Symposuim&Medical Imaging Conference,2010:12060470.
[4]Ingleya R,Hutchinsona I B,Edwardsa H G M,et al.ExoMars Raman laser spectrometer breadboard:Detector design and performance[J].Proceedings of SPIE,2011,8152:815215.
[5]Keel W C,Oswalt T,Mack P,et al.The remote observatories of the southeastern association for research in astronomy(SARA)[J].Publications of the Astronomical Society of the Pacific,2016,129(971):015002.
[6]He Y Q,Du Y F,Gao W,et al.The cooling control system for focal plane assembly of astronomical satellite camera based on TEC[J].Proceedings of SPIE,2017,10256:102562H.
[7]Williamson A P,Kiefer J.Towards low-cost Raman spectroscopy by using a conventional CCD camera[C].3D Image Acquisition and Display:Technology,Perception and Applications,2016,JT3A:JT3A.10.
[8]Zhang D H,Yao D Z,Liu W,et al.System design of high-speed science-grade CCD camera[J].OptoElectronic Engineering,2005,32(11):87-92.张大海,姚大志,刘伟,等.高速科学CCDCAMERA系统设计[J].光电工程,2005,32(11):87-92.
[9]Jin W Q,Zhang J S,Liu G R,et al.Investigation on a high-performance cooling CCD imaging module based on CCD device of industrial level[J].Journal of Applied Optics,1900,29(1):1-4.金伟其,张加深,刘广荣,等.一种基于工业级CCD器件的高性能制冷CCD成像组件[J].应用光学,2008,29(1):1-4.
[10]Zhang Q,Huang S H,Zhao X,et al.The design and implementation of CCD refrigeration system of imaging spectrometer[J].Acta Photonica Sinica,2017,46(3):165-171.张泉,黄书华,赵欣,等.机载成像光谱仪CCD制冷系统设计与实现[J].光子学报,2017,46(3):165-171.
[11]Zhang N,Wen Z L,G J,et al.Design of a scientific grade CCD camera with high sensitivity and refrigeration[J].Semiconductor Optoelectronics,2016,37(4):580-583.张娜,温中流,龚婧,等.一种高灵敏度制冷型科学级CCD相机的设计[J].半导体光电,2016,37(4):580-583.
[12]Xu W H,Wu H D.Design of ultra-high resolution CCD imaging systems[J].Optics&Precision Engineering,2012,20(7):1603-1610.许文海,吴厚德.超高分辨率CCD成像系统的设计[J].光学精密工程,2012,20(7):1603-1610.
[13]Zheng L L,Jin G,Qu H S,et al.Space-borne CCDimaging circuit system with high signal-to-noise ratio[J].Optics&Precision Engineering,2016,24(8):2027-2036.郑亮亮,金光,曲宏松,等.高信噪比星载CCD成像电路系统[J].光学精密工程,2016,24(8):2027-2036.
[14]Chang Z,Wang Y,Si F Q,et al.Design and implementation of ultraviolet imaging system based on scientific grade CCD[J].Chinese Journal of Lasers,2017,44(8):0804002.常振,王煜,司福祺,等.基于科学级CCD的紫外成像系统设计与实现[J].中国激光,2017,44(8):0804002.
[15]Zhao J,Zuo D L,Wang X B.Study on thermoelectrically cooled CCD in Raman spectrum detection system for gas analysis[J].Laser&Optoelectronics Progress,2016,53(7):070401.赵俊,左都罗,王新兵.气体拉曼光谱检测系统中热电制冷CCD研究[J].激光与光电子学进展,2016,53(7):070401.
[16]Hamamatus Photonics K K.Data sheet of CCD image sensors:S11071/S10420-1series[EB/OL].(2017-11-13)[2018-01-05].https:∥www.hamamatsu.com/jp/en/product/type/S10420-1106-01/index.html.
[17]Hamamatsu Photonics K K.Driver circuit for CCDimage sensor(S10420/S11071/S11510series)[EB/OL].(2017-02-14)[2018-01-05].https:∥www.hamamatsu.com/jp/en/product/type/C11287/index.html.
[18]Li Z,Yu A L,Zuo D L,et al.Analysis and correction of slit curvature in spectrograph with high NA[J].Acta Optica Sinica,2015,35(6):0630004.李哲,余安澜,左都罗,等.大口径光谱系统狭缝弯曲的分析与矫正[J].光学学报,2015,36(6):0630004.
[19]Zuo D L,Yu A L,Li Z,et al.Application of imaging spectrometer in gas analysis by Raman scattering[J].Proceedings of SPIE,2015,96110:96110N.
[20]Li J,Zhao J K,Chang M,et al.Radiometric calibration of photographic camera with a composite plane array CCD in laboratory[J].Optics&Precision Engineering,2017,25(1):73-83.李晶,赵建科,昌明,等.复合面阵CCD摄影相机的实验室辐射定标[J].光学精密工程,2017,25(1):73-83.
[21]Cheng S B,Zhang H G,Liu H,et al.Performance measurement of mechanical shutter and dark current for scientific-grade optical CCD[J].Acta Optica Sinica,2012,32(2):0204001.程书博,张惠鸽,刘浩,等.科学级光学CCD暗电流及机械快门时间响应特性测试[J].光学学报,2012,32(2):0204001.
[22]Widenhorn R,Mundermann L,Rest A,et al.MeyerNeldel rule for dark current in charge-coupled devices[J].Journal of Applied Physics,2001,89(12):8179-8182.
[23]Xia G,Huang C,Wu S,et al.Method of measuring gain and readout noise of miniature spectrometer[J].Acta Optica Sinica,2017,37(1):0112001.夏果,黄禅,吴骕,等.微型光谱仪增益及读出噪声的测量方法[J].光学学报,2017,37(1):0112001.
[24]Yu A,Zuo D,Li B,et al.Parabolic cell for lowbackground Raman analysis of gas samples[J].Applied Optics,2016,55(13):3650.
[25]Princeton Instruments.Data sheet of Pixis:400[EB/OL].(2017-06-23)[2018-01-05].https:∥www.princetoninstruments.com/products/PIXIS-CCD.
[26]Albraheem L,Al-Khalifa H S.Raman spectroscopy for chemical analysis[M].New York:John Wiley&Sons,2000.