摘要
对CSP均热炉炉体表面温度进行了测试和散热计算,并结合CSP均热炉炉体材料、结构进行了散热分析,为CSP均热炉进行热平衡分析、减少均热炉散热损失提供了依据。
This paper tested the surface temperature of furnace body of CSP soaking furnace.Based on the radiating analysis of the CSP furnace body materials and structure,it offered a reference to heat balance analysis and reduction in heat-sinking loss for the CSP soaking furnace.
引文