一种扭转谐振式MEMS电场传感器
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摘要
提出了一种基于微机电系统(MEMS)的扭转谐振式电场传感器。该微型电场传感器的感应电极与屏蔽电极采用共面叉指结构,首次采用扭转谐振的工作方式,显著提高了微型电场传感器的灵敏度。介绍了传感器的工作原理、结构设计、有限元仿真及实验。实验结果表明:在0～50 kV/m电场范围内,该传感器的线性度为0. 14%,3个往返行程的总不确定度优于0. 43%。在增益电阻为100 MΩ的情况下,传感器灵敏度达到4. 55 mV/(kV/m),相对已有传感器灵敏度提高了1个数量级。
An electric field sensor( EFS) with torsional resonance based on micro-electro-mechanical system( MEMS) technology is proposed. For the first time,torsional resonance and coplanar electrodes are adopted,which leads to the increasement of the sensitivity. The working principle,structure design,finite element analysis( FEA)simulation and experiments are introduced. Experimental results prove that the linearity is 0. 14 % in electric field range of 0 ～ 50 kV/m,and the total uncertainty is prior to 0. 43 % in three roundtrip measurements. The sensitivity reaches 4. 55 mV/( kV/m) with gain-resistance of 100 MΩ,which is improved by at least one order of magnitude compared with previous available sensor.
An electric field sensor( EFS) with torsional resonance based on micro-electro-mechanical system( MEMS) technology is proposed. For the first time,torsional resonance and coplanar electrodes are adopted,which leads to the increasement of the sensitivity. The working principle,structure design,finite element analysis( FEA)simulation and experiments are introduced. Experimental results prove that the linearity is 0. 14 % in electric field range of 0 ～ 50 kV/m,and the total uncertainty is prior to 0. 43 % in three roundtrip measurements. The sensitivity reaches 4. 55 mV/( kV/m) with gain-resistance of 100 MΩ,which is improved by at least one order of magnitude compared with previous available sensor.
引文
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[2] SCHUMANN C,SABA M M F,DA SILVA R B G,et al. Electric fields changes produced by positives cloud-to-ground lightning flashes[J]. Journal of Atmospheric and Solar-Terrestrial Physics,2013,92:37-42.
[3] FERRO M A D S,YAMASAKI J,PIMENTEL D R M,et al.Lightning risk warnings based on atmospheric electric field measurements in Brazil[J]. Journal of Aerospace Technology and Management,2011,3(3):301-310.
[4] EVANS W H. The measurement of electric fields in clouds[J].Pure and Applied Geophysics(PAGEOPH),1965,62(1):191-197.
[5] HSU C H,MULLER R S. Micromechanical electrostatic voltmeter[C]∥1991 International Conference on Solid-State Sensors and Actuators,Transducers’91,IEEE,1991:659-662.
[6] PENG C,CHEN X,BAI Q,et al. A novel high performance micro-mechanical resonant electrostatic field sensor used in atmospheric electric field detection[C]∥2006 the 19th IEEE International Conference on Micro-Electro-Mechanical Systems,MEMS 2006,Istanbul,IEEE,2006:698-701.
[7] RIEHL P S,SCOTT K L,MULLER R S,et al. Electrostatic charge and field sensors based on micromechanical resonators[J]. Journal of Micro-Electro-Mechanical Systems,2003,12(5):577-589.
[8] YANG P,PENG C,ZHANG H,et al. A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes[C]∥2011 the 16th International Solid-State Sensors,Actuators and Microsystems Conference(Transducers), IEEE, 2011:1034-1037.
[9] MA Q,HUANG K,YU Z,et al. An electric field sensor with double-layer floating structure for measurement of DC synthetic field coupled with ion flow[C]∥2017 the 19th International Conference on Solid-State Sensors,Actuators and Microsystems(Transducers),IEEE,2017:890-893.
[10] BAHREYNI B,WIJEWEERA G,SHAFAI C,et al. Analysis and design of a micromachined electric-field sensor[J]. Journal of Micro-electro-mechanical Systems,2008,17(1):31-36.
[11]王宇,方东明,陈博,等.基于旋转谐振结构的单芯片二维电场传感器[J].传感器与微系统,2016,35(2):103-105.