基片表面应力对类石墨复合膜性能的影响
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摘要
试样基片经常规渗碳、淬火及不同的表面处理后,应用非平衡闭合磁控溅射技术在其表面镀制类石墨复合膜,分析不同基片应力状态下复合膜的组织和性能,研究基片表面不同应力状态对类石墨复合膜性能的影响。结果表明:表面应力状态对类石墨复合膜的形貌、成分、成膜速度及综合性能有一定的影响,适当的压应力可以有效改善类石墨复合膜的摩擦学性能。
The sample substrate was subjected to conventional carburizing, quenching and different surface treatment.Graphite-like composite film was deposited on its surface by unbalanced closed magnetron sputtering technique. The microstructure and properties of composite films with different substrates stress states were analyzed, and the effects of different stress states on the properties of graphite-like composite films were studied. The results show that, the surface stress state has a certain effect on the morphology, composition, film forming speed and comprehensive properties of graphite-like composite films. Proper compressive stress can effectively improve the tribological properties of graphite-like composite films.
The sample substrate was subjected to conventional carburizing, quenching and different surface treatment.Graphite-like composite film was deposited on its surface by unbalanced closed magnetron sputtering technique. The microstructure and properties of composite films with different substrates stress states were analyzed, and the effects of different stress states on the properties of graphite-like composite films were studied. The results show that, the surface stress state has a certain effect on the morphology, composition, film forming speed and comprehensive properties of graphite-like composite films. Proper compressive stress can effectively improve the tribological properties of graphite-like composite films.
引文
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[2]Riva A.Design engineering division and computer and information in engineering division[C]//Chicago:9th International Power Transmission and Gear Conference,2003:923-930.
[3]Du J, He J W.The preparation of graphite-like carbon film(GLC)and difference from diamond-like carbon(DLC)film[J].China Surface Engineering,2005,18(4):6-8.
[4]Stallard J, Mercs D, Jarratt M, et al.A study of the tribological behaviour of three carbon-based coatings,tested in air, water and oil environments at high loads[J].Surface&Coatings Technology,2004,177-178:545-551.
[5]王佐平,邢建东,胡乃赛,等.金属基体上石墨类成分涂层的微观结构分析[J].热加工工艺,2010,39-16:87-90.
[6]Wang Z P, Ma Z W, Chen P B, et al.Effects of rare earth and tantalum on graphite-like carbon coatings[J].Applied Surface Science,2011,257:1876-1880.